Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US12264994B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12264994-B2 |
| Application number | US-202318124483-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 21, 2023 |
| Priority date | May 24, 2022 |
| Publication date | Apr 1, 2025 |
| Grant date | Apr 1, 2025 |
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Aspects of the subject technology relate to a device including a pressure sensor to measure a pressure level in a port cavity. A port allows equalization of air pressure between the port cavity and an outside environment. A vent port within the port cavity allows equalization of air pressure between the port cavity and an internal volume of a housing of the device. A tool is used to activate a heat-generating component of the device while the port is obstructed for a predetermined time duration to enable detecting a sealing efficacy of the housing.
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What is claimed: 1. A system comprising: a pressure sensor configured to measure a pressure level in a port cavity; a first port configured to allow equalization of air pressure between the port cavity and an outside environment; a second port within the port cavity and configured to allow equalization of air pressure between the port cavity and an internal volume of a housing of the system; and a tool configured to activate a heat-generating component of the system while the first port is obstructed for a predetermined time duration to enable detecting a seal efficacy of the housing. 2. The system of claim 1 , wherein the heat-generating component comprises, a system-on-chip, a graphical processing-unit, a power management unit, and a battery charger. 3. The system of claim 2 , wherein the battery charger comprises a wireless charger and is used as the heat-generating component when the system is placed on the wireless charger. 4. The system of claim 1 , wherein the tool comprises a software tool including an application running on the system. 5. The system of claim 1 , wherein the first port is configured to be externally obstructed manually by a user. 6. The system of claim 1 , wherein the first port is configured to be externally obstructed by using an auxiliary component. 7. The system of claim 1 , wherein the second port comprises an air-permeable and waterproof membrane. 8. The system of claim 1 , further comprising a pressure monitor configured to display a reading of a pressure of the internal volume of the housing, and wherein the seal efficacy of the housing is detected by examining a response of the pressure of the internal volume of the housing to a temperature rise due to an activation of the heat-generating component. 9. The system of claim 8 , wherein damage to a seal of the housing is detected by a non-rising pressure reading of the pressure monitor while the internal volume of the housing is heated by the heat-generating component. 10. The system of claim 8 , wherein the predetermined time duration is one of within a range of 30 to 60 seconds or related to a threshold rise in the pressure of the internal volume of the housing. 11. A smart device comprising: one or more heat-generating components configured to be activated by a tool; a housing sealed from an outside environment by a sealing component that is configured to prevent moisture from entering the housing; and a pressure sensor disposed in a cavity and configured to measure a pressure inside the cavity, wherein the pressure inside the cavity is equalized with the outside environment via a first port and with a pressure of an internal volume of the housing via a second port, wherein the tool is configured to activate at least one of the one or more heat-generating components while the first port is obstructed for a predetermined period to enable detecting a sealing efficacy. 12. The smart device of claim 11 , wherein the tool comprises a software tool including an application running on the smart device. 13. The smart device of claim 11 , wherein the first port is configured to be externally obstructed by a fingertip. 14. The smart device of claim 11 , wherein the second port comprises an air-permeable and waterproof membrane. 15. The smart device of claim 11 , further comprising a pressure indicator configured to display a reading of the pressure of the internal volume of the housing. 16. The smart device of claim 15 , wherein the sealing efficacy is detected by a non-rising pressure reading of the pressure indicator while a temperature of the internal volume of the housing is increased by the heat-generating components. 17. The smart device of claim 11 , wherein the one or more heat-generating components comprise a system-on-chip, a graphical processing-unit, a power management unit, and a battery charger. 18. The smart device of claim 17 , wherein the battery charger comprises a wireless charger and is used as a heat-generating component when the smart device is placed on the wireless charger. 19. A method comprising: obstructing a first port of a device using one of a fingertip or an auxiliary component, the first port allowing equalization of air pressure between a port cavity and an outside environment; activating a heat-generating component of the device to enable heating of an internal volume of a housing, wherein the housing is coupled to the port cavity via a second port that allows equalization of air pressure between the port cavity and an internal volume of the housing; reading a pressure measured by a pressure sensor located within the port cavity after a predetermined time; and determining a sealing efficacy of the housing by a read pressure while the heating of the internal volume of the housing is underway. 20. The method of claim 19 , further comprising using a tool including a software tool to activate the heat-generating component, wherein the heat-generating component comprises a system-on-chip, a graphical processing-unit, a power management unit, and a battery charger, and wherein the predetermined time is within a range of 30 to 60 seconds.
by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors · CPC title
for verifying the internal pressure of closed containers · CPC title
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