Online vacuum degree detection system and method based on single-fiber laser-induced breakdown spectroscopy

Patent metadata

Field	Value
Publication number	US-12222283-B2
Application number	US-202217885230-A
Country	US
Kind code	B2
Filing date	Aug 10, 2022
Priority date	Jan 28, 2022
Publication date	Feb 11, 2025
Grant date	Feb 11, 2025

Abstract

Disclosed are an online vacuum degree detection system and method based on single-fiber laser-induced breakdown spectroscopy. In the system, a laser device generates laser that excites the laser through fiber induced breakdown spectroscopy; a fiber coupler couples and injects the laser; a single fiber is connected to the fiber coupler to transmit the laser; one end of an LIBS probe is connected to the single fiber, and the other end of the LIBS probe extends into a vacuum arc-extinguishing chamber; the laser is induced by the LIBS probe to generate plasma, and the plasma is subjected to self-emission imaging and enters the fiber coupler via the LIBS probe; a dichroscope is arranged on the fiber coupler to separate the laser from the plasma; a processor is connected to a camera and a spectrometer.

First claim

What is claimed is:

1. An online vacuum degree detection system based on single-fiber laser-induced breakdown spectroscopy, comprising:
a laser device, which generates laser that excites the laser through fiber induced breakdown spectroscopy, wherein the laser generated by the laser device has an energy of the laser 1 is 24 mJ, and has a wavelength of 1,064 nm;
a fiber coupler, which couples and injects the laser;
a single fiber, which is connected to the fiber coupler to transmit the laser, wherein a central glass core of the single fiber has a core diameter of 400 μm-600 μm; a material of a core layer of the single fiber adopts GeO 2 or SiO 2 ; and a material of a cladding layer of the single fiber adopts SiO 2 ;
a laser-induced breakdown spectroscopy (LIBS) probe, one end of which is connected to the single fiber, and the other end of which extends into a vacuum arc-extinguishing chamber, wherein the laser is conducted by the fiber and is induced by the LIBS probe to generate plasma, and the plasma is subjected to self-emission imaging and enters the fiber coupler via the LIBS probe, and the LIBS probe is a single-lens-based LIBS laser probe; during focusing, laser spots are focused and emitted through a lens to a shield target material of an arc-extinguishing chamber in a vacuum switch to generate the plasma;
a dichroscope, which is arranged on the fiber coupler to separate the laser from the plasma;
an achromatic instrument, which is connected to the fiber coupler;
a collection fiber, which is connected to the achromatic instrument to collect the plasma via the achromatic instrument;
a spectrometer, which is connected to the collection fiber to generate a spectral signal;
an intensified charged couple device (ICCD)-camera, which is connected to the spectrometer to collect a plasma image and further is used for taking pictures, wherein a filter is placed in front of the camera to filter plasma radiation and background noise to obtain a plasma image; and analysis is performed to obtain a vacuum degree;
a digital delay pulse generator, which is connected to the ICCD camera to control the ICCD camera by means of setting a delay between pulses and is configured to trigger the laser and the ICCD camera, wherein a time interval is adjusted to track evolution of the plasma;
a plasma imaging system, comprising the lens and being configured for achieving a focusing effect in the single-fiber, LIBS probe and the dichroscope for separating plasma emission from a laser path; and
a processor, which is connected to the ICCD camera and the spectrometer, wherein a plasma temperature and a plasma density are generated based on the plasma image and the spectral signal, so as to obtain thea vacuum degree; wherein
the laser is injected into the single fiber for transmission by the fiber coupler and transmitted to the LIBS probe to excite and induce a shield target material of the vacuum arc-extinguishing chamber;
the fiber coupler reflects a main laser beam through the dichroscope and injects the reflected main laser beam into the transmission fiber;
the plasma is subjected to self-emission imaging and enters the fiber coupler via the LIBS probe; the dichroscope separates the laser from the plasma and the collection fiber collects the plasma via the achromatic instrument;
an output of the laser is focused by using an imaging principle;
a laser spot on a fiber end face of the single fiber is imaged and mapped to a target surface through an aspherical lens to generate the plasma;
self-emission of the plasma is also imaged to an output end face of the fiber laser device and the plasma is then transmitted back through the single fiber;
emission of the plasma is separated from the laser path via the dichroscope; the plasma is guided by the achromatic instrument to be emitted into the collection fiber which is connected to the spectrometer;
the digital delay pulse generator is used to trigger a laser source and the ICCD camera; the ICCD camera is used to acquire an image of the plasma;
a spectral signal result is analyzed to obtain a vacuum measurement numerical value, thus achieving online monitoring of a remote vacuum switch equipment; and
the laser starts from the laser device to the fiber coupler, the single fiber and single-fiber LIBS probe.

2. A detection method using the online vacuum degree detection system based on single-fiber laser-induced breakdown spectroscopy according to claim 1 , wherein the method comprises the following steps:
coupling and injecting, by the fiber coupler, laser into the single fiber and transmitting the injected laser to the LIBS probe to excite the shield of the arc-extinguishing chamber in the vacuum switch to induce generation of plasma;
enabling the plasma to be subjected to self-emission imaging and to enter the fiber coupler via the LIBS probe, separating, by the dichroscope, the laser from the plasma, and collecting, by the collection fiber, the plasma via the achromatic instrument;
triggering, by the digital delay pulse generator, the laser and the camera, adjusting a time interval to track the evolution of the plasma, and obtaining, by the ICCD camera and the spectrometer, a plasma image and a spectral signal; and
generating, by the processor, a plasma temperature and a plasma density based on the plasma image and the spectral signal, so as to obtain the vacuum degree.

3. The detection method according to claim 2 , wherein the spectral signal comprises an ion spectral line composition and intensity.

Assignees

• Univ Xi An Jiaotong

Inventors

• Rong Mingzhe
• Liu Jiaqi
• Zhang Feilong
• Ke Wei
• Chen Minyuan
• Yuan Huan
• Yang Aijun
• Liu Dingxin
• Wang Xiaohua

Classifications

• G01N21/39

  using tunable lasers · CPC title

• G01N2201/08

  Optical fibres; light guides · CPC title

• G01N21/255 Primary

  Details, e.g. use of specially adapted sources, lighting or optical systems · CPC title

• G01N21/718 Primary

  Laser microanalysis, i.e. with formation of sample plasma · CPC title

• G01L21/30 Primary

  by making use of ionisation effects · CPC title