Master, transferred object, and method of producing master

Patent metadata

Field	Value
Publication number	US-12208565-B2
Application number	US-201816955628-A
Country	US
Kind code	B2
Filing date	Dec 18, 2018
Priority date	Dec 26, 2017
Publication date	Jan 28, 2025
Grant date	Jan 28, 2025

Abstract

Provided are a master in which a more complicated microstructure is formed, a transferred object obtained by using the master, and a method of producing the master. A plurality of concave-convex groups each including a plurality of concavities or convexities are provided on a base material apart from each other. Average widths of areas occupied by the concavities or convexities at a surface of the base material are smaller than or equal to a wavelength belonging to a visible light band. Formed lengths of the concavities or convexities from the surface of the base material in each of the concave-convex groups each belong to any of at least two or more groups having different central values.

First claim

The invention claimed is:

1. A master comprising:
a plurality of concave-convex groups provided on a base material spaced apart from each other, the concave-convex groups each including a plurality of concavities or convexities, wherein
average widths of areas occupied by the concavities or convexities at a surface of the base material are smaller than or equal to a wavelength belonging to a visible light band,
formed lengths of the concavities or convexities from the surface of the base material in each of the concave-convex groups each belong to any of at least two or more groups having different central values,
the concave-convex groups are spaced apart from each other such that concavities are not provided continuously, and are spaced apart from each other at an interval wider than an interval between the concavities or convexities within the concave-convex groups, and
the respective concave-convex groups are laid out irregularly.

2. The master according to claim 1 , wherein
the average widths of the areas occupied by the respective concavities or convexities at the surface of the base material in each of the concave-convex groups belong to any of at least two or more groups having different central values.

3. The master according to claim 2 , wherein
the average widths of the areas occupied by the concavities or convexities at the surface of the base material increase as the formed lengths of the concavities or convexities at the surface of the base material increase.

4. The master according to claim 1 , wherein
the areas occupied by the respective concavities or convexities at the surface of the base material have a generally circular planar shape.

5. The master according to claim 1 , wherein
the interval at which each of the concave-convex groups is provided is larger than the wavelength belonging to a visible light band.

6. The master according to claim 1 , wherein
the respective concavities or convexities in each of the concave-convex groups are provided in a closest-packed arrangement.

7. The master according to claim 1 , wherein
the formed lengths of the respective concavities or convexities from the surface of the base material are changed gradually within each of the concave-convex groups.

8. The master according to claim 1 , wherein
the formed lengths of the respective concavities or convexities from the surface of the base material are changed irregularly within each of the concave-convex groups.

9. A master according to claim 1 , wherein the concave-convex groups are spaced apart from each other at an interval larger than a wavelength of visible light.

10. A transferred object, comprising
a concave-convex structure including the plurality of the concave-convex groups provided in the master as defined in claim 1 has been transferred.

11. A method of producing the master according to claim 1 , comprising the steps of:
forming a resist layer on a surface of the base material;
emitting laser light to the resist layer from a laser light source while arbitrarily controlling an output intensity and emission timing of the laser light source;
removing the resist layer in a region to which the laser light has been emitted or the laser light has not been emitted to form a pattern on the resist layer, the pattern including the plurality of concave-convex groups each including the plurality of concavities or convexities; and
performing etching using the resist layer on which the pattern has been formed as a mask to form a concave-convex structure corresponding to the pattern in the surface of the base material.

12. The method of producing a master according to claim 11 , wherein
the base material has a columnar or cylindrical shape, and
while rotating the base material using a height direction of the columnar or cylindrical shape as a rotation axis, the laser light source moves relatively in parallel to the rotation axis to emit the laser light to the resist layer on the base material.

13. The method of producing a master according to claim 12 , wherein
a control signal for the laser light source is generated to be synchronized with a control signal for rotation of the base material.

14. The method of producing a master according claim 11 , wherein
the laser light source is a semiconductor laser light source.

Assignees

• Dexerials Corp

Inventors

• Kikuchi Masanao
• Tazawa Hiroshi
• Nogami Asahiko
• Hayashibe Kazuya

Classifications

• C23F1/02

  Local etching · CPC title

• B29C33/3842

  Manufacturing moulds, e.g. shaping the mould surface by machining · CPC title

• G02B5/18

  Diffraction gratings {(holographic optical elements G02B5/32, G03H; integrally combined with optical fibres G02B6/02057; for coupling light guides G02B6/34; integrally combined with optical integrated light guides G02B6/12; grating systems G02B27/44)} · CPC title

• G02B5/02

  Diffusing elements; Afocal elements · CPC title

• G02B3/08

  with discontinuous faces, e.g. Fresnel lens {(diffractive Fresnel lenses G02B5/1876)} · CPC title