In-sensor span calibration for mems ozone sensor
US-2019265183-A1 · Aug 29, 2019 · US
US12209983B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12209983-B2 |
| Application number | US-201917299402-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 28, 2019 |
| Priority date | Dec 21, 2018 |
| Publication date | Jan 28, 2025 |
| Grant date | Jan 28, 2025 |
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In an embodiment a sensor includes an outer housing, an inner housing disposed within an interior of the outer housing or connected to the interior of the outer housing, an ozone sensing component disposed within an interior of the inner housing, an ozone modifying component disposed within the interior of the outer housing, a substrate on which the ozone sensing component and the ozone modifying component are disposed, a first inlet integrated into the outer housing, the first inlet being configured to conduct ambient gaseous matter from an outside of the outer housing into the interior of the outer housing and a second inlet integrated into the inner housing, the second inlet being configured to conduct the gaseous matter from the interior of the outer housing into the interior of the inner housing and adjacent to the ozone sensing component, wherein the ozone sensing component is configured to generate a sensing component signal corresponding to an ozone concentration of the gaseous matter within the interior of the inner housing, and wherein the ozone modifying component is configured to alter the ozone concentration of the gaseous matter within the interior of the outer housing.
Opening claim text (preview).
The invention claimed is: 1. A sensor comprising: an outer housing; an inner housing disposed within an interior of the outer housing or connected to the interior of the outer housing; an ozone sensing component disposed within an interior of the inner housing; an ozone modifying component disposed within the interior of the outer housing; a substrate on which the ozone sensing component and the ozone modifying component are disposed; a first inlet integrated into the outer housing, the first inlet being configured to conduct ambient gaseous matter from an outside of the outer housing into the interior of the outer housing; and a second inlet integrated into the inner housing, the second inlet being configured to conduct the gaseous matter from the interior of the outer housing into the interior of the inner housing and adjacent to the ozone sensing component, wherein the ozone sensing component is configured to generate a sensing component signal corresponding to an ozone concentration of the gaseous matter within the interior of the inner housing, wherein the ozone modifying component is configured to alter the ozone concentration of the gaseous matter within the interior of the outer housing, wherein the ozone modifying component includes a light source, wherein the light source is configured to generate light comprising one or more wavelengths suitable for a photo-decomposition of ozone, wherein the ozone modifying component is configured to decrease the ozone concentration of the gaseous matter within the interior of the outer housing, wherein an interior surface of the outer housing is substantially reflective to the one or more wavelengths, wherein the interior surface of the outer housing is covered or made from a material comprising an iron-nickel alloy, a noble metal, an epoxide or a polytetrafluoroethylene, wherein the sensor is configured so that the ambient gaseous matter flows or diffuses from an ambience via the first inlet, the interior of the outer housing, the second inlet and the interior of the inner housing to the ozone sensing component, wherein the inner housing and the ozone modifying component are arranged laterally side by side on the substrate, and wherein the outer housing laterally surrounds the inner housing and the ozone modifying component. 2. The sensor of claim 1 , wherein the ozone sensing component comprises a metal oxide sensor element. 3. The sensor of claim 2 , wherein a sensing layer of the metal oxide sensor element comprises one of tungsten oxide or indium oxide. 4. The sensor of claim 1 , wherein the ozone modifying component includes a heat source, and wherein the heat source is configured to decrease the ozone concentration of the gaseous matter within the interior of the outer housing. 5. The sensor of claim 1 , wherein the ozone modifying component includes a plasma source, and wherein the plasma source is configured to decrease the ozone concentration of the gaseous matter within the interior of the outer housing. 6. The sensor of claim 1 , wherein the ozone modifying component includes an ozone source, wherein the ozone source is configured to increase the ozone concentration of the gaseous matter within the interior of the outer housing. 7. The sensor of claim 1 , further comprising: a processor; and a memory, wherein the processor is communicatively coupled to the ozone sensing component and the ozone modifying component, and wherein the memory is communicatively coupled to the processor, the processor being configured to: generate a raw signal with the ozone sensing component; record the raw signal at the memory; activate the ozone modifying component; generate a calibration signal with the ozone sensing component; record the calibration signal at the memory; and deactivate the ozone modifying component. 8. The sensor of claim 1 , wherein the sensor is free of a pump, a ventilator and a valve. 9. An apparatus comprising: the sensor of claim 1 , wherein the apparatus is realized as one of the group consisting of a wearable device, a mobile device, an indoor air monitor, an outdoor air monitor, an automotive air monitor, an industrial air or gas monitor, and a device for controlling an ozone disinfection apparatus. 10. A method for using the sensor of claim 1 , the method comprising: generating a raw signal with the ozone sensing component; activating the ozone modifying component; generating a calibration signal with the ozone sensing component; and deactivating the ozone modifying component. 11. The method of claim 10 , further comprising determining the ozone concentration of the gaseous matter outside of the outer housing from a plurality of raw signals and a plurality of calibration signals. 12. A method for using a sensor comprising an outer housing, an inner housing disposed within an interior of the outer housing or connected to the interior of the outer housing, an ozone sensing component disposed within an interior of the inner housing, an ozone modifying component disposed within the interior of the outer housing, a substrate on which the ozone sensing component and the ozone modifying component are disposed, a first inlet integrated into the outer housing and a second inlet integrated into the inner housing, wherein the ozone modifying component includes a light source, wherein the light source is configured to generate light comprising one or more wavelengths suitable for a photo-decomposition of ozone, wherein the ozone modifying component is configured to decrease an ozone concentration of a gaseous matter within the interior of the outer housing, wherein an interior surface of the outer housing is substantially reflective to the one or more wavelengths, and wherein the interior surface of the outer housing is covered or made from a material comprising an iron-nickel alloy, a noble metal, an epoxide or a polytetrafluoroethylene, the method comprising: generating, by the ozone sensing component, a raw signal; activating the ozone modifying component; generating, by the ozone sensing component, a calibration signal; and deactivating the ozone modifying component, wherein an ambient gaseous matter flows or diffuses from an ambience via the first inlet, the interior of the outer housing, the second inlet and the interior of the inner housing to the ozone sensing component, wherein the inner housing and the ozone modifying component are arranged laterally side by side on the substrate, and wherein the outer housing laterally surrounds the inner housing and the ozone modifying component. 13. The method of claim 12 , further comprising determining the ozone concentration of the ambient gaseous matter from a plurality of raw signals and a plurality of calibration signals.
O3 · CPC title
Sample treatment involving radiation, e.g. heat · CPC title
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of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid {, for detecting components in the fluid} · CPC title
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