Multi-waveband-tunable multi-scale meta-material and preparation method and spectral detection method thereof

Patent metadata

Field	Value
Publication number	US-12292377-B2
Application number	US-202118034105-A
Country	US
Kind code	B2
Filing date	Sep 8, 2021
Priority date	Jun 24, 2021
Publication date	May 6, 2025
Grant date	May 6, 2025

Abstract

A multi-waveband-tunable multi-scale meta-material and a preparation method and a spectral detection method thereof are provided. The meta-material includes a stretchable layer, a non-stretchable support layer, a metal layer, and a nanoparticle layer sequentially stacked from bottom to top. The stretchable layer is a polydimethylsiloxane (PDMS) layer. The non-stretchable support layer is a polyimide (PI) layer. The metal layer is a gold layer. The nanoparticle layer is modified with a hydrophobic group. The preparation method includes vacuum-evaporating fluorosilane on a silicon wafer, spin-coating PDMS, heat-curing PDMS, conducting plasma cleaning, spin-coating and curing PI, sputtering gold, self-assembling the nanoparticles on a water surface to form the nanoparticle layer, transferring the nanoparticle layer to the metal layer, and etching according to a pattern. The multi-waveband-tunable multi-scale meta-material can sense biochemical molecules by utilizing the advantages of multiple wavebands, is simple and fast to operate, and is suitable for various detection needs.

First claim

What is claimed is:

1. A multi-waveband-tunable multi-scale meta-material, comprising:
a stretchable layer, a non-stretchable support layer, a metal layer, and a nanoparticle layer sequentially stacked from bottom to top, wherein the stretchable layer is a polydimethylsiloxane (PDMS) layer; the non-stretchable support layer is a polyimide (PI) layer; the metal layer is a gold layer; and the nanoparticle layer is modified with a hydrophobic group.

2. The multi-waveband-tunable multi-scale meta-material according to claim 1 , wherein
nanoparticles are self-assembled on the metal layer to form the nanoparticle layer.

3. The multi-waveband-tunable multi-scale meta-material according to claim 1 , wherein
multiple basic units are arranged in an array at intervals on the stretchable layer; and each of the multiple basic units comprises the non-stretchable support layer, the metal layer, and the nanoparticle layer sequentially stacked from bottom to top.

4. A preparation method of the multi-waveband-tunable multi-scale meta-material according to claim 1 , comprising the following steps:
1) preparing the stretchable layer:
depositing a layer of fluorosilane molecules on a surface of a cleaned silicon wafer by a vacuum evaporation; and spin-coating a layer of a PDMS and heat-curing the layer of the PDMS to form the stretchable layer;
2) preparing the non-stretchable support layer:
subjecting the stretchable layer to a plasma cleaning, spin-coating a layer of PI, and curing the layer of the PI at 200° C. for 2 h to form the non-stretchable support layer;
3) preparing the metal layer:
sputtering gold with a thickness of 200 nm on a surface of the layer of the PI to form the metal layer;
4) preparing the nanoparticle layer:
modifying nanoparticles with the hydrophobic group, self-assembling the nanoparticles modified with the hydrophobic group on a water surface to form the nanoparticle layer, and transferring the nanoparticle layer to the metal layer to form the nanoparticle layer; and
5) etching a pattern of a meta-material:
etching the non-stretchable support layer, the metal layer, and the nanoparticle layer according to a preset pattern and removing the stretchable layer from the cleaned silicon wafer and the layer of the fluorosilane molecules.

5. The preparation method of the multi-waveband-tunable multi-scale meta-material according to claim 4 , wherein the nanoparticles of the nanoparticle layer is self-assembled on the water surface, a size of the nanoparticles is 10 nm-80 nm, and a structure of the nanoparticles is a silver-coated gold structure.

6. The preparation method of the multi-waveband-tunable multi-scale meta-material according to claim 4 , wherein the PDMS of the stretchable layer has a thickness of 10 μm-200 μm; and the PI of the non-stretchable support layer has a thickness of 1 μm-10 μm.

7. The preparation method of the multi-waveband-tunable multi-scale meta-material according to claim 4 , wherein the preset pattern is formed by multiple basic units arranged in an array at intervals; and each of the multiple basic units comprises the non-stretchable support layer, the metal layer, and the nanoparticle layer sequentially stacked from bottom to top.

8. A spectral detection method using the multi-waveband-tunable multi-scale meta-material according to claim 1 , comprising the following steps:
S1: dripping a sample solution onto the multi-waveband-tunable multi-scale meta-material:
preparing and dripping the sample solution onto the multi-waveband-tunable multi-scale meta-material and conducting a drying at 50° C. to form a sample to be detected; and
taking the multi-waveband-tunable multi-scale meta-material without being dripped with the sample solution as a reference sample;
S2: performing a terahertz spectral detection in a second waveband:
acquiring terahertz time-domain signals of the sample to be detected and the reference sample at a humidity of less than 0.2 RH separately, calculating terahertz frequency-domain signals based on the terahertz time-domain signals, determining locations of resonance peaks based on the terahertz frequency-domain signals, and taking a difference between a frequency of a resonance peak of the sample to be detected and a frequency of g resonance peak of the reference sample as a detection signal; and
S3: performing a Raman spectral detection in a first waveband:
putting the sample to be detected on a sample stage of a Raman spectrometer; focusing, by a confocal microscope, the sample to be detected; and randomly selecting three points in a detection range of 400 cm −1 -1,800 cm −1 for the Raman spectral detection.

9. The spectral detection method using the multi-waveband-tunable multi-scale meta-material according to claim 8 , wherein in the S1, 10 μL of the sample solution is dripped each time, and the drying is performed at 40° C.-60° C.

Assignees

• Univ Zhejiang

Inventors

• Xie Lijuan
• Wang Yingli
• Ying Yibin
• Liu Xiangjiang
• Li Lin

Classifications

• G01N21/65

  Raman scattering · CPC title

• G01N21/554

  detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance · CPC title

• G01N21/3586 Primary

  by Terahertz time domain spectroscopy [THz-TDS] · CPC title

• C23C14/0005

  Separation of the coating from the substrate · CPC title

• C23C14/042

  using masks · CPC title