Laser device with safety interlock and scientific instrument for use with the same

Patent metadata

Field	Value
Publication number	US-12244115-B2
Application number	US-202218083228-A
Country	US
Kind code	B2
Filing date	Dec 16, 2022
Priority date	Dec 16, 2022
Publication date	Mar 4, 2025
Grant date	Mar 4, 2025

Abstract

A laser device for use with a scientific instrument. The laser device includes a laser emitter and a control system. The laser emitter is configured to generate a laser beam for radiating a sample disposed in a vacuum chamber of the scientific instrument. The control system is configured to receive a pressure signal associated with the vacuum chamber from a pressure sensor, and to change a state of the laser beam in response to the pressure reaching a threshold level.

First claim

What is claimed is:

1. A laser device for use with a scientific instrument, the laser device comprising:
a laser emitter configured to generate a laser beam for radiating a sample disposed in a vacuum chamber of the scientific instrument; and
a control system configured to receive a pressure signal associated with the vacuum chamber from a pressure sensor, and to change a state of the laser beam in response to the pressure reaching a threshold level,
wherein the scientific instrument is a charged particle microscope.

2. The laser device of claim 1 , wherein changing the state of the laser beam includes shutting off a power to the laser emitter.

3. The laser device of claim 1 , wherein changing the state of the laser beam includes blocking the laser beam.

4. The laser device of claim 1 , wherein the threshold level corresponds to a pressure level higher than a normal operating pressure range of the vacuum chamber.

5. The laser device of claim 1 , wherein the control system includes at least one of a relay or a programmable processor.

6. The laser device of claim 1 , further comprising a vacuum flange configured to be removably attachable to the scientific instrument.

7. The laser device of claim 6 , wherein the sensor is coupled to the vacuum flange.

8. The laser device of claim 1 , further comprising an optical assembly configured to direct light reflected off the sample to a spectrograph.

9. A Raman probe for use with a microscope, the Raman probe comprising:
a laser emitter configured to generate a laser beam for radiating a sample disposed in a sample chamber;
a sensor configured to sense a pressure associated with the sample chamber;
an optical assembly configured to direct light reflected off the sample to a spectrograph; and
a control system configured to: monitor the pressure associated with the sample chamber;
and change a state of the laser beam in response to the pressure reaching a threshold level.

10. The Raman probe of claim 9 , wherein the optical assembly includes a spectrograph fiber configured to transmit the light reflected off the sample.

11. The Raman probe of claim 9 , wherein the spectrograph includes:
a filter configured to remove a laser beam wavelength from the light reflected off the sample, and
a spectrograph detector configured to receive the filtered light from the filter.

12. The Raman probe of claim 9 , wherein changing the state of the laser beam includes shutting off a power to the laser emitter.

13. The Raman probe of claim 9 , wherein changing the state of the laser beam includes blocking the laser beam.

14. The Raman probe of claim 9 , wherein the threshold level corresponds to a pressure level higher than a normal operating pressure range for the sample chamber.

15. The Raman probe of claim 9 , wherein the control system includes a relay.

16. The Raman probe of claim 9 , wherein the control system includes a programmable processor.

17. The Raman probe of claim 9 , further comprising a vacuum flange configured to mount to the microscope, wherein the sensor is coupled to the vacuum flange.

18. A method of providing a safety interlock for a laser device useable with a scientific instrument, the method comprising:
providing a laser emitter configured to generate a laser beam for radiating a sample disposed in a vacuum chamber of the scientific instrument;
providing a sensor configured to sense a pressure associated with the vacuum chamber of the scientific instrument; and
pumping down the vacuum chamber to create a vacuum condition for analyzing the sample;
loading the sample into the vacuum chamber;
allowing the laser beam to enter the vacuum chamber;
monitoring the pressure while analyzing the sample; and
changing a state of the laser beam in response to the pressure in the vacuum chamber of the scientific instrument reaching a threshold level;
wherein changing the state of the laser beam includes inhibiting the laser beam.

Assignees

• Fei Co

Inventors

• Deck Francis
• Morrow Justin

Classifications

• H01S3/005

  Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping (shaping laser beam for working metal or other materials B23K26/06; optical elements, systems or apparatus in general G02B) · CPC title

• G01J3/44 Primary

  Raman spectrometry; Scattering spectrometry {; Fluorescence spectrometry} · CPC title

• G01J3/027

  Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation · CPC title

• G01J3/0218

  using optical fibers · CPC title

• G01J3/0205

  Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows · CPC title