Hollow waveguide for gas detection

Patent metadata

Field	Value
Publication number	US-12287285-B2
Application number	US-202118011570-A
Country	US
Kind code	B2
Filing date	Jun 24, 2021
Priority date	Jun 24, 2020
Publication date	Apr 29, 2025
Grant date	Apr 29, 2025

Abstract

A sensor system, the manufacturing of such system, and the use of such system for optical detection of a target analyte in a gaseous medium are described. The sensor system includes a hollow waveguide that is provided with a reflective mirror layer along its inner wall and a concentrating coating of an inorganic sorption material. The mirror layer defines a light path for guiding light between a light inlet and a light outlet that are provided on opposing terminal ends of the hollow waveguide. The concentrating coating increases an effective concentration of target analytes, if present, and allows optical, preferably spectroscopic, analysis of the medium by recording transmission of light, preferably infrared light, guided through the hollow waveguide.

First claim

The invention claimed is:

1. A sensor system for spectroscopic detection of a target analyte in a gaseous medium, the sensor system comprising a hollow waveguide having an elongate interior space defining a gas flow path that is confined by an inner wall of the hollow waveguide, the hollow waveguide comprising:
a reflective mirror layer that is provided along the inner wall of the hollow waveguide, forming a light path for guiding light from a source though the elongate interior space between a light inlet that is provided on one terminal end of the hollow waveguide and a light outlet that is provided on an opposing terminal end of the hollow waveguide;
a concentrating coating of an inorganic sorption material that is provided onto at least a part of the reflective mirror layer, wherein at least a portion of the concentrating coating overlaps with the light path;
an infrared light source for generating light coupled to the light inlet; and
an infrared light detector coupled to the light outlet arranged to record a transmittance spectrum of the light guided through the hollow waveguide,
wherein the reflective mirror layer is a silver layer, and
wherein the sensor system further comprises:
a silver halide layer between the reflective mirror layer and the concentrating coating; and
an interlayer essentially consisting of oxides of one or more of the group consisting of: aluminum, chromium, zinc, titanium, and silicon;
wherein the interlayer is between the silver halide layer and the concentrating coating.

2. The sensor system according to claim 1 , wherein the inorganic sorption material is provided as nanoparticles.

3. The sensor system according to claim 1 , wherein the inorganic sorption material is essentially comprised of zirconium oxide and/or porous zirconium oxide.

4. The sensor system according to claim 1 wherein the inorganic sorption material comprises one or more materials taken from the group consisting of: porous silicon oxide, porous aluminum oxide, zeolites, porous glass, porous quartz, and porous mullite.

5. The sensor system according to claim 1 , wherein the reflective mirror layer is a silver layer, and
wherein the hollow waveguide is a hollow fiber having a length in a range between two and twenty centimeters and an interior space having a diameter in a range between 0.5 and five millimeters.

6. The sensor system according to claim 1 , comprising a coupling adapter that is arranged to be coupled from a first end to a terminal end of the hollow waveguide and that, when connected, provides a fluid connection from an inlet to the elongate interior space, and that is arranged to receive an optical fiber from a second end, opposite the first end, to guide light into or out of the elongate interior space.

7. The sensor system according to claim 1 , wherein the light source is a broadband infrared light source, and
wherein the system comprises a controller for recording and/or analyzing a light detector output.

8. A method of manufacturing a sensor system for spectroscopic detection of a target analyte in a gaseous medium, the sensor system comprising a hollow waveguide having an elongate interior space defining a gas flow path that is confined by an inner wall of the hollow waveguide, the hollow waveguide comprising:
a reflective mirror layer that is provided along the inner wall of the hollow waveguide, forming a light path for guiding light from a source though the elongate interior space between a light inlet that is provided on one terminal end of the hollow waveguide and a light outlet that is provided on an opposing terminal end of the hollow waveguide;
a concentrating coating of an inorganic sorption material that is provided onto at least a part of the reflective mirror layer, wherein at least a portion of the concentrating coating overlaps with the light path;
an infrared light source for generating light coupled to the light inlet; and
an infrared light detector coupled to the light outlet arranged to record a transmittance spectrum of the light guided through the hollow waveguide
wherein the method of manufacturing comprises:
providing the hollow waveguide;
depositing the reflective mirror layer along the inner wall of the hollow waveguide; and
depositing inorganic sorption material to form the concentrating coating along the reflective mirror layer,

wherein the reflective mirror layer is a silver layer, and
wherein the method further comprises:
depositing a silver halide layer between the reflective mirror layer and the concentrating coating; and
depositing, prior to depositing the inorganic sorption material, an interlayer essentially consisting of oxides of one or more of the group consisting of: aluminum, chromium, zinc, titanium, and silicon;
wherein the interlayer is between the silver halide layer and the concentrating coating.

9. The method according to claim 8 , wherein the depositing inorganic sorption material comprises contacting the hollow waveguide with a suspension comprising a material taken from the group consisting of: zirconium oxide, silicon oxide, aluminum oxide, and zeolite nanoparticles.

10. The method according to claim 8 , wherein the depositing inorganic sorption material comprises contacting the hollow waveguide with a solution comprising one or more precursors to one or more materials taken from the group consisting of: zirconium oxide, silicon oxide, aluminum oxide, and zeolite.

11. The method according to claim 8 , wherein depositing the interlayer comprises:
depositing, as a precursor film, a metal or metalloid film to the interlayer, and
oxidizing the precursor film.

12. A method of performing spectroscopic detection of a target analyte in a gaseous medium, wherein the method comprises use of a sensor system for spectroscopic detection of a target analyte in a gaseous medium, the sensor system comprising a hollow waveguide having an elongate interior space defining a gas flow path that is confined by an inner wall of the hollow waveguide, the hollow waveguide comprising:
a reflective mirror layer that is provided along the inner wall of the hollow waveguide, forming a light path for guiding light from a source though the elongate interior space between a light inlet that is provided on one terminal end of the hollow waveguide and a light outlet that is provided on an opposing terminal end of the hollow waveguide;
a concentrating coating of an inorganic sorption material that is provided onto at least a part of the reflective mirror layer, wherein at least a portion of the concentrating coating overlaps with the light path;
an infrared light source for generating light coupled to the light inlet; and
an infrared light detector coupled to the light outlet arranged to record a transmittance spectrum of the light guided through the hollow waveguide,
wherein the reflective mirror layer is a silver layer, and
wherein the sensor system further comprises:
a silver halide layer between the reflective mirror layer and the concentrating coating; and
an interlayer essentially consisting of oxides of one or more of the group consisting of: aluminum, chromium, zinc, titanium, and silicon;

wherein the interlayer is between the silver halide layer and the concentrating coating.

13. The method according to claim 12 , wherein the method of performing spectroscopic detection of a target analyte comprises:
guiding the gaseous medium through the hollow waveguide;
guiding light from a broadband infrared light source coupled into the hollow waveguide through the hollow waveguide;
recording a transmittance spectrum of the light guided through the hollow waveguide with the in

Assignees

• TNO

Inventors

• Boersma Arjen
• Nunez Villanueva Javier
• Van Den Ham Evert Jonathan

Classifications

• G01N2201/0873

  Using optically integrated constructions · CPC title

• G01N2201/061

  Sources · CPC title

• C03C25/1061

  Inorganic coatings · CPC title

• G01N2021/052

  Tubular type; cavity type; multireflective · CPC title

• G01N2021/0346

  Capillary cells; Microcells · CPC title