Device and method for processing a workpiece along a predetermined processing line using a pulsed polychromatic laser beam and a filter

Patent metadata

Field	Value
Publication number	US-12220762-B2
Application number	US-201916687231-A
Country	US
Kind code	B2
Filing date	Nov 18, 2019
Priority date	May 17, 2017
Publication date	Feb 11, 2025
Grant date	Feb 11, 2025

Abstract

Devices and methods for processing a workpiece along a predetermined processing line are provided. The device includes: a pulsed, polychromatic laser beam generator; an optical arrangement; and a moving device. The laser beam generator generates a laser beam along a beam direction. The optical arrangement generates a focal line along the beam direction. The optical arrangement has a chromatic aberration for wavelength-dependent focusing of the laser beam and a filter for wavelength-dependent filtering of the laser beam. The moving device generates relative movement between the laser beam and the workpiece along the predetermined processing line.

First claim

What is claimed is:

1. A method for processing a workpiece along a predetermined processing line, comprising:
generating a pulsed polychromatic laser beam with a pulse duration of less than 1 ps and a wavelength in the range of 350 nm to 2400 nm;
guiding the laser beam using an optical arrangement in order to generate a focal line along a beam direction of the laser beam, the optical arrangement having chromatic aberration for wavelength-dependent focusing of the laser beam; and
generating a relative movement between the laser beam and the workpiece along the predetermined processing line, in order to process the workpiece by the laser beam, wherein the workpiece comprises a material selected from a group consisting of glass, glass ceramic, and plastic, wherein the material is at least partially transparent for wavelengths of the laser beam, wherein the depth ofprocessing of the workpiece along the predetermined processing line is adjusted.

2. The method of claim 1 , wherein the laser beam is generated by a generator device selected from a group consisting of: a supercontinuum fiber laser, a spectral broadener, and a chirped pulse amplifier.

3. The method of claim 1 , further comprising controlling the laser beam to provide an attribute selected from a group consisting of: an average laser power of 5 to 120 watts, a burst mode of 12 to 48 ns, a wavelength range of 350 nm to 2400 nm, and any combinations thereof.

4. The method of claim 1 , wherein the chromatic aberration for wavelength-dependent focusing of the laser beam comprises a convex lens made of quartz glass or two diffraction gratings.

5. The method of claim 1 , wherein the filter is selected from a group consisting of: a band edge filter, a highpass filter, and lowpass filter.

6. The method of claim 1 , further comprising separating the workpiece along the predetermined processing line by external action.

7. The method of claim 6 , wherein the external action comprises mechanical action or thermal action.

8. The method of claim 1 , wherein the workpiece comprises a stack of workpieces or a workpiece laminate.

9. The method of claim 1 , further comprising applying a nonlinear interaction between an electromagnetic field of the laser beam and the workpiece so that the laser beam self-focuses.

10. The method of claim 1 , further comprising spectrally broadening a pulse of the laser beam as a function of the pulse width according to the equation

Δλ
≥

K
c

⁢

λ
2

Δτ

,

with K being 0.441 for a Gaussian pulse shape and K being 0.315 for a sech2-shaped pulse and Δτ being the pulse width.

11. The method of claim 1 , further comprising a wavelength dependent filtering of the laser beam by a filter.

12. The method of claim 1 , further comprising controlling the laser beam to provide an average laser power of 5 to 120 watts.

13. A method for processing a workpiece along a predetermined processing line, comprising:
providing the workpiece that is at least partially transparent for a wavelength range;
generating a pulsed polychromatic laser beam in the wavelength range and with a pulse duration of less than 1 ps and a wavelength in the range of 350 nm to 2400 nm;
passing the pulsed polychromatic laser beam through at least one filter for wavelength-dependent filtering of the laser beam, wherein the at least one filter is located only before an optical arrangement;
guiding the laser beam onto the workpiece using the optical arrangement having chromatic aberration for wavelength-dependent focusing of the laser beam such that an elongated focal line along a beam direction of the laser beam is generated and a filament is introduced within the workpiece; and
generating relative movement between the pulsed polychromatic laser beam and the workpiece along the predetermined processing line, in order to process the workpiece by the laser beam, wherein the depth of processing of the workpiece along the predetermined processing line is adjusted.

14. The method of claim 13 , wherein the length of the filament is at least partially dependent on the chromatic aberration.

15. The method of claim 1 , wherein the pulsed polychromatic laser beam further has an average laser power of 5 to 120 watts.

16. The method of claim 1 , wherein the pulsed polychromatic laser beam further has a burst mode of 12 ns to 48 ns.

17. A method for processing a workpiece along a predetermined processing line, comprising:
providing the workpiece that is at least partially transparent for a wavelength range of an ultrashort pulsed polychromatic laser beam with a pulse duration of less than 1 ps and a wavelength in the range of 350 nm to 2400 nm,
wherein the laser beam has a pulse that is spectrally broadened as a function of the pulse width according to the equation

Δλ
≥

K
c

⁢

λ
2

Δτ

,

with K being 0.441 for a Gaussian pulse shape and K being 0.315 for a sech2-shaped pulse and ΔT being the pulse width;
passing the pulsed polychromatic laser beam through at least one filter for wavelength-dependent filtering of the laser beam;
guiding the laser beam onto the workpiece using the optical arrangement having chromatic aberration for wavelength-dependent focusing of the laser beam so that an elongated focal line along a beam direction of the laser beam is generated and a filament is introduced within the workpiece; and
generating relative movement between the pulsed polychromatic laser beam and the workpiece along the predetermined processing line, in order to process the workpiece by the laser beam.

18. The method according to claim 17 , wherein the pulsed polychromatic laser beam is passed through at least one filter for wavelength-dependent filtering of the laser beam, and wherein the length or depth of processing of the workpiece along the predetermined processing line is adjusted.

19. The method according to claim 17 , wherein the workpiece is selected from the group consisting of glass, glass-ceramics, and plastics.

20. The method according to claim 1 , further comprising, between the first generating step and the guiding step, the step of passing the pulsed polychromatic laser beam through at least one filter for wavelength-dependent filtering of the laser beam, wherein the at least one filter is located only before an optical arrangement.

Assignees

• Schott Ag

Inventors

• Ortner Andreas
• Wagner Fabian
• Seidl Albrecht
• Schmitt Simon
• Lentes Frank-Thomas
• Thomas Jens Ulrich

Classifications

• B23K26/0006 Primary

  taking account of the properties of the material involved (B23K26/32, B23K26/40 take precedence) · CPC title

• B23K26/53

  for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks · CPC title

• B23K26/066 Primary

  by using masks · CPC title

• B23K26/064

  by means of optical elements, e.g. lenses, mirrors or prisms · CPC title

• B23K26/0622

  by shaping pulses · CPC title