Precursor delivery systems, precursor supply packages, and related methods

Patent metadata

Field	Value
Publication number	US-12258662-B2
Application number	US-202217896964-A
Country	US
Kind code	B2
Filing date	Aug 26, 2022
Priority date	Sep 2, 2021
Publication date	Mar 25, 2025
Grant date	Mar 25, 2025

Abstract

Some embodiments relate to precursor delivery systems for producing gas precursors. The precursor delivery system may include one or more precursor supply packages containing a solid precursor material. The one or more precursor supply packages may be configured to heat the solid precursor material to a temperature sufficient to result in thermal decomposition of the solid precursor material. The thermal decomposition of the solid precursor material may produce a gas precursor. The gas precursor may be supplied to a gas precursor-utilizing process. Further embodiments relate to precursor supply packages and related methods.

First claim

What is claimed is:

1. A precursor delivery system comprising:
a plurality of precursor supply packages, each of the plurality of precursor supply packages comprising:
a vessel body containing a solid precursor material, wherein the solid precursor material has a formula MPF6, wherein M is Li, Na, K, Rb, Cs, or Ag;
a heater configured to heat the vessel body to a temperature sufficient to produce a gas precursor by thermal decomposition of the solid precursor material wherein the gas precursor comprises PF5; and
an outlet fluidly connected to the vessel body;

a manifold fluidly connected to the plurality of precursor supply packages; and an outlet fluidly connected to the manifold;
the manifold is configured to switch from withdrawing the gas precursor from one of the precursor supply packages to withdrawing the gas precursor from another of the precursor supply packages in response to a pressure sensing signal, wherein the pressure sensing signal is configured to initiate heating to the another precursor supply package.

2. The precursor delivery system of claim 1 , wherein the solid precursor material includes at least one of LiPF 6 , NaPF 6 , KPF 6 , RbPF 6 , CsPF 6 , AgPF 6 , or any combination thereof.

3. The precursor delivery system of claim 1 , wherein at least one heater is configured to heat at least one vessel body to a temperature that is greater than a thermal decomposition temperature of the solid precursor material.

4. The precursor delivery system of claim 1 , wherein at least one heater is configured to maintain at least one vessel body at a temperature that is greater than a thermal decomposition temperature of the solid precursor material.

5. The precursor delivery system of claim 1 , wherein the manifold is configured to control withdrawal of the gas precursor from each of the plurality of precursor supply packages.

6. The precursor delivery system of claim 1 , further comprising a pressure transducer.

7. The precursor delivery system of claim 6 , wherein a pressure below a set pressure as determined by the pressure transducer indicates the solid precursor material, which is contained in the vessel body of the precursor supply package producing the gas precursor, is depleted.

8. The precursor delivery system of claim 1 , further comprising a pressure regulator valve.

9. The precursor delivery system of claim 8 , wherein the pressure regulator valve is configured to maintain a pressure of the gas precursor through the outlet at or below atmospheric pressure.

Assignees

• Entegris Inc

Inventors

• Moreschini Paolo

Classifications

• C01B25/10

  Halides or oxyhalides of phosphorus · CPC title

• B01J7/00

  Apparatus for generating gases (production of inert gas mixtures B01J19/14; for generating specific gases, see the relevant subclasses, e.g. C01B, C10J {; in "air bags" on vehicles B60R21/26; for starter gas F02C7/26; blasting cartridges for producing gas under pressure F42B3/04}) · CPC title

• B01J4/02 Primary

  for feeding measured {, i.e. prescribed} quantities of reagents · CPC title

• B01J4/008

  Feed or outlet control devices · CPC title

• C23C16/4485

  by evaporation without using carrier gas in contact with the source material (C23C16/4486 takes precedence) · CPC title