Pulsed DC power for deposition of film

Patent metadata

Field	Value
Publication number	US-12288670-B2
Application number	US-202217684911-A
Country	US
Kind code	B2
Filing date	Mar 2, 2022
Priority date	Mar 2, 2021
Publication date	Apr 29, 2025
Grant date	Apr 29, 2025

Abstract

A vapor deposition system and methods of operation thereof are disclosed. The vapor deposition system includes a vacuum chamber; a dielectric target within the vacuum chamber, the dielectric target having a front surface and a thickness; a substrate support within the vacuum chamber, the substrate support having a front surface spaced from the front surface of the dielectric target to form a process gap; and a signal generator connected to the dielectric target to generate a plasma in the vacuum chamber, the signal generator comprises a power source, the power source configured to prevent charge accumulation in the dielectric target. The method includes applying power to a dielectric target within a vacuum chamber to generate a plasma in a process gap between the dielectric target and a substrate support and pulsing the power applied to the dielectric target to prevent charge accumulation.

First claim

What is claimed is:

1. A method of depositing a dielectric film in a high aspect ratio feature of a semiconductor substrate, the method comprising:
applying power to a dielectric target within a vacuum chamber to generate a plasma in a process gap between the dielectric target and a substrate support, the power being a pulsed DC power having pulsed DC waveform, the pulsed DC waveform comprising a plurality of ON pulses and a plurality of OFF pulses, each of the ON pulses and the OFF pulses independently being in a range of from 1 μs to 50 μs, a voltage of the plurality of ON pulses being in a range of from greater than 9 V to 1500V, the pulsed DC waveform being generated at a frequency in a range of from 10 KHz to 500 kHz, and the pulsed DC waveform having a duty cycle in a range of from greater than 0 to less than 0.6;
pulsing the power applied to the dielectric target to prevent charge accumulation; and
applying a reverse bias to the substrate support using a reverse bias source, wherein the reverse bias source is AC power, DC power, or RF power, and wherein the reverse bias source is not pulsed,
the high aspect ratio feature having a height:width ratio greater than or equal to 10:1.

2. The method of claim 1 , wherein the dielectric target comprises one or more of lead zirconate titanate (PZT), lead magnesium niobate-lead titanate (PMN-PT), aluminium oxide (Al 2 O 3 ) or lithium niobate (LiNbO 3 ).

3. The method of claim 1 , wherein the target is maintained at a temperature in the range of from 0° C. to 60° C.

4. The method of claim 1 , wherein generating the plasma comprises supplying a plasma gas into the process gap.

5. The method of claim 4 , wherein the plasma gas flows from a gas source through a mass flow controller into the process gap.

6. The method of claim 4 , wherein the plasma gas is supplied at a flow rate in the range of from 2 sccm to 100 sccm.

7. The method of claim 4 , wherein the plasma gas maintains a pressure inside the process gap in the range of from 1 milliTorr to 30 milliTorr.

8. The method of claim 4 , wherein the plasma gas comprises one or more of helium (He), neon (Ne), argon (Ar), krypton (Kr) or Xenon (Xe).

9. The method of claim 1 , wherein the substrate comprises glass, sapphire, quartz, SrTiO 3 , LaAlO 3 , silicon (Si), silicon oxide coated silicon, or combinations thereof.

10. The method of claim 1 , wherein the reverse bias is applied in a range of from 0 V to 225 V.

Assignees

• Applied Materials Inc

Inventors

• Sangle Abhijeet Laxman
• Patil Nilesh
• Sharma Vijay Bhan
• Sivaramakrishnan Visweswaren

Classifications

• H10P14/69398

  the material having a perovskite structure, e.g. BaTiO3 · CPC title

• H10P14/69397

  the material containing two or more metal elements · CPC title

• H10P14/69391

  the material containing aluminium, e.g. Al2O3 · CPC title

• H10P14/6329

  using physical ablation of a target, e.g. physical vapour deposition or pulsed laser deposition · CPC title

• H10P72/0468

  comprising a chamber adapted to a particular process · CPC title