Fluid control device

Patent metadata

Field	Value
Publication number	US-12259057-B2
Application number	US-202217818758-A
Country	US
Kind code	B2
Filing date	Aug 10, 2022
Priority date	Feb 26, 2020
Publication date	Mar 25, 2025
Grant date	Mar 25, 2025

Abstract

A fluid control device includes a first main plate, a second main plate, a driving body, a frame body, a plurality of support bodies, a plurality of gaps, a side wall member, a valve film, and a fixing member. A pump chamber is formed by a flat plate part consisting of the first main plate, the frame body, and the plurality of support bodies, and the second main plate and the side wall member. The valve film is disposed on a main surface of the first main plate on the side where the pump chamber is located. The valve film has an annular shape and fixed to the first main plate by the fixing member so that an outer end thereof is a movable end. The outer end of the valve film overlaps the plurality of gaps located between the plurality of support portions in plan view.

First claim

The invention claimed is:

1. A fluid control device comprising:
a first main plate having a first main surface and a second main surface;
a second main plate having a third main surface facing the first main surface and a fourth main surface on an opposite side from the third main surface, and having a first hole penetrating between the third main surface and the fourth main surface and through which a fluid flows;
a driving body disposed on the second main surface and causing the first main plate to vibrate;
a frame body provided at an outer side than an outer edge of the first main plate;
support portions connecting the frame body and the first main plate to each other and supporting the first main plate to allow the first main plate to vibrate relative to the frame body;
a side wall member connecting the second main plate and the frame body to each other and providing a pump chamber between the first main surface and the third main surface;
a valve member including a flexible valve film and a fixing member, the fixing member fixing an inner end side of the valve film to the first main surface, the valve member having an inner end being a fixed end and an outer end being a movable end; and
a second hole surrounded by an outer edge of the first main plate, the frame body, and two of the support portions adjacent to each other, allowing communication between an inside of the pump chamber and an outside of the pump chamber, and through which the fluid passes,
wherein an outer end of the valve member overlaps the second hole when the first main surface is seen in plan view.

2. A fluid control device comprising:
a first main plate having a first main surface and a second main surface;
a second main plate having a third main surface facing the first main surface and a fourth main surface on an opposite side from the third main surface, and having a first hole penetrating between the third main surface and the fourth main surface and through which a fluid flows;
a driving body disposed on the second main surface and causing the first main plate to vibrate;
a frame body provided at an outer side than an outer edge of the first main plate;
support portions connecting the frame body and the first main plate to each other and supporting the first main plate to allow the first main plate to vibrate relative to the frame body;
a side wall member connecting the second main plate and the frame body to each other and providing a pump chamber between the first main surface and the third main surface;
a valve member including a flexible valve film and a fixing member, the fixing member fixing an inner end side of the valve film to the first main surface, the valve member having an inner end being a fixed end and an outer end being a movable end; and
a second hole surrounded by an outer edge of the first main plate, the frame body, and two of the support portions adjacent to each other, allowing communication between an inside of the pump chamber and an outside of the pump chamber, and through which the fluid passes,
wherein a recess recessed from the first main surface where the fixing member is placed is provided in a part of the first main surface overlapping an outer end of the valve member when the first main surface is seen in plan view.

3. The fluid control device according to claim 1 ,
wherein the second main plate includes a protruding part protruding from the third main surface, and
the protruding part overlaps an outer end of the valve film in plan view.

4. The fluid control device according to claim 3 ,
wherein the protruding part does not overlap the fixing member in plan view.

5. The fluid control device according to claim 3 ,
wherein the protruding part overlaps the fixing member in plan view.

6. The fluid control device according to claim 3 ,
wherein the protruding part is provided so as to be integrated with the second main plate.

7. The fluid control device according to claim 3 ,
wherein an end surface of the protruding part of the second main plate and a bonding surface where the second main plate is bonded to the side wall member lie on the same plane.

8. The fluid control device according to claim 1 ,
wherein the first hole overlaps the fixing member in plan view.

9. The fluid control device according to claim 1 ,
wherein the valve film and the fixing member have annular shapes.

10. The fluid control device according to claim 1 ,
wherein the valve film and the fixing member are shaped so as not to have openings at centers thereof.

11. The fluid control device according to claim 1 ,
wherein an outer shape of the valve film is a circular shape.

12. The fluid control device according to claim 2 ,
wherein the second main plate includes a protruding part protruding from the third main surface, and
the protruding part overlaps an outer end of the valve film in plan view.

13. The fluid control device according to claim 4 ,
wherein the protruding part is provided so as to be integrated with the second main plate.

14. The fluid control device according to claim 5 ,
wherein the protruding part is provided so as to be integrated with the second main plate.

15. The fluid control device according to claim 4 ,
wherein an end surface of the protruding part of the second main plate and a bonding surface where the second main plate is bonded to the side wall member lie on the same plane.

16. The fluid control device according to claim 5 ,
wherein an end surface of the protruding part of the second main plate and a bonding surface where the second main plate is bonded to the side wall member lie on the same plane.

17. The fluid control device according to claim 6 ,
wherein an end surface of the protruding part of the second main plate and a bonding surface where the second main plate is bonded to the side wall member lie on the same plane.

18. The fluid control device according to claim 2 ,
wherein the first hole overlaps the fixing member in plan view.

19. The fluid control device according to claim 3 ,
wherein the first hole overlaps the fixing member in plan view.

20. The fluid control device according to claim 4 ,
wherein the first hole overlaps the fixing member in plan view.

Assignees

• Murata Manufacturing Co

Inventors

• KAWABATA Yutoku
• Tanaka Nobuhira

Classifications

• F04B43/046

  with piezoelectric drive · CPC title

• F16K99/0048

  using piezoelectric means · CPC title

• F04B43/043 Primary

  Micropumps · CPC title

• F16K99/0015

  Diaphragm or membrane valves · CPC title

• F16K31/005 Primary

  Piezoelectric benders · CPC title