Biochip and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-12226772-B2
Application number	US-202117432580-A
Country	US
Kind code	B2
Filing date	Jan 22, 2021
Priority date	Jan 22, 2020
Publication date	Feb 18, 2025
Grant date	Feb 18, 2025

Abstract

A biochip and a method for manufacturing the same are provided. The biochip includes: a guide layer; a channel layer on the guide layer, wherein the channel layer has therein a plurality of first channels extending in a first direction; a plurality of second channels extending in a second direction, wherein each of the plurality of second channels is in communication with the plurality of first channels, the plurality of second channels are in a layer where the channel layer is located, or in a layer where the channel layer and the guide layer are located; an encapsulation cover plate on a side of the channel layer distal to the guide layer; and a driving unit configured to drive biomolecules to move.

First claim

What is claimed is:

1. A biochip comprising:
a guide layer;
a channel layer on the guide layer, the channel layer having within the channel layer a plurality of first channels extending in a first direction, each first channel of the plurality of first channels projecting a first orthographic projection onto the guide layer;
a plurality of second channels extending in a second direction, wherein each of the plurality of second channels is in communication with the plurality of first channels, and wherein the plurality of second channels is disposed in a first layer where the channel layer is located, or is disposed in a second layer where the channel layer and the guide layer are located;
an encapsulation cover plate on a side of the channel layer distal to the guide layer;
a driving unit configured to drive biomolecules to move;
a plurality of first grooves, each first groove of the plurality of first grooves projecting a second orthographic projection onto the guide layer wherein the plurality of first grooves extending along the first direction are disposed on a side of the guide layer proximal to the channel layer, and have a one-to-one correspondence with the plurality of first channels, and the first orthographic projection of each first channel of the plurality of first channels on the guide layer is within the second orthographic projection of a corresponding first groove of the plurality of first grooves on the guide layer.

2. The biochip of claim 1 , wherein the plurality of second channels comprises a plurality of second grooves, and is in a third direction perpendicular to both the first direction and the second direction, each second groove of the plurality of second groove has a first height and each first channel of the plurality of first channels has a second height wherein the first height is larger than the second height of each of the plurality of first channels, and the first height is smaller than a sum of heights of the first layer where the channel layer is located and of a third layer where the guide layer is located.

3. The biochip of claim 1 , further comprising:
a planarization layer disposed between the channel layer and the encapsulation cover plate.

4. The biochip of claim 1 , further comprising:
a first liquid storage structure in communication with at least a first end of a first channel of the plurality of first channels and configured to store a mixed solution having unseparated biomolecules; and
a plurality of second liquid storage structures in a one-to-one correspondence with and in communication with second ends of the plurality of first channels, respectively, and configured to store solutions having separated biomolecules, respectively.

5. The biochip of claim 4 , wherein the plurality of first channels are arranged side by side along the second direction, and the first liquid storage structure is in communication with a first end of a first channel of the plurality of first channels arranged along the second direction.

6. The biochip of claim 4 , wherein the driving unit comprises a first separation electrode and a second separation electrode, the first separation electrode projecting a third orthographic projection onto the guide layer, the first liquid storage structure projecting a fourth orthographic projection onto the guide layer, the second separation electrode projecting a fifth orthographic projection onto the quide layer, the plurality of second liquid storage structures projecting a sixth orthographic projection onto the quide layer wherein the third orthographic projection at least partially overlaps the fourth orthographic projection, and the fifth orthographic projection at least partially overlaps the sixth orthographic projection.

7. The biochip of claim 2 , wherein each second channel of the plurality of second channels has a height greater than or equal to 100 microns, and each first channel of the plurality of first channels has a height less than 200 nm.

8. The biochip of claim 1 , wherein each first channel of the plurality of first channels are separated from each other along the second direction, and each second channel of the plurality of second channels are separated from each other along the first direction.

9. The biochip of claim 1 , wherein each first channel of the plurality of first channels has a first dimension in a direction perpendicular to the first direction and each biomolecule of the biomolecules has a second diameter wherein the first diameter is greater than the second diameter.

10. The biochip of claim 1 , wherein each second channel of the plurality of second channel has a third dimension in a direction perpendicular to the second direction and each biomolecule of the biomolecules has a second diameter wherein the third diameter is greater than the second diameter.

11. The biochip of claim 1 , wherein the first direction and the second direction form an acute angle between the first direction and the second direction.

12. The biochip of claim 6 , wherein the first direction is perpendicular to the second direction, and the driving unit further comprises a plurality of sets of driving electrodes in a one-to-one correspondence with the plurality of second channels;
the first separation electrode and the second separation electrode are arranged along the first direction; and
each set of the plurality of sets of driving electrodes comprises two driving electrodes arranged along the second direction and respectively at both ends of a corresponding second channel.

13. A method of manufacturing a biochip, the method comprising:
forming a guide layer;
forming a channel layer on the guide layer, wherein the forming the channel layer on the guide layer comprises:
forming a plurality of first channels extending in a first direction in the channel layer;
forming a plurality of second channels extending along a second direction in a first layer where the channel layer is located, or in a second layer where the channel layer and the guide layer are located, such that each second channel of the plurality of second channels is in communication with the plurality of first channels;
forming an encapsulation cover plate on a side of the channel layer distal to the guide layer; and
forming a driving unit configured to drive biomolecules to move;
the method further comprising forming a plurality of first grooves extending along the first direction on a side of the guide layer proximal to the channel layer, and in a one-to-one correspondence with the plurality of first channels such that an orthographic projection of each channel of the plurality of first channels on the guide layer is within an orthographic projection of a corresponding groove of the plurality of first grooves on the guide layer.

14. The method of claim 13 , wherein the forming the channel layer on the guide layer comprises:
forming a channel layer on the guide layer by way of a thin film deposition process.

15. The method of claim 13 , wherein the forming the guide layer comprises:
forming the guide layer using a material;
forming the plurality of first grooves extending along the first direction on the side of the guide layer proximal to the channel layer; and wherein
the forming the channel layer on the guide layer comprises: forming the plurality of first channels in a one-to-one correspondence with the plurality of first grooves in the channel layer at positions corresponding to the plurality of first grooves, as a result of deposition rates of a material of the channel layer at humps of the plurality of first grooves being different from recesses of the plurality o

Assignees

• Boe Technology Group Co Ltd

Inventors

• Ma Xiaochen
• Ning ce
• Yuan Guangcai
• Gu Xin
• Li Zhengliang

Classifications

• C23C14/34

  Sputtering · CPC title

• C23C14/04

  Coating on selected surface areas, e.g. using masks · CPC title

• B01L2400/0421

  electrophoretic flow · CPC title

• B01L2300/0896

  Nanoscaled · CPC title

• B01L2300/0819

  Microarrays; Biochips · CPC title