Electron beam inspection apparatus and electron beam inspection method
US-12046445-B2 · Jul 23, 2024 · US
US12249043B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12249043-B2 |
| Application number | US-202217573553-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 11, 2022 |
| Priority date | Feb 12, 2021 |
| Publication date | Mar 11, 2025 |
| Grant date | Mar 11, 2025 |
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Techniques for facilitating non-uniformity mitigation for imaging systems and methods are provided. In one example, a method includes cropping an image based on a defect in the image to obtain a cropped image. The method further includes cropping a supplemental flat field correction (SFFC) map based on the defect in the image to obtain a cropped SFFC map. The method further includes determining a scaling value of a scaling term based at least on a cost function. The method further includes scaling the SFFC map based on the scaling value to obtain a scaled SFFC map. Related devices and systems are also provided.
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What is claimed is: 1. A method comprising cropping a first image based on a location of a defect in the first image to obtain a first cropped image; cropping a supplemental flat field correction (SFFC) map based on the location of the defect in the first image to obtain a first cropped SFFC map; determining a first scaling value of a scaling term based at least on a cost function, the first cropped image, and the first cropped SFFC map; and scaling the SFFC map based on the first scaling value to obtain a first scaled SFFC map. 2. The method of claim 1 , further comprising applying the scaled SFFC map to one or more images, wherein the cropping the first image and the cropping the SFFC map are further based on a size of the defect. 3. The method of claim 2 , wherein the one or more images comprises the first image. 4. The method of claim 1 , further comprising: capturing, by a focal plane array, image data, wherein the focal plane array comprises a plurality of infrared detectors; and processing the image data to obtain the first image, wherein the processing comprises applying a gain and/or an offset to the image data. 5. The method of claim 1 , further comprising applying a damping factor to the first scaling value to obtain a damped scaling value, wherein the scaling is based on the damped scaling value. 6. The method of claim 1 , wherein the determining the first scaling value comprises iteratively adjusting a value of the scaling term to obtain the first scaling value that minimizes the cost function. 7. The method of claim 1 , wherein the cost function is based on the first cropped image, a value of the scaling term, and the first cropped SFFC map. 8. The method of claim 7 , wherein the cost function is based on a gradient of a difference between the first cropped image and the first cropped SFFC map scaled by the value of the scaling term. 9. The method of claim 1 , further comprising: cropping a second image based on a defect in the second image to obtain a second cropped image; cropping the SFFC map based on the defect in the second image to obtain a second cropped SFFC map; determining a second scaling value of the scaling term based at least on the cost function, the second cropped image, and the second cropped SFFC map; and scaling the SFFC map based at least on the second scaling value to obtain a second scaled SFFC map. 10. The method of claim 9 , wherein the second scaled SFFC map is further based on the first scaling value. 11. The method of claim 1 , wherein the first image comprises a thermal image. 12. A system comprising: a memory configured to store a supplemental flat field correction (SFFC) map; and a processing circuit configured to: crop a first image based on a location of a defect in the first image to obtain a first cropped image; crop the SFFC map based on the location of the defect in the first image to obtain a first cropped SFFC map; determine a first scaling value of a scaling term based at least on a cost function, the first cropped image, and the first cropped SFFC map; and scale the SFFC map based on the first scaling value to obtain a first scaled SFFC map. 13. The system of claim 12 , wherein the processing circuit is further configured to apply the first scaled SFFC map to one or more images. 14. The system of claim 12 , wherein the processing circuit is further configured to apply a damping factor to the first scaling value to obtain a damped scaling value, and wherein the processing circuit is configured to scale the SFFC map based on the damped scaling value. 15. The system of claim 12 , further comprising a focal plane array configured to capture thermal image data, wherein the processing circuit is further configured to apply a gain and/or an offset to the thermal image data to obtain the first image. 16. The system of claim 15 , wherein the focal plane array comprises a plurality of microbolometers. 17. The system of claim 12 , wherein the processing circuit is configured to determine the first scaling value by iteratively adjusting a value of the scaling term to obtain the first scaling value that minimizes the cost function. 18. The system of claim 12 , wherein the cost function is based on the first cropped image, a value of the scaling term, and the first cropped SFFC map. 19. The system of claim 12 , wherein the processing circuit is further configured to: crop a second image based on a defect in the second image to obtain a second cropped image; crop the SFFC map based on the defect in the second image to obtain a second cropped SFFC map; determine a second scaling value of the scaling term based at least on the cost function, the second cropped image, and the second cropped SFFC map; and scale the SFFC map based at least on the second scaling value to obtain a second scaled SFFC map, wherein the second scaled SFFC map is further based on the first scaling value. 20. The method of claim 1 , wherein the first cropped SFFC map is associated with the same size, shape, and location as the first cropped image.
by using reference sources · CPC title
from thermal infrared radiation · CPC title
Camera processing pipelines; Components thereof · CPC title
Image cropping · CPC title
Infrared image · CPC title
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