Substrate with a molybdenum nitride layer system, and coating method for producing a layer system
US-2022372629-A1 · Nov 24, 2022 · US
US12290862B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12290862-B2 |
| Application number | US-202318136081-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 18, 2023 |
| Priority date | Apr 19, 2021 |
| Publication date | May 6, 2025 |
| Grant date | May 6, 2025 |
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A method for coating a substrate 11 is disclosed. The method includes at least the following steps: depositing a first base layer 22 comprising a nitride of at least Al and Cr on the substrate 11 by physical vapor deposition at a gradually increasing substrate bias voltage from a first substrate bias voltage to a second substrate bias voltage; depositing a second base layer 23 comprising a nitride of at least Al and Cr on the first base layer 22 by physical vapor deposition at a constant substrate bias voltage that is greater or equal to the second substrate bias voltage; and depositing an outermost indicator layer 24 on the second base layer 23 , wherein the outermost indicator layer 24 comprises a nitride of Si and Me, wherein Me is at least one of Ti, Zr, Hf, and Cr, wherein the outermost indicator layer 24 is deposited by physical vapor deposition at a substrate bias voltage that is less than the constant substrate bias voltage applied during deposition of the second base layer 23.
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The invention claimed is: 1. A method for coating a substrate, the method comprising: depositing a first base layer comprising a nitride of at least Al and Cr on the substrate by physical vapor deposition at an increasing substrate bias voltage from a first substrate bias voltage to a second substrate bias voltage to provide increasing compressive stress in the first base layer; depositing a second base layer comprising a nitride of at least Al and Cr on the first base layer by physical vapor deposition at a constant substrate bias voltage that is greater or equal to the second substrate bias voltage to provide a constant compressive stress; and depositing an outermost indicator layer on the second base layer, wherein the outermost indicator layer comprises a nitride of Si and Me, wherein Me is at least one of Ti, Zr, Hf, and Cr, wherein the outermost indicator layer is deposited by physical vapor deposition at a substrate bias voltage that is less than the constant substrate bias voltage applied during deposition of the second base layer. 2. The method of claim 1 , wherein depositing the first base layer comprises depositing alternating sublayers using a first source material having a first ratio of Al: Cr and a second source material having a second ratio of Al:Cr, wherein the first ratio of Al:Cr is different than the second ratio of Al:Cr. 3. The method of claim 2 , wherein the first ratio of Al:Cr is lower than the second ratio of Al:Cr. 4. The method of claim 3 , wherein the first ratio of Al:Cr is 70:30 and the second ratio of Al:Cr is 90:10. 5. The method of claim 1 , wherein depositing the second base layer comprises depositing alternative sublayers, wherein the alternating sublayers include a first sublayer having a first ratio of Al:Cr and a second sublayer having a second ratio of Al:Cr, wherein the first ratio is different from the second ratio. 6. The method of claim 5 , wherein the first ratio of Al:Cr is lower than the second ratio of Al:Cr. 7. The method of claim 6 , wherein the first ratio of Al:Cr is 70:30 and the second ratio is 90:10. 8. The method of claim 1 , wherein the first base layer comprises at least 90 vol. % face-centered cubic crystalline phase. 9. The method of claim 1 , wherein the second base layer comprises at least 90 vol. % face-centered cubic crystalline phase. 10. The method of claim 1 , wherein the first base layer has a volume fraction of face-centered cubic crystalline phase that varies over a thickness direction to define a gradient from a first volume fraction of face-centered cubic crystalline phase at a first distance from the substrate to a second volume fraction of face-centered cubic crystalline phase at a second distance from the substrate, wherein the second volume fraction of face-centered cubic crystalline phase is greater than the first volume fraction of face-centered cubic crystalline phase. 11. The method of claim 10 , wherein the second base layer has a volume fraction of face-centered cubic crystalline phase that is substantially constant over a thickness direction, wherein the substantially constant volume fraction of face-centered cubic crystalline phase is greater than or equal to the second volume fraction of face-centered cubic crystalline phase of the first base layer. 12. The method of claim 1 , wherein the substrate has a rake face, a flank face, and a cutting edge formed at the intersection of the rake face and the flank face. 13. The method of claim 1 wherein the first base layer of AlCrN is face-centered cubic crystalline phase 111 with equal or higher intensity than a related 200 signal in an XRD Bragg Brentano scan. 14. A method for coating a substrate, the method comprising: depositing a first base layer consisting essentially of a nitride of Al and Cr on the substrate by physical vapor deposition at an increasing substrate bias voltage from a first substrate bias voltage to a second substrate bias voltage to provide increasing compressive stress in the first base layer; depositing a second base layer consisting essentially of a nitride of Al and Cr on the first base layer by physical vapor deposition at a constant substrate bias voltage that is greater or equal to the second substrate bias voltage to provide a constant compressive stress; and depositing an outermost indicator layer on the second base layer, wherein the outermost indicator layer comprises a nitride of Si and Me, wherein Me is at least one of Ti, Zr, Hf, and Cr, wherein the outermost indicator layer is deposited by physical vapor deposition at a substrate bias voltage that is less than the constant substrate bias voltage applied during deposition of the second base layer.
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