Mixing dimers for moisture resistant materials
US-2017362703-A1 · Dec 21, 2017 · US
Increased deposition efficiency via dual reactor system
US12209199B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12209199-B2 |
| Application number | US-202117239516-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 23, 2021 |
| Priority date | Apr 23, 2020 |
| Publication date | Jan 28, 2025 |
| Grant date | Jan 28, 2025 |
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Abstract
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A method for depositing Parylene onto a substrate includes operating a first pyrolysis chamber at a first set of parameters to cause cracking of dimers into monomers at the first set of parameters and operating a second pyrolysis chamber at a second set of parameters to cause cracking of dimers into monomers at the second set of parameters. The method includes mixing the monomers at the first set of parameters with monomers at the second set of parameters together and polymerizing the mixture as a protective coating.
First claim
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What is claimed: 1. A method for depositing Parylene onto a substrate, comprising: operating a first pyrolysis chamber at a first set of parameters to cause cracking of dimers into monomers at the first set of parameters, wherein the monomers at the first set of parameters are a precursor to a first Parylene; operating a second pyrolysis chamber at a second set of parameters to cause cracking of dimers into monomers at the second set of parameters, wherein the monomers at the second set of parameters are a precursor to a second Parylene, wherein the first Parylene and the second Parylene are a same Parylene, wherein the first set of parameters includes a longer residence time than the second set of parameters, and wherein the first set of parameters includes a lower temperature than the second set of parameters; mixing the monomers at the first set of parameters with monomers at the second set of parameters together in a third pyrolysis chamber before entering a deposition chamber, wherein, within the third pyrolysis chamber, over-cracked monomer from the first pyrolysis chamber assists in cracking under-cracked dimer from the second pyrolysis chamber; and polymerizing the mixture as a protective coating in the deposition chamber. 2. The method of claim 1 , wherein the parameters further include pressure, concentration of dimer, amount of dimer, type of dimer, flow rate, or type of material, or a combination thereof. 3. A method for depositing Parylene onto a substrate, comprising: operating a first pyrolysis chamber at a first set of parameters to cause cracking of dimers into monomers at the first set of parameters; operating a second pyrolysis chamber at a second set of parameters to cause cracking of dimers into monomers at the second set of parameters, wherein the first set of parameters includes a longer residence time than the second set of parameters, and wherein the first set of parameters includes a lower temperature than the second set of parameters; mixing the monomers at the first set of parameters with monomers at the second set of parameters together in a third pyrolysis chamber before entering a deposition chamber, wherein, within the third pyrolysis chamber, over-cracked monomer from the first pyrolysis chamber assists in cracking under-cracked dimer from the second pyrolysis chamber; and polymerizing the mixture as a protective coating in the deposition chamber. 4. The method of claim 3 , wherein the monomers at the first set of parameters are a precursor to a first Parylene and wherein the monomers at the second set of parameters are a precursor to a second Parylene. 5. The method of claim 3 , wherein the monomers at the first set of parameters are a precursor to a first Parylene and wherein the monomers at the second set of parameters are a precursor to a second Parylene, wherein the first Parylene and the second Parylene are a same Parylene. 6. The method of claim 3 , wherein the parameters further include pressure, concentration of dimer, amount of dimer, type of dimer, flow rate, or type of material, or a combination thereof.
Assignees
Inventors
Classifications
Organic material · CPC title
Premixing before introduction in the reaction chamber · CPC title
by in situ generation of reactive gas by chemical or electrochemical reaction · CPC title
Polyxylylenes · CPC title
Flame spraying · CPC title
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- What does patent US12209199B2 cover?
- A method for depositing Parylene onto a substrate includes operating a first pyrolysis chamber at a first set of parameters to cause cracking of dimers into monomers at the first set of parameters and operating a second pyrolysis chamber at a second set of parameters to cause cracking of dimers into monomers at the second set of parameters. The method includes mixing the monomers at the first s…
- Who is the assignee on this patent?
- Hzo Inc
- What technology area does this patent fall under?
- Primary CPC classification C09D165/02. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Jan 28 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 2 related publications on this page (citations in our corpus or others sharing the same primary CPC).