Method for forming and patterning color centers

Patent metadata

Field	Value
Publication number	US-12286539-B2
Application number	US-201917291494-A
Country	US
Kind code	B2
Filing date	Oct 30, 2019
Priority date	Nov 6, 2018
Publication date	Apr 29, 2025
Grant date	Apr 29, 2025

Abstract

This disclosure enables the generation and patterning of color centers with nanometer-scale spatial control in a variety of materials in repeatable fashion and without the use of radiation. Embodiments in accordance with the present disclosure employ a layer of vacancy-injection material disposed on a host-material, where the vacancy-injection material forms a compound with host-material atoms at elevated temperatures. During compound formation, lattice vacancies are generated in the host material and diffuse within the substrate lattice to bond with impurity atoms, thereby forming color centers. High-resolution lithographic patterning of the vacancy-injection film and the short diffusion lengths of the lattice vacancies enables nanometer-level spatial control over the lateral positions of the color centers. Furthermore, the depth of the color centers in the substrate can be controlled by controlling the coating material, thickness, anneal time, and anneal temperature.

First claim

What is claimed is:

1. A method for forming color centers ( 110 ) in a body ( 102 ), the method including:
providing the body such that it includes a first region (R 1 ) that comprises a first material ( 106 ) and a first impurity ( 108 );
forming a first layer ( 302 ) having a first portion (P 1 ) disposed on and in contact with the first region, wherein the first layer comprises a second material ( 304 ), and wherein the first and second materials collectively form a first compound ( 308 ) at a first temperature (T 1 ); and
heating the first layer and the body to the first temperature, wherein heating the first layer and the body to the first temperature causes:
(1) diffusion of a first plurality of atoms ( 314 ) of the first material from the first region into the first portion to create a first plurality of vacancies ( 310 ) in the first region; and
(2) interaction of the first plurality of vacancies and atoms ( 306 ) of the first impurity to thereby form a first plurality of color centers ( 110 ) in the first region.

2. The method of claim 1 further including removing the first layer and the first compound.

3. The method of claim 1 the first compound comprises a carbide.

4. The method of claim 1 wherein the first material is selected from the group consisting of diamond, silicon carbide, graphite, graphene, metal oxides, and transition-metal dichalcogenides (TMD).

5. The method of claim 1 wherein the second material is selected from the group consisting of aluminum, titanium, tantalum, and tungsten.

6. The method of claim 1 wherein the first impurity is selected from the group consisting of nitrogen, silicon, germanium, lead, and oxygen.

7. The method of claim 1 wherein the first material comprises diamond and the second material comprises aluminum.

8. The method of claim 7 wherein the first impurity comprises nitrogen.

9. The method of claim 1 wherein the body comprises at least one nanoparticle.

10. The method of claim 1 :
wherein the body is provided such that it further includes a second region (R 2 ) that comprises the first material and the first impurity;
wherein the first layer is formed such that it has a second portion (P 2 ) disposed on and in contact with the second region; and
wherein heating the first layer and the body to the first temperature further enables:
(3) diffusion of a second plurality of atoms of the first material from the second region into the second portion to create a second plurality of vacancies in the second region; and
(4) interaction of the second plurality of vacancies and atoms of the first impurity to form a second plurality of color centers in the second region.

11. The method of claim 10 wherein the first layer is formed such that it has a feature that is less than or equal to one micron, and wherein the feature is selected from the group consisting of (1) a separation (s 1 ) between the first portion and second portion and (2) a lateral dimension (w 1 ) of at least one of the first portion and the second portion.

12. A method for forming color centers ( 110 ) in a body ( 102 ), the method including:
providing the body such that it includes a first region (R 1 ) that comprises diamond and nitrogen;
forming a first layer ( 302 ) having a first portion (P 1 ) disposed on and in contact with the first region, wherein the first layer comprises aluminum; and
heating the first layer and the body to a first temperature (T 1 ), wherein heating the first layer and the body to the first temperature enables:
(1) formation of a carbide ( 308 ) on the first region;
(2) diffusion of a first plurality of carbon atoms ( 314 ) from the first region into the first portion to create a plurality of vacancies ( 310 ) in the first region; and
(3) interaction of the plurality of vacancies and nitrogen atoms ( 306 ) in the first region to form a first plurality of nitrogen-vacancy (NV) color centers ( 110 ) in the first region.

13. The method of claim 12 wherein the body comprises at least one nanoparticle ( 704 ).

14. The method of claim 12 further including removing the first layer and the carbide.

15. The method of claim 12 :
wherein the body is provided such that it further includes a second region (R 2 ) that comprises diamond and nitrogen;
wherein the first layer is formed such that it has a second portion (P 2 ) disposed on and in contact with the second region; and
wherein heating the first layer and the body further enables:
(3) formation of a carbide on the second region;
(4) diffusion of a second plurality of carbon atoms from the second region into the second portion to create a second plurality of vacancies in the second region; and
(4) interaction of the second plurality of vacancies and nitrogen atoms to form a second plurality of NV color centers in the second region.

Assignees

• Univ Leland Stanford Junior

Inventors

• Melosh Nicholas Alexander
• Gebbie Matthew A
• Mcquade Patrick
• Gonzalez Andrew E

Classifications

• H10F39/806 Primary

  Optical elements or arrangements associated with the image sensors · CPC title

• H10F39/024

  of coatings or optical elements · CPC title

• G02B2207/101

  Nanooptics · CPC title

• C23C16/56

  After-treatment · CPC title

• C23C16/4417

  Methods specially adapted for coating powder · CPC title