Laser annealing device

Patent metadata

Field	Value
Publication number	US-12290874-B2
Application number	US-202016810152-A
Country	US
Kind code	B2
Filing date	Mar 5, 2020
Priority date	Jun 10, 2019
Publication date	May 6, 2025
Grant date	May 6, 2025

Abstract

A laser annealing device includes a laser generator, a beam splitter, a λ/2 phase difference member, a first reflective member, and a second reflective member. The laser generator emits a laser beam. The beam splitter splits the laser beam into a first reflective light and a transmissive light. The λ/2 phase difference member changes a polarization component of the transmissive light. The first reflective member reflects the transmissive light having the changed polarization component. The second reflective member reflects the transmissive light having the changed polarization component in a way such that the transmissive light having the changed polarization component which is reflected from the first reflective member is incident to the beam splitter.

First claim

What is claimed is:

1. A laser annealing device comprising:
a laser generator which emits a laser beam;
a beam splitter which splits the laser beam into a first reflective light and a transmissive light, wherein a polarization component of the transmissive light includes a P-polarization beam and an S-polarization beam;
a λ/2 phase difference member which changes a polarization component of the transmissive light from the beam splitter, wherein a relative position of the λ/2 phase difference member with respect to the beam splitter is fixed in a way such that the λ/2 phase difference member has a fixed angle with respect to the beam splitter;
a first reflective member which reflects the transmissive light having a changed polarization component by passing through the λ/2 phase difference member;
a second reflective member which reflects the transmissive light having the changed polarization component in a way such that the transmissive light having the changed polarization component, which is reflected from the first reflective member, is incident to the beam splitter; and
wherein a total output laser beam, which is generated by combining all output light that is directed from the beam splitter to a workpiece, is configured to have substantially equal proportions of P-polarization and S-polarization, and substantial uniformity of beam profile, in order that grains are formed substantially evenly during the laser annealing process.

2. The laser annealing device of claim 1 , wherein an optical axis of the λ/2 phase difference member is about 45°.

3. The laser annealing device of claim 1 , wherein
the first reflective light reflected from the beam splitter is defined as a first output light,
the transmissive light having the changed polarization component which passes the beam splitter after reflected from the second reflective member is defined as a second output light, and
the transmissive light having the changed polarization component which is reflected from the beam splitter after reflected from the second reflective member is defined as a second reflective light.

4. The laser annealing device of claim 3 , wherein
the polarization component of each of the first output light and the second output light is defined as the P-polarization beam and the S-polarization beam,
a proportion of the P-polarization beam is higher than a proportion of the S-polarization beam in the polarization component of the first output light, and
a proportion of the P-polarization beam is lower than a proportion of the S-polarization beam in the polarization component of the second output light.

5. The laser annealing device of claim 4 , wherein a proportion of the P-polarization beam is higher than a proportion of the S-polarization beam in a polarization component of the laser beam emitted from the laser generator.

6. The laser annealing device of claim 4 , wherein after a loop routine is repeated in which the second reflective light is incident to the λ/2 phase difference member, the first reflective member, the second reflective member and the beam splitter, a plurality of output lights passed through the beam splitter are generated, and
an output laser beam is generated by mixing the first and second output lights with the plurality of output lights.

7. The laser annealing device of claim 6 , wherein a proportion of P-polarization beam is equal to a proportion of an S-polarization beam in a polarization component of the output laser beam.

8. The laser annealing device of claim 6 , wherein
the P-polarization beam is defined in a direction parallel to the output laser beam, and
the S-polarization beam is defined in a direction perpendicular to the output laser beam.

9. The laser annealing device of claim 4 , further comprising:
an attenuator disposed between the laser generator and the beam splitter.

10. The laser annealing device of claim 9 , wherein a proportion of the S-polarization beam in a polarization component of the laser beam is reduced when the laser beam emitted from the laser generator passes through the attenuator.

11. The laser annealing device of claim 1 , wherein
a portion of the transmissive light having the changed polarization component which is reflected from the second reflective member passes through the beam splitter, and
a remaining portion of the transmissive light having the changed polarization component is reflected from the beam splitter.

12. The laser annealing device of claim 1 , wherein the beam splitter inverts a pulse shape of the laser beam.

13. The laser annealing device of claim 1 , wherein the N/2 phase difference member is disposed between the beam splitter and the first reflective member.

14. The laser annealing device of claim 1 , wherein
after the transmissive light having the changed polarization component which passes through the λ/2 phase difference member is reflected from the first reflective member, the transmissive light having the changed polarization component which is reflected from the first reflective member is incident to the second reflective member without passing through the λ/2 phase difference member.

15. A laser annealing device comprising:
a laser generator which emits a laser beam;
a beam splitter which splits the laser beam into a first reflective light and a transmissive light, wherein a polarization component of the transmissive light includes a P-polarization beam and an S-polarization beam;
a λ/4 phase difference member which changes a polarization component of the transmissive light from the beam splitter, wherein a relative position of the λ/4 phase difference member with respect to the beam splitter is fixed in a way such that the λ/4 phase difference member has a fixed angle with respect to the beam splitter, and the λ/4 phase difference member has an optical axis of about 45°;
a first reflective member disposed in contact with a rear surface of the X/4 phase difference member to reflect the transmissive light having a changed polarization component by passing through the λ/4 phase difference member;
a second reflective member which reflects the transmissive light having the changed polarization component in a way such that the transmissive light having the changed polarization component is incident to the beam splitter, after the transmissive light having the changed polarization component and reflected from the first reflective member passes through the λ/4 phase difference member; and
wherein a total output laser beam, which is generated by combining all output light that is directed from the beam splitter to a workpiece, is configured to have substantially equal proportions of P-polarization and S-polarization, and substantial uniformity of beam profile, in order that grains are formed substantially evenly during the laser annealing process.

16. The laser annealing device of claim 15 , wherein
the first reflective light reflected from the beam splitter is defined as a first output light,
the transmissive light having the changed polarization component which passes the beam splitter after reflected from the second reflective member is defined as a second output light, and
the transmissive light having the changed polarization component which is reflected from the beam splitter after reflected from the second reflective member is defined as a second reflective light.

17. The laser annealing device of claim 16 , wherein
the polarization component of each of the first output light and the second output light is defined as the P-polarization beam and the S-polarization beam,
a proportion o

Assignees

• Samsung Display Co Ltd

Inventors

• Lim Dong Eon
• Kang Sung Yong
• Kim Youngsik
• Kim Jisoo
• Kim Hyunjin

Classifications

• G02B27/106

  for splitting or combining a plurality of identical beams or images, e.g. image replication · CPC title

• G02B27/144

  using partially transparent surfaces without spectral selectivity (G02B27/147 takes precedence) · CPC title

• G02B27/145

  having sequential partially reflecting surfaces · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• H10K71/40

  Thermal treatment, e.g. annealing in the presence of a solvent vapour · CPC title