Detaching and installing device for gas distribution plate of etching machine, and etching machine

Patent metadata

Field	Value
Publication number	US-12230480-B2
Application number	US-202117508862-A
Country	US
Kind code	B2
Filing date	Oct 22, 2021
Priority date	Nov 2, 2020
Publication date	Feb 18, 2025
Grant date	Feb 18, 2025

Abstract

The present application provides a detaching and installing device for a gas distribution plate of an etching machine, and the etching machine, and relates to the field of semiconductor manufacturing technologies, aiming at addressing the problems that it is quite difficult to detach and install the gas distribution plate of the etching machine and that the gas distribution plate is highly likely to be polluted. The detaching and installing device for the gas distribution plate of the etching machine includes a gripping member, a connecting member and a fixing member, the fixing member is detachably connected to the gas distribution plate of the etching machine, and the gripping member and the fixing member are connected through the connecting member; the gripping member is provided thereon with a gripping portion for grip by a user hand.

First claim

What is claimed is:

1. A detaching and installing device for a gas distribution plate of an etching machine, comprising a gripping member, a connecting member and a fixing member, wherein the fixing member is detachably connected to the gas distribution plate of the etching machine, and the gripping member and the fixing member are connected through the connecting member;
the gripping member is provided thereon with a gripping portion for grip by a user hand;
wherein the fixing member comprises at least one fixing portion detachably connected to the gas distribution plate;
wherein the fixing member extends in a first direction, and there are two fixing portions located respectively on two opposite ends of the fixing member in the first direction; the connecting member is connected with the fixing portions of the fixing member;
wherein the connecting member comprises a first connecting end and a second connecting end, the first connecting end is connected with the fixing portions of the fixing member and the second connecting end is connected with the gripping member;
wherein the first connecting end is in threaded connection with the fixing portions, a first outer thread is provided on the first connecting end, and the fixing portion is provided thereon with a first connecting hole in which a first inner thread engaged with the first outer thread is provided.

2. The detaching and installing device for a gas distribution plate of an etching machine according to claim 1 , wherein the two fixing portions of the fixing member are detachably connected to different positions of an outer ring plate, and a projection of the fixing member on the gas distribution plate covers at least a part of an inner plate.

3. The detaching and installing device for a gas distribution plate of an etching machine according to claim 2 , wherein the gas distribution plate of an etching machine further comprises a seal arranged between the inner plate and the outer ring plate.

4. The detaching and installing device for a gas distribution plate of an etching machine according to claim 1 , wherein the gripping member extends in the first direction, connecting portions are respectively arranged on the two opposite ends of the gripping member in the first direction, and the gripping portion is located between the two connecting portions;
the connecting portions are connected with the second connecting end via fasteners.

5. The detaching and installing device for a gas distribution plate of an etching machine according to claim 4 , wherein the second connecting end is provided thereon with a second connecting hole, the connecting portion is provided thereon with a third connecting hole, and the third connecting hole is a through hole;
the fastener penetrates through the third connecting hole and is in threaded connection with the second connecting hole.

6. The detaching and installing device for a gas distribution plate of an etching machine according to claim 1 , wherein the gripping portion is of a cylindrical structure, and at least one recessed portion for receiving a user hand is arranged on an outer surface of the gripping portion.

7. The detaching and installing device for a gas distribution plate of an etching machine according to claim 1 , wherein a notch of at least one recess is arranged on the fixing member, and the notch creates an avoidance area for the fixing member.

8. The detaching and installing device for a gas distribution plate of an etching machine according to claim 7 , wherein the notch of the fixing member is recessed towards a side away from a seal, and a projection of the notch on the gas distribution plate covers the seal.

9. The detaching and installing device for a gas distribution plate of an etching machine according to claim 7 , wherein the notch is located between the two fixing portions of the fixing member.

10. The detaching and installing device for a gas distribution plate of an etching machine according to claim 1 , wherein the fixing member and the connecting member are polytetrafluoroethylene members;
and/or the gripping member is an aluminum piece or an aluminum alloy piece, a coating is arranged outside the gripping member, and the coating is a fluoride layer.

11. The detaching and installing device for a gas distribution plate of an etching machine according to claim 1 , wherein the fixing member is of a cuboid structure, the fixing member has a length in the first direction ranging from 300 mm to 350 mm, and the fixing member has a width ranging from 20 mm to 50 mm and a thickness ranging from 10 mm to 15 mm;
and/or the connecting member has a length ranging from 40 mm to 60 mm;
and/or the gripping member has a length in the first direction ranging from 300 mm to 350 mm, and the gripping portion has a diameter of 20 mm to 30 mm.

12. An etching machine, comprising a vacuum reaction chamber, wherein a gas distribution plate, and the detaching and installing device for the gas distribution plate of the etching machine according to claim 1 , are arranged within the vacuum reaction chamber;
the fixing member of the detaching and installing device for the gas distribution plate of the etching machine is detachably connected to the gas distribution plate.

13. The etching machine according to claim 12 , wherein the gas distribution plate comprises an inner plate and an outer ring plate surrounding the inner plate, and the inner plate and the outer ring plate are connected;
the two fixing portions of the fixing member are detachably connected to different positions of the outer ring plate, and a projection of the fixing member on the gas distribution plate covers at least a part of the inner plate.

14. The etching machine according to claim 13 , wherein a seal is arranged between the inner ring plate and the outer ring plate, a notch of the fixing member is recessed towards a side away from the seal, and a projection of the notch on the gas distribution plate covers the seal.

Assignees

• Changxin Memory Tech Inc

Inventors

• Chen Ko Wei
• Meng Li
• Wang Chien Chung

Classifications

• H01J37/3288

  Maintenance · CPC title

• H01J37/32807

  Construction (includes replacing parts of the apparatus) · CPC title

• C23C16/45565

  Shower nozzles · CPC title

• B05B1/24

  incorporating means for heating the liquid or other fluent material, e.g. electrically · CPC title

• B05B1/14

  with multiple outlet openings (B05B1/02, B05B1/26 take precedence); with strainers in or outside the outlet opening · CPC title