Integrated assemblies and methods of forming integrated assemblies

Patent metadata

Field	Value
Publication number	US-12256546-B2
Application number	US-202318386346-A
Country	US
Kind code	B2
Filing date	Nov 2, 2023
Priority date	May 13, 2020
Publication date	Mar 18, 2025
Grant date	Mar 18, 2025

Abstract

Some embodiments include an integrated assembly having a first structure containing semiconductor material, and having a second structure contacting the first structure. The first structure has a composition along an interface with the second structure. The composition includes additive to a concentration within a range of from about 10 18 atoms/cm 3 to about 10 21 atoms/cm 3 . The additive includes one or more of carbon, oxygen, nitrogen and sulfur. Some embodiments include methods of forming integrated assemblies.

First claim

We claim:

1. A method of forming an integrated assembly, comprising:
forming a source structure comprising semiconductor material over metal-containing material; additive being within a region of the semiconductor material to a concentration within a range of from 10 18 atoms/cm 3 to 10 21 atoms/cm 3 ; the additive comprising one or more of carbon, oxygen, nitrogen or sulfur;
etching into the region of the semiconductor material utilizing an etchant comprising phosphoric acid; the etching forming an opening which extends into, but not entirely through, the semiconductor material of said region;
forming a second structure over the source structure and extending into said opening; and
wherein the opening is configured as a trench, and wherein the second structure is configured as a panel extending along the trench; said panel comprising a laminate which includes a conductive material layer laterally between a pair of insulative material layers; the conductive layer directly contacting the semiconductor material of the source structure.

2. The method of claim 1 wherein the additive includes the carbon.

3. The method of claim 1 wherein the additive includes the nitrogen.

4. The method of claim 1 wherein the additive includes the oxygen.

5. The method of claim 1 wherein the additive includes the sulfur.

6. The method of claim 1 wherein the region of the semiconductor material comprises a conductivity-enhancing dopant.

7. A method of forming an integrated assembly, comprising:
forming a stack of alternating first and second levels over a source structure; the first levels comprising sacrificial material and the second levels comprising a first insulative material; the source structure comprising semiconductor material over metal-containing material;
forming a trench which extends through the stack and to a region of the semiconductor material;
providing carbon within the region of the semiconductor material;
removing the sacrificial material of the first levels to leave voids;
forming conductive material within the voids;
after forming the conductive material, forming a panel within the trench; the panel comprising a second insulative material; and
forming of the trench comprises forming a first region of the trench to extend through the stack, and then forming a second region of the trench to extend into the region of the semiconductor material; and wherein the carbon is provided within the region of the semiconductor material after forming the first region of the trench and prior to forming the second region of the trench.

8. The method of claim 7 comprising forming an etch-stop is over the region of the semiconductor material prior to forming the stack; wherein the first region of the trench stops on the etch-stop; and wherein the trench is extended through the etch-stop prior to forming the second region of the trench to extend into, but not entirely through, the region of the semiconductor material.

9. The method of claim 8 wherein the etch-stop comprises metal.

10. The method of claim 8 wherein the etch-stop comprises tungsten.

11. The method of claim 7 wherein the carbon is provided to a concentration within a range of from 10 18 atoms/cm 3 to 10 21 atoms/cm 3 .

12. The method of claim 7 further comprising providing oxygen within the region of the semiconductor material after forming the first region of the trench and prior to forming the second region of the trench.

13. The method of claim 7 further comprising providing nitrogen within the region of the semiconductor material after forming the first region of the trench and prior to forming the second region of the trench.

14. The method of claim 7 further comprising providing sulfur within the region of the semiconductor material after forming the first region of the trench and prior to forming the second region of the trench.

15. The method of claim 7 wherein the region of the semiconductor material comprises a conductivity-enhancing dopant.

16. A method of forming an integrated assembly, comprising:
forming a stack of alternating first and second levels over a source structure; the first levels comprising sacrificial material and the second levels comprising a first insulative material; the source structure comprising semiconductor material over metal-containing material;
forming a trench which extends through the stack and to a region of the semiconductor material;
providing carbon within the region of the semiconductor material;
removing the sacrificial material of the first levels to leave voids;
forming conductive material within the voids;
after forming the conductive material, forming a panel within the trench; the panel comprising a second insulative material; and
wherein the panel comprises conductive material in addition to the second insulative material.

17. The method of claim 16 comprising forming an etch-stop is over the region of the semiconductor material prior to forming the stack.

18. The method of claim 17 wherein the etch-stop comprises metal.

19. The method of claim 17 wherein the etch-stop comprises tungsten.

20. The method of claim 16 wherein the carbon is provided to a concentration within a range of from 10 18 atoms/cm 3 to 10 21 atoms/cm 3 .

21. The method of claim 16 further comprising providing oxygen within the region of the semiconductor material.

22. The method of claim 16 further comprising providing nitrogen within the region of the semiconductor material.

23. The method of claim 16 further comprising providing sulfur within the region of the semiconductor.

24. The method of claim 16 wherein the region of the semiconductor material comprises a conductivity-enhancing dopant.

Assignees

• Micron Technology Inc

Inventors

• Wang Yiping
• Li Andrew
• Li Haoyu
• King Matthew J
• Ng Wei Yeeng
• Hu Yongjun Jeff

Classifications

• H10P50/644

  Anisotropic liquid etching (H10P50/61 takes precedence) · CPC title

• H10P14/40

  of conductive or resistive materials · CPC title

• H10P50/283 Primary

  by chemical means · CPC title

• H10B43/35

  with cell select transistors, e.g. NAND · CPC title

• H10B41/35

  with a cell select transistor, e.g. NAND · CPC title