Filter system for a reactor system

Patent metadata

Field	Value
Publication number	US-12296302-B2
Application number	US-202017136764-A
Country	US
Kind code	B2
Filing date	Dec 29, 2020
Priority date	Jan 6, 2020
Publication date	May 13, 2025
Grant date	May 13, 2025

Abstract

A filter system of a reactor system may comprise a filter vessel comprising an outer wall; a filter plate disposed in the filter vessel; and a filter disposed on the filter plate. The filter plate may comprise a first plate face and a second plate face with a plate body spanning therebetween; a first plate hole disposed through the plate body spanning between the first plate face and the second plate face; and/or a plate hole rim protruding from the first plate surface. The plate hole rim may be disposed at or proximate a plate hole edge defining the first plate hole, and/or at least partially surrounding the first plate hole. The first filter may be disposed on the first plate face, and the first filter may engage with the plate hole rim such that the plate hole rim positions the first filter in a desired position.

First claim

What is claimed is:

1. A filter system of a reactor system, comprising:
a filter vessel comprising an outer wall, wherein the outer wall at least partially defines an interior space of the filter vessel;
a filter plate disposed in the interior space, the filter plate comprising:
a first plate face and a second plate face with a plate body spanning therebetween;
a first plate hole disposed through the plate body spanning between the first plate face and the second plate face; and
a plate hole rim protruding from the first plate surface, wherein the plate hole rim is disposed at or proximate a plate hole edge defining the first plate hole, and at least partially surrounding the first plate hole;

a plurality of filters, including a first filter, disposed on the first plate face, wherein the first filter engages with the plate hole rim such that the plate hole rim positions the first filter in a desired position,
wherein the first filter comprises a filter bore disposed through a filter first end and a filter second end, the filter first end being opposite the filter second end, wherein the filter bore is in fluid communication with the first plate hole; and

a baffle plate disposed on the filter second end, wherein the baffle plate at least one of prevents or reduces a fluid from entering the filter bore through the filter second end and facilitates the fluid passing through a portion of the plurality of filters more proximate the outer wall,
wherein the baffle plate comprises a baffle plate hole disposed through the baffle plate facilitating a portion of the fluid to flow through the baffle plate, between the plurality of filters, and through a portion of the plurality of filters more proximate a center of the interior space of the filter vessel.

2. The filter system of claim 1 , wherein a shape of the plate hole rim is complementary to at least a portion of a shape of the filter bore at the filter first end, wherein the filter first end is contacting the first plate face, such that the plate hole rim is disposed within the filter bore.

3. The filter system of claim 1 , wherein the first filter comprises a filter material surrounding the filter bore and spanning between the filter first end and the filter second end, wherein the filter first end comprises a first filter end cap disposed thereon, and the filter second end comprises a second filter end cap disposed thereon, wherein the first filter end cap and the second filter end cap are coupled to a support bar spanning between the first filter end cap and the second filter end cap, wherein the support bar is at least one of monolithic or integral with the first filter end cap and the second filter end cap.

4. The filter system of claim 1 , further comprising a plurality of plate holes, including the first plate hole, disposed through the plate body, each having a respective plate hole rim disposed at or proximate a respective plate hole edge for each of the plurality of plate holes, wherein each of the plurality of filters comprises a respective filter bore, wherein each respective plate hole rim of the plurality of plate holes is disposed within the respective filter bore of one of the plurality of filters.

5. The filter system of claim 1 , wherein the filter vessel comprises a vessel bottom surface comprising a vessel bottom hole disposed through the vessel bottom surface, wherein the filter plate is disposed on the vessel bottom surface such that the first plate hole and the filter bore are in fluid communication with the vessel bottom hole.

6. The filter system of claim 5 , wherein the vessel bottom surface comprises a vessel bottom rim protruding from the vessel bottom surface and at least partially surrounding the vessel bottom hole, wherein the vessel bottom rim engages with the filter plate to control a position of the filter plate.

7. The filter system of claim 6 , wherein the filter plate comprises a filter plate recess into the plate body through the second plate face, wherein a shape of the filter plate recess is complementary to a shape of the vessel bottom rim, wherein the vessel bottom rim is disposed in the filter plate recess.

8. The filter system of claim 1 , wherein the outer wall comprises at least one protrusion extending from the outer wall into the interior space of the filter vessel between at least two of the plurality of filters.

Assignees

• Asm Ip Holding Bv

Inventors

• Kimtee Ankit
• Rane Rohan

Classifications

• B01D46/52

  Particle separators, e.g. dust precipitators, using filters embodying folded {corrugated or wound sheet} material · CPC title

• B01D2313/243

  Pumps · CPC title

• B01D46/56

  with multiple filtering elements, characterised by their mutual disposition (B01D46/12 takes precedence) · CPC title

• B01D2258/0216

  from CVD treatment or semi-conductor manufacturing · CPC title

• B01D46/0005

  Mounting of filtering elements within casings, housings or frames (B01D46/2422 takes precedence) · CPC title