Differential measurement system

Patent metadata

Field	Value
Publication number	US-12248255-B2
Application number	US-202117916730-A
Country	US
Kind code	B2
Filing date	Mar 9, 2021
Priority date	Apr 7, 2020
Publication date	Mar 11, 2025
Grant date	Mar 11, 2025

Abstract

A system for measuring the difference between a property of a first target and a property of a second target, the system comprising a first member and a second member, wherein the first member comprises a first pattern, and the speed of rotation of the first member is configured to be based on the property of the first target; and the second member comprises a second pattern wherein, the speed of rotation of the second member is configured to be based on the property of the second target, further wherein the first and second pattern are angularly-varying and are configured to generate an interference pattern by their interaction when the first and second members have a relative difference in their rotational speeds, the interference pattern being indicative of the magnitude of this difference.

First claim

The invention claimed is:

1. A system comprising:
first and second coaxial members configured to have an axis of rotation substantially parallel to a light path,
wherein:
the first member comprises a first pattern and is arranged to rotate with a first speed of rotation, wherein the first speed of rotation of the first member is configured to be based on a flow rate of a first target,
the second member comprises a second pattern and is arranged to rotate with a second speed of rotation, wherein the second speed of rotation of the second member is configured to be based on a flow rate of a second target, and
the first and second patterns have an angular variation and are configured to generate an interference pattern from a light beam traveling along the light path based on their interaction with the light beam and in response to the first and second members having a relative difference in their rotational speeds, the interference pattern being indicative of a magnitude of this difference; and

a fluid circulation system having a fluid inlet and a fluid outlet,
wherein the system is configured to measure a difference between flow rates of the fluid inlet and the fluid outlet.

2. The system of claim 1 , wherein:
the first and second patterns comprise a first and a second component,
the first component has a lower transmissivity than the second component; or
the first component has a lower reflectivity than the second component.

3. The system of claim 1 , wherein:
the first member is attached to a flow rotor disposed at the inlet,
the second member is attached to a flow rotor disposed at the outlet, and
the first and second members are attached to the flow rotors via a gear mechanism, such that the rotational speed of the first and second members are higher than the rotational speed of the respective flow rotors.

4. The system of claim 1 , wherein the first and second members are disks, with the first and second patterns formed on or through a surface of the disks.

5. The system of claim 1 , wherein the first and second members are concentric drums, with the first and second patterns formed on or through a surface of the drums in an overlapping portion of the drums.

6. The system of claim 1 , wherein:
a light source is disposed to impinge light on or through the interference pattern,
a sensor is configured to receive a light signal indicative of the relative difference in rotational speeds between the first and second members, and
an optical fiber is disposed between the first and second members to communicate light from the light source between them.

7. The system claim 1 , wherein one or more temperature sensors are configured to measure a temperature at the first and second targets, such that the magnitude of a difference signal provided by the interference pattern is calibrated based on the measured temperature difference.

8. The system of claim 1 , wherein the first pattern is different from the second pattern, such that in response to the first and second members rotating at the same speed, a resulting superimposed pattern between the first and second patterns is an angularly-varying pattern.

9. The system of claim 1 , wherein the first pattern and the second pattern are divided into two concentric annular regions.

10. A lithographic tool comprising
the system of claim 1 .

11. The lithographic tool of claim 10 , wherein the fluid circulation system is configured to circulate temperature-controlled water.

12. The system of claim 1 , wherein the first and second patterns are provided in a plane perpendicular to the axis of rotation.

13. A method comprising:
rotating a first member comprising a first pattern at a first speed based on a first fluid flow rate of a first target;
rotating a second member positioned coaxial to the first member and comprising a second pattern at a second speed based on a second fluid flow rate of a second target;
forming an interference pattern between the first and second patterns based on a light beam traveling along a light path substantially parallel to an axis of rotation of the first and second members and in response to the first and second members having a relative difference in their rotational speed; and
taking a differential measurement of the first and second fluid flow rates of the first and second targets based on the interference pattern.

14. The method of claim 13 , further comprising:
monitoring a first temperature related to the first target;
monitoring a second temperature related to the second target; and
using the difference between the first temperature and the second temperature to calibrate an inferred differential flow rate measurement between the first and second targets based on the interference pattern.

15. The method of claim 13 , further comprising:
providing a beam to impinge on or travel through the first and second patterns so as to be modulated by the interference pattern,
monitoring an amplitude of the beam after it has been modulated by the interference pattern; and
determining a difference between the first and second fluid flow rates of the first and second targets based on an amplitude of the beam over time.

16. The method of claim 13 , further comprising arranging the first and second patterns in a plane perpendicular to the axis of rotation.

Assignees

• Asml Netherlands Bv

Inventors

• Steijns Hubert Matthieu Richard
• Aggarwal Pulkit

Classifications

• G03F7/70908

  Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus · CPC title

• G03F7/70975

  Assembly, maintenance, transport or storage of apparatus · CPC title

• G01M3/38

  by using light (G01M3/02 takes precedence) · CPC title

• G01F1/86

  Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure · CPC title

• G01F1/065

  with radiation as transfer means to the indicating device, e.g. light transmission · CPC title