Sensor and method for detecting guided thermal radiation

Patent metadata

Field	Value
Publication number	US-12235170-B2
Application number	US-202217658564-A
Country	US
Kind code	B2
Filing date	Apr 8, 2022
Priority date	Jun 1, 2021
Publication date	Feb 25, 2025
Grant date	Feb 25, 2025

Abstract

A fluid sensor includes a support structure having a top main surface region; a thermal emitter on the top main surface region of the support structure; a thermal radiation detector on the top main surface region of the support structure; and a waveguide structure having a first and a second waveguide section on the top main surface region of the support structure. The first waveguide section guides a first portion of the thermal radiation to the thermal radiation detector and the second waveguide section guides a second portion of the thermal radiation to the thermal radiation detector. The waveguide structure enables an interaction of an evanescence field of the guided first and/or second portion of the thermal radiation with a surrounding fluid.

First claim

What is claimed is:

1. A fluid sensor comprising:
a support structure having a top main surface region, wherein the top main surface region of the support structure forms a common system plane of the fluid sensor;
a thermal emitter on the top main surface region of the support structure, wherein the thermal emitter is configured to emit thermal radiation in at least two different radiation emission directions parallel to the common system plane;
a thermal radiation detector on the top main surface region of the support structure, wherein the thermal radiation detector is configured to detect thermal radiation; and
a waveguide structure having a first and a second waveguide section on the top main surface region of the support structure, wherein the first waveguide section is operatively coupled to a first lateral side of the thermal emitter, and wherein the second waveguide section is operatively coupled to a second lateral side of the thermal emitter opposite to the first lateral side,
wherein the first waveguide section is configured to guide a first portion of the thermal radiation, emitted by the thermal emitter in a first radiation emission direction of the at least two different radiation emission directions of the thermal emitter, to the thermal radiation detector,
wherein the second waveguide section is configured to guide a second portion of the thermal radiation, emitted by the thermal emitter in a second radiation emission direction of the at least two different emission radiation directions of the thermal emitter, to the thermal radiation detector, and
wherein the waveguide structure is configured to enable an interaction of an evanescence field of the guided first and/or second portion of the thermal radiation with a surrounding fluid.

2. The fluid sensor according to claim 1 , wherein the thermal radiation detector is configured to detect thermal radiation from at least two different detection directions parallel to the common system plane,
wherein the first waveguide section is configured to guide the first portion of the thermal radiation to the thermal radiation detector, such that the guided first portion of the thermal radiation is coupled to the thermal radiation detector from a first detection direction of the at least two different detection directions of the thermal radiation detector, and
wherein the second waveguide section is configured to guide the second portion of the thermal radiation to the thermal radiation detector, such that the guided second portion of the thermal radiation is coupled in the thermal radiation detector from a second detection direction of the at least two different detection directions of the thermal radiation detector.

3. The fluid sensor according to claim 2 , wherein the first and second radiation emission directions are opposite to one another, and
wherein the first and second detection directions are opposite to one another.

4. The fluid sensor according to claim 1 , wherein the waveguide structure comprises curved waveguides and/or rectangular waveguides.

5. The fluid sensor according to claim 1 , wherein the fluid sensor comprises a filter structure and wherein the filter structure is configured to filter the first and/or second portion of the thermal radiation emitted by the thermal emitter, and
wherein the waveguide structure comprises the filter structure, and/or
wherein the thermal emitter comprises the filter structure, and/or
wherein the thermal radiation detector comprises the filter structure, and/or
wherein the filter structure is arranged on the top main surface region of the support structure between the thermal emitter and the waveguide structure and/or between the thermal radiation detector and the waveguide structure.

6. The fluid sensor according to claim 5 , wherein the thermal emitter comprises a semiconductor strip and wherein the semiconductor strip is configured to emit a broadband thermal radiation, as the thermal radiation, in the at least two different radiation emission directions,
wherein the filter structure is an optical filter structure comprising a semiconductor material,
wherein the optical filter structure has a narrow transmission band, and
wherein the optical filter structure is configured to filter the broadband thermal radiation, emitted in the at least two different radiation emission directions.

7. The fluid sensor according to claim 6 , wherein the optical filter structure comprises a photonic crystal structure and/or a Bragg filter structure as wavelength selective optical elements.

8. The fluid sensor according to claim 6 , wherein the semiconductor strip comprises a doped polysilicon material to form a black body radiator and is configured to have, in an actuated condition, an operating temperature in a range between 500° C. and 900° C.

9. The fluid sensor according to claim 6 , wherein the waveguide structure is configured to provide an evanescent field ratio of the guided first and/or second portion of the thermal radiation of at least 5% and at most 90% or of at least 35% and at most 50%.

10. The fluid sensor according to claim 1 , wherein the support structure comprises a rigid structure and a substrate on a bottom surface of the rigid structure,
wherein a top surface, opposite to the bottom surface, of the rigid structure is the top main surface region, and
wherein the rigid structure is configured to confine the thermal radiation, radiated by the thermal emitter.

11. The fluid sensor according to claim 10 , wherein the substrate comprises at least one substrate cavity, and
wherein the at least one substrate cavity is arranged vertically, with respect to the common system plane, below the thermal emitter and/or the thermal radiation detector and/or the waveguide structure, for thermal insulation, of the thermal emitter and/or the thermal radiation detector and/or the waveguide structure, from the substrate.

12. The fluid sensor according to claim 1 , wherein the fluid sensor has a footprint in the common system plane of less than 50 mm 2 or less than 40 mm 2 or less than 20 mm 2 and/or a height, wherein the height is orthogonal to the system plane, of less than 1000 μm or less than 450 μm or less than 400 μm.

13. The fluid sensor according to claim 1 , wherein the waveguide structure comprises at least one of a slab waveguide, a strip waveguide, a slot waveguide, a slot-array waveguide and/or a multi-slot waveguide, and/or
wherein the thermal radiation detector comprises at least one of a pyroelectric temperature sensor, a piezoelectric temperature sensor, a pn junction temperature sensor and/or a resistive temperature sensor.

14. The fluid sensor according to claim 5 , wherein at least one of the thermal radiation detector, the waveguide structure, the filter structure and/or the thermal emitter is arranged monolithically on the support structure.

15. A method comprising:
emitting thermal radiation in at least two different radiation emission directions parallel to a common system plane,
wherein the common system plane is formed by a top main surface region of a support structure, and
wherein the thermal radiation is emitted by a thermal emitter arranged on the top main surface region of the support structure; and
guiding a first portion of the thermal radiation, emitted by the thermal emitter in a first radiation emission direction of the at least two different radiation emission directions of the thermal emitter, to a thermal radiation detector via a first waveguide section of a waveguide structure, wherein the first waveguide section is operatively coupled to a first lateral side of

Assignees

• Infineon Technologies Ag

Inventors

• Stocker Gerald
• Aschauer Elmar
• Bartl Ulf
• Grille Thomas
• Kovatsch Christoph
• Ostermann Thomas Krotscheck

Classifications

• G01J5/10

  using electric radiation detectors · CPC title

• G01J5/0818

  Waveguides · CPC title

• G01J5/0802

  Optical filters · CPC title

• G01J5/022

  Monolithic · CPC title

• G01N21/3504 Primary

  for analysing gases, e.g. multi-gas analysis · CPC title