Method and processing unit for activating at least one drive unit of at least one deflection unit of a microscanner device

Patent metadata

Field	Value
Publication number	US-12210147-B2
Application number	US-202017620468-A
Country	US
Kind code	B2
Filing date	Jul 21, 2020
Priority date	Aug 20, 2019
Publication date	Jan 28, 2025
Grant date	Jan 28, 2025

Abstract

A method for activating a drive unit of a deflection unit of a two-dimensional microscanner device. First and second control signals for activating the drive unit of the deflection unit are initially generated using a processing unit. The first and second control signals are subsequently transferred to the drive unit. A sinusoidal first movement of the deflection unit about a first axis and a sinusoidal second movement of the deflection unit about a second axis are carried out at a first point in time based on the transferred control signals. The first control signals are then adapted so that a periodic third movement is superimposed on the first movement at a second point in time following the first point in time. Alternatively, the second control signals are adapted so that a periodic fourth movement is superimposed on the second movement at the second point in time following the first.

First claim

What is claimed is:

1. A method for activating at least one drive unit of at least one deflection unit of a two-dimensional microscanner device, the method comprising:
generating first control signals for activating the at least one drive unit of the at least one deflection unit, using at least one processing unit;
generating second control signals for activating the at least one drive unit of the at least one deflection unit, using the at least one processing unit;
transferring the first control signals from the at least one processing unit to the at least one drive unit;
transferring the second control signals from the at least one processing unit to the at least one drive unit;
detecting, via a sensor unit, a rotation angle of the at least one deflection unit about a first axis and another rotation angle of the at least one deflection unit about a second axis;
carrying out a sinusoidal first movement of the at least one deflection unit about the first axis at a first point in time as a function of the transferred first control signals, the first axis being a horizontal axis wherein a second point in time is established as a function of a detected rotation angle of the at least one deflection unit about the first axis and of another detected rotation angle of the at least one deflection unit about the second axis;
carrying out a sinusoidal second movement of the at least one deflection unit about the second axis situated perpendicularly with respect to the first axis at the first point in time, wherein the second axis is a vertical axis; and
(i) adapting the first control signals transferred from the at least one processing unit to the at least one drive unit so that a periodic third movement is superimposed on the first movement at a second point in time following the first point in time, or (ii) adapting the second control signals transferred from the at least one processing unit to the at least one drive unit so that a periodic fourth movement is superimposed on the second movement at the second point in time following the first point in time.

2. The method as recited in claim 1 , wherein the at least one deflection unit is at least one micromirror.

3. The method as recited in claim 1 , wherein the sinusoidal first movement and the sinusoidal second movement are first and second rotational movements.

4. The method as recited in claim 1 , wherein the sinusoidal first movement of the at least one deflection unit about the first axis is carried out resonantly as a function of the transferred first control signals, and the first control signals are adapted so that a controlled third movement as the periodic third movement is superimposed on the first movement at the second point in time following the first point in time.

5. The method as recited in claim 1 , wherein the sinusoidal first movement of the at least one deflection unit about the first axis as a function of the transferred first control signals has a period duration T 1 , and the first control signals are adapted so that the periodic third movement generated at the second point in time following the first point in time has a period duration T 3 , a ratio of T 1 to T 3 being at least 1:8.

6. The method as recited in claim 5 , wherein the ratio is 1:1,000.

7. The method as recited in claim 1 , wherein:
the first control signals are adapted so that a periodic rectangular third movement as the periodic third movement is superimposed on the first movement, or
the second control signals are adapted so that a periodic rectangular fourth movement as the periodic fourth movement is superimposed on the second movement.

8. The method as recited in claim 1 , wherein the sinusoidal first movement of the at least one deflection unit about the first axis takes place at a defined first frequency, and the sinusoidal second movement of the at least one deflection unit about the second axis takes place at a defined second frequency, image points in the form of a Lissajous figure being projected onto a provided rectangular projection volume using the deflection unit.

9. The method as recited in claim 8 , wherein the second point in time following the first point in time occurs as a function of a temporal profile of the sinusoidal first movement and/or second movement of the at least one deflection unit.

10. The method as recited in claim 8 , wherein the second point in time following the first point in time is established as a function of the rotation angle of the at least one deflection unit about the first axis detected at the first point in time, and/or of the rotation angle of the at least one deflection unit detected at the first point in time.

11. The method as recited claim 8 , wherein the second point in time following the first point in time is established as a function of a detected rotation angle of the at least one deflection unit about the first axis and of another detected rotation angle of the at least one deflection unit about the second axis.

12. A processing apparatus configured to activate at least one drive unit of at least one deflection unit of a two-dimensional microscanner device, comprising:
a processing unit being configured to perform the following:
transferring first control signals for generating a sinusoidal first movement of the at least one deflection unit about a first axis to the at least one drive unit at a first point in time;
transferring second control signals for generating a sinusoidal second movement of the at least one deflection unit about a second axis to the at least one drive unit at the first point in time, the first axis and the second axis being situated perpendicularly with respect to one another;
detecting, via a sensor unit, a rotation angle of the at least one deflection unit about a first axis and another rotation angle of the at least one deflection unit about a second axis; and
(i) adapting the first control signals so that a periodic third movement is superimposed on the first movement at a second point in time following the first point in time, or (ii) adapting the second control signals so that a periodic fourth movement is superimposed on the second movement at the second point in time following the first point in time;
wherein the second point in time is established as a function of a detected rotation angle of the at least one deflection unit about the first axis and of another detected rotation angle of the at least one deflection unit about the second axis.

13. The processing apparatus as recited in claim 12 , wherein the at least one deflection unit is at least one micromirror.

14. The processing apparatus as recited in claim 12 , wherein the processing unit is configured to perform the following:
transferring the first control signals to the at least one drive unit so that the sinusoidal first movement of the at least one deflection unit about the first axis takes place resonantly; and
adapting the first control signals so that a controlled third movement as the periodic third movement is superimposed on the first movement at the second point in time following the first point in time.

15. The processing apparatus as recited in claim 12 , wherein the processing unit is configured to generate the first control signals and transfer the first control signals to the at least one drive unit so that the sinusoidal first movement has a period duration T 1 , the processing unit being designed to adapt the first control signals so that the periodic third movement generated at the second point in time following the first point in time has a defined period duration T 3 , a ratio of T 1 to T 3 being at least

Assignees

• Bosch Gmbh Robert

Inventors

• Petersen Andreas
• Schatz Frank
• Specht Hendrik
• Kuenstle Thomas

Classifications

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title

• G09G3/025

  with scanning or deflecting the beams in two directions or dimensions · CPC title

• H04N9/3135

  Driving therefor · CPC title

• H03B2200/007

  Generation of oscillations based on harmonic frequencies, e.g. overtone oscillators · CPC title

• H03B1/04

  Reducing undesired oscillations, e.g. harmonics · CPC title