Systems and methods for integrating ultrasonic transducers with hybrid contacts

Patent metadata

Field	Value
Publication number	US-12274174-B2
Application number	US-202117159538-A
Country	US
Kind code	B2
Filing date	Jan 27, 2021
Priority date	Aug 1, 2018
Publication date	Apr 8, 2025
Grant date	Apr 8, 2025

Abstract

Disclosed herein are ultrasonic transducer systems with hybrid contacts comprising: an ultrasonic transducer element comprising a substrate and a membrane; an electrical circuitry; and one or more contacts connected to the ultrasonic transducer element and the electrical circuitry, wherein the one or more contacts are: designed geometrically using a set of rules; arranged with respect to the membrane based on the set of rules or a second set of rules, or both.

First claim

What is claimed is:

1. An ultrasonic transducer system with hybrid contacts comprising:
a) a micromachined ultrasonic transducer (MUT) element comprising a substrate and a membrane;
b) an electrical circuitry comprising an application specific integrated circuit (ASIC); and
c) one or more hybrid contacts configured to couple the transducer element to the ASIC, wherein the one or more hybrid contacts are each capable of providing an electrical connection between the MUT and the ASIC and a mechanical connection that provides structural rigidity to the transducer system, wherein each of the one or more hybrid contacts comprises a cylindrical shape such that the hybrid contacts comprise a single diameter from a surface of the ASIC to a top of the contact, wherein a ratio of a height of the hybrid contact to the diameter of the hybrid contact is between approximately 1:2 to 2:1, wherein the shape and placement of the hybrid contacts are designed to enhance dynamics of the ultrasonic transducer system.

2. The ultrasonic transducer system of claim 1 , further comprising:
a) a second ultrasonic transducer element comprising a second substrate and a second membrane;
b) a second electrical circuitry; and
c) one or more additional contacts connected to the second ultrasonic transducer element and the second electrical circuitry, wherein the one or more additional contacts are one or more of: electrical contacts, mechanical contacts, or hybrid contacts.

3. The ultrasonic transducer system of claim 2 , wherein the ultrasonic transducer element and the second ultrasonic transducer element form a two-dimensional array with a plurality of additional ultrasonic transducer elements.

4. The ultrasonic transducer system of claim 1 , further comprising one or more contacts that are electrical contacts only or mechanical contacts only.

5. The ultrasonic transducer system of claim 1 , wherein the one or more hybrid contacts are configured to provide electrical connection and mechanical connection simultaneously or electrical connection but not mechanical connection when a predetermined threshold condition has been met.

6. The ultrasonic transducer system of claim 1 , wherein the one or more hybrid contacts comprise an aspect ratio of height to effective diameter of approximately 1:1.

7. The ultrasonic transducer system of claim 1 , further comprising an array of contacts comprising one or more of: a range of spacing of the one or more contacts of no less than about 5 μm, a minimum number of 2 of electrical contacts within the ultrasonic transducer element, a maximum number of 4 of electrical contacts within the ultrasonic transducer element, a minimum number of 2 of mechanical contacts within the ultrasonic transducer element, a maximum number of 10 of mechanical contacts within the ultrasonic transducer element, a minimum number of hybrid contacts within the ultrasonic transducer element, and a maximum number of hybrid contacts within the ultrasonic transducer element.

8. The ultrasonic transducer system of claim 7 , further comprising:
a) arranging the array of contacts to be symmetrical about an axis of the membrane; and
b) arranging the array of contacts to surround the membrane, or their combination.

9. The ultrasonic transducer system of claim 6 , wherein the shape of the one or more hybrid contacts is an annular shape that provides a fixed boundary condition that improves performance of the ultrasonic transducer element.

10. The ultrasonic transducer system of claim 8 , wherein a symmetrical contact arrangement enables a higher maximum surface velocity than that of an asymmetrical contact arrangement, and wherein the maximum surface velocity of the membrane is directly related to a maximum pressure output achievable with the ultrasonic transducer element.

