Bake devices for handling and uniform baking of substrates

Patent metadata

Field	Value
Publication number	US-12225641-B2
Application number	US-202017119377-A
Country	US
Kind code	B2
Filing date	Dec 11, 2020
Priority date	Dec 20, 2019
Publication date	Feb 11, 2025
Grant date	Feb 11, 2025

Abstract

Embodiments of the present disclosure relate to bake apparatuses for handling and uniform baking of substrates and methods for the handling and the uniform baking of substrates. The bake apparatuses allow the substrates to be heated to a temperature greater than 50° C. without bowing of about 1 mm to about 2 mm from the edge of the substrates to the center of the substrates. The bake apparatuses heat the substrates uniformly or substantially uniformly to improve substrate quality.

First claim

What is claimed is:

1. An apparatus, comprising:
a base;
two or more shafts contacting the base of the apparatus, each shaft of the two or more shafts having extensions disposed thereon, the extensions of each shaft of the two or more shafts operable to support one or more substrates disposed between the two or more shafts, each shaft of the two or more shafts having a first end and a second end;
a lid, the lid including one or more heating elements disposed therein, wherein the lid includes one of:
an actuator operable to move the lid from a raised position to a lowered position, the lid in the lowered position contacts the base to form a process volume between the lid and the base, and the second end of the two or more shafts contact the same base as contacted by the lid; and
an actuated door coupled to the lid, the actuated door operable to move from an open position to a closed position, the actuated door in the closed position contacts the lid to form the process volume between the lid, the two or more shafts, and the base, the lid contacts the base and the two or more shafts.

2. The apparatus of claim 1 , wherein the process volume can be heated to a temperature between about 50° C. and about 600° C.

3. The apparatus of claim 1 , wherein the one or more heating elements include a ceramic heater, a rubber heater, and a fiber glass heater.

4. The apparatus of claim 1 , wherein each shaft of the two or more shafts includes 1 to 5 extensions.

5. An apparatus, comprising: a base;
a substrate support disposed on the base, the substrate support including:
one or more heating elements; and

lift pins operable to support a substrate; a lid, the lid including:
an edge brace coupled thereon, the edge brace including a continuous ring extending between the lid and the substrate support, the ring having an inner diameter and an outer diameter, the outer diameter corresponding to the outer diameter of the substrate; and

an actuator operable to move the lid from a raised position to a lowered position to move the ring from a first position overlying the substrate at a first distance from the substrate to a second position overlying the substrate at a second distance from the substrate, wherein the second position is less than the first position; and
a process volume formed between the lid and the base when this lid in the lowered position contacts the base.

6. The apparatus of claim 5 , wherein the apparatus further includes a retention plate disposed on the substrate support.

7. The apparatus of claim 6 , wherein the retention plate includes channels disposed therethrough, the channels in communication with a pump to form a vacuum system.

8. The apparatus of claim 7 , wherein the retention plate includes a ceramic, mica, or a mixture of ceramic and metal materials.

9. The apparatus of claim 8 , wherein the retention plate is positioned relative to the one or more heating elements by tracks.

10. The apparatus of claim 9 , wherein the one or more heating elements is a heating plate.

11. The apparatus of claim 5 , wherein the ring contacts end portions of the substrate when the lid is in the lowered position.

12. A method, comprising:
disposing one or more substrates on extensions of two shafts in a bake apparatus, the extensions of each shaft of the two shafts are operable to support the one or more substrates disposed between the two shafts, the two shafts contact a base of the bake apparatus, each of the two shafts having a first end and a second end;
forming a process volume in the bake apparatus, wherein the forming the process volume includes one of:
moving a lid of the bake apparatus via an actuator between a raised position and a lowered position, the lid in the lowered position contacts the base to form the process volume between the lid and the base, and the second end of the two or more shafts contact the same base as contacted by the lid; and
moving an actuator door coupled to the lid from an open position to a closed position, the closed position contacts the lid to form the process volume between the lid, the two or more shafts, and the base, the lid contacts the base and the two or more shafts; and

heating the process volume with one or more heating elements disposed in the lid of the bake apparatus, the heating elements heating the one or more substrates uniformly or substantially uniformly.

13. The method of claim 12 , further comprising raising the lid of the bake apparatus to remove the one or more substrates.

14. The method of claim 12 , wherein the heating the process volume includes increasing a temperature in the process volume from about 40° C. to about 800° C.

15. The method of claim 12 , wherein the heating the process volume includes decreasing a temperature in the process volume from about 800° C. to about 40° C.

16. The method of claim 12 , wherein the heating the process volume includes maintaining a temperature in the process volume at about 80° C. to about 300° C.

Assignees

• Applied Materials Inc

Inventors

• Cervera Hiram
• Xu Yongan
• Godet Ludovic

Classifications

• H05B3/283

  the insulating material being an inorganic material, e.g. ceramic · CPC title

• F27D5/00 Primary

  Supports, screens or the like for the charge within the furnace · CPC title

• H05B3/62

  Heating elements specially adapted for furnaces (H05B3/60 takes precedence; arrangements of elements for electric heating in or on furnaces using ohmic resistance heating F27D11/02) · CPC title

• H05B3/748 Primary

  Resistive heating elements, i.e. heating elements exposed to the air, e.g. coil wire heater (H05B3/742 takes precedence) · CPC title

• F27D5/0037

  Supports specially adapted for semi-conductors · CPC title