11. The ultrasonic transducer system of claim 1 , wherein the aspect ratio of height to diameter of approximately 0.6:1 to 1.5:1.

12. The ultrasonic transducer system of claim 1 , wherein the diameter of the hybrid contacts is approximately 50 μm and the height of the hybrid contacts is approximately 50 μm.

13. A method of improving performance of an ultrasonic transducer system using hybrid contacts, comprising:
a) obtaining an ultrasonic transducer system, the ultrasonic transducer system comprising:
an ultrasonic transducer element comprising a substrate and a membrane; and
an electrical circuitry connected to the ultrasonic transducer element, the electrical circuitry comprising an application specific integrated circuit (ASIC);

b) obtaining one or more hybrid contacts, the one or more hybrid contacts each being capable of providing an electrical connection and a mechanical connection, wherein the hybrid contacts comprise a cylindrical shape with an aspect ratio of height to diameter of approximately 1:2 to 2:1 and wherein a size of the hybrid contacts is larger than necessary to provide the electrical connection in order to provide the mechanical connection that provides structural stability to the ultrasonic transducer system to enhance dynamics of the ultrasonic transducer system; and
c) adding the one or more hybrid contacts to the ultrasonic transducer system, comprising:
arranging the one or more hybrid contacts with respect to the membrane; and
coupling the transducer element to the ASIC through the hybrid contacts.

14. The method of claim 13 , wherein the ultrasonic transducer element is a micromachined ultrasonic transducer (MUT) element.

15. The method of claim 13 , wherein the ultrasonic transducer system further comprises:
a second ultrasonic transducer element comprising a second substrate and a second membrane;
a second electrical circuitry; and
one or more additional contacts connected to the second ultrasonic transducer element and the second electrical circuitry,
wherein the one or more additional contacts are one or more of: electrical contacts, mechanical contacts, or hybrid contacts.

16. The method of claim 15 , wherein the ultrasonic transducer element and the second ultrasonic transducer element form a two-dimensional array with a plurality of additional ultrasonic transducer elements.

17. The method of claim 13 , wherein the one or more hybrid contacts are configured to provide electrical connection and mechanical connection simultaneously or electrical connection but not mechanical connection when a predetermined threshold condition has been met.

18. The method of claim 13 , wherein the one or more hybrid contacts comprise: a range of diameter, a range of height, a range of aspect ratio, and comprise a shape, wherein (i) the range of diameter is about 5 μm to about 100 μm, (ii) the range of height is about 0 μm to about 300 μm, (iii) the aspect ratio of height to effective diameter is less than about 60:1, or (iv) the shape is selected from the group consisting of a cylinder, an annular shape, and an elongated shape.

19. The method of claim 13 , further comprising an array of contacts comprising one or more of: a range of spacing of the one or more contacts to the membrane, a minimum number of electrical contacts within the ultrasonic transducer element, a maximum number of electrical contacts within the ultrasonic transducer element, a minimum number of mechanical contacts within the ultrasonic transducer element, a maximum number of mechanical contacts within the ultrasonic transducer element, a minimum number of hybrid contacts within the ultrasonic transducer element, a maximum number of hybrid contacts within the ultrasonic transducer element.

Assignees

• Exo Imaging Inc

Inventors

• Kwon Haesung
• Bircumshaw Brian
• Akkaraju Sandeep

Classifications

• H10N30/802

  Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits · CPC title

• H10N30/06

  Forming electrodes or interconnections, e.g. leads or terminals · CPC title

• B06B1/0666

  used as a diaphragm · CPC title

• B06B1/0622 Primary

  on one surface · CPC title

• B06B1/0207

  Driving circuits (specially adapted for particular applications, see the relevant subclass, e.g. G01; circuits for steering transducer arrays G10K11/34; basic circuits H03) · CPC title