Coupling mechanism with spherical bearing, method of determining bearing radius of spherical bearing, and substrate polishing apparatus

Patent metadata

Field	Value
Publication number	US-12208488-B2
Application number	US-201916523093-A
Country	US
Kind code	B2
Filing date	Jul 26, 2019
Priority date	Jul 31, 2018
Publication date	Jan 28, 2025
Grant date	Jan 28, 2025

Abstract

A coupling mechanism capable of preventing vibration of a rotating body from occurring due to a lower-bearing friction torque is disclosed. The coupling mechanism includes an upper spherical bearing and a lower spherical bearing disposed between a drive shaft and a rotating body. The upper spherical bearing has a first concave contact surface and a second convex contact surface, and the lower spherical bearing has a third concave contact surface and a fourth convex contact surface. The first concave contact surface, the second convex contact surface, the third concave contact surface, and the fourth convex contact surface are arranged concentrically. A lower-bearing radius of the lower spherical bearing is determined so that a lower-restoring torque is equal to or less than 0, the lower-restoring torque being the sum of a rotating-body friction torque generated in the rotating body due to a rotating-body frictional force between a polishing pad and the rotating body, and a lower-bearing friction torque generated in the rotating body due to a frictional force between the third concave contact surface and the fourth convex contact surface.

First claim

What is claimed is:

1. A method for making a rotating body comprising a polishing head or a dresser for use in a chemical mechanical polishing (CMP) machine, the rotating body comprising a bearing including an upper spherical bearing and a lower spherical bearing, wherein the CMP machine comprises
a coupling mechanism for tiltably coupling the rotating body to a drive shaft, the rotating body to be pressed against a polishing pad, including the upper spherical bearing having a first concave contact surface and a second convex contact surface which is in contact with the first concave contact surface, and the lower spherical bearing having a third concave contact surface and a fourth convex contact surface which is in contact with the third concave contact surface, the upper spherical bearing and the lower spherical bearing having a same rotational center, the method comprising:
determining a lower-restoring torque of a rotating-body friction torque generated in the rotating body based on a relationship between a rotating-body frictional force between the polishing pad and the rotating body and a set of lower bearing radii, and
determining a lower-bearing friction torque generated in the rotating body based on a lower-bearing frictional force between the third concave contact surface and the fourth convex contact surface, the lower-bearing friction torque being calculated when a point of application where the rotating-body friction torque is applied to the lower spherical bearing is set at an outer end of the lower spherical bearing for the set of lower bearing radii, wherein
the lower restoring torque takes negative numbers in a polar coordinate system with its origin located on the rotational center, when the rotating body attempts to tilt toward a moving direction of the polishing pad,
making the rotating body with the bearing having a radius of the lower spherical bearing greater than 20 mm and less than 24.5 mm for a gimbal-axis height where the rotational center is below a bottom surface of the polishing head or dresser so that the lower-bearing friction torque is cancelled by the lower restoring torque whereby vibration occurring in the rotating body is diminished.

2. The method of making the rotating body according to claim 1 , further comprises the bearing having an upper-bearing radius of the upper spherical bearing selected from a set of upper bearing radii so that an upper-restoring torque is equal to or less than 0, and
the upper-restoring torque is the sum of the rotating-body friction torque and an upper-bearing friction torque generated in the rotating body due to a frictional force between the first concave contact surface and the second convex contact surface.

3. A substrate polishing apparatus, comprising:
a polishing table for supporting a polishing pad;
a rotatable drive shaft,
a polishing head coupled to the drive shaft by a coupling mechanism, the polishing head configured to be rotated by the drive shaft about an axis of rotation and to press a substrate against the polishing pad,
the coupling mechanism comprising:
an upper spherical bearing having a concave contact surface,
a lower spherical bearing having a bearing radius measured from a rotational center, which aligns with the axis of rotation, and
a contact member having an upper convex surface and a lower concave surface, the contact member being fixed to the drive shaft and disposed between the upper spherical bearing and the lower spherical bearing, wherein the upper convex surface slidable engages with the concave contact surface of the upper spherical bearing and the lower convex surface engages with the convex contact surface of the lower spherical bearing,
wherein the lower bearing radius is greater than 20 mm and less than 24.5 mm so that a lower restoring torque, based on a sum of a frictional force between the polishing head and the polishing pad when the polishing head is rotated against the polishing pad offset by a frictional force between the contact member, is equal to zero or causes the polishing head to tilt toward a moving direction of the polishing pad and the lower bearing for a gimbal-axis height where the rotational center is below a bottom surface of the polishing head.

4. The substrate polishing apparatus according to claim 3 , wherein an upper-bearing radius of the upper spherical bearing, which is a distance from the rotational center to the concave contact surface, and the upper convex contact surface, is determined so that an upper-restoring torque is equal to or less than 0, and
the upper-restoring torque is the sum of the rotating-body frictional force between the polishing head and the polishing pad when the polishing head is rotated against the polishing pad and an upper-bearing friction torque generated in the polishing head resulting from a frictional force between the concave contact surface and the upper convex contact surface, the upper-bearing friction torque being calculated when a point of application where the rotating-body friction torque is applied to the upper spherical bearing is set at an outer end of the upper spherical bearing, and
the upper restoring torque takes negative numbers in a polar coordinate system, when the polishing head attempts to tilt toward a moving direction of the polishing pad.

5. A substrate polishing apparatus comprising:
a polishing table for supporting a polishing pad;
a polishing head configured to press a substrate against the polishing pad;
a rotatable drive shaft, and
a dresser which is pressed against the polishing pad,
wherein the dresser is coupled to the drive shaft by a coupling mechanism, the dresser configured to be rotated by the drive shaft about an axis of rotation,
the coupling mechanism comprising an upper spherical bearing having a concave contact surface,
a lower spherical bearing having a bearing radius measured from a rotational center, which aligns with the axis of rotation, and
a contact member having an upper convex surface and a lower concave surface, the contact member being fixed to the drive shaft and disposed between the upper spherical bearing and the lower spherical bearing, wherein the upper convex surface slidable engages with the concave contact surface of the upper spherical bearing and the lower convex surface engages with the convex contact surface of the lower spherical bearing,
wherein the lower bearing radius is greater than 20 mm and less than 24.5 mm, wherein a lower-restoring torque, based on a frictional force between the dresser and the polishing pad when the dresser is rotated against the polishing pad offset by a frictional force between the contact member and the lower bearing, is equal to zero or causes the dresser to tilt toward a moving direction of the polishing pad.

6. The substrate polishing apparatus according to claim 5 , wherein an upper-bearing radius of the upper spherical bearing, which is a distance from the rotational center to the concave contact surface, and the upper convex contact surface, is determined so that an upper-restoring torque is equal to or less than 0, and
the upper-restoring torque is the sum of the rotating-body frictional force between the polishing head and the polishing pad when the polishing head is rotated against the polishing pad and an upper-bearing friction torque generated in the polishing head resulting from a frictional force between the concave contact surface and the upper convex contact surface, the upper-bearing friction torque being calculated when a point of application where the rotating-body friction torque is applied to the upper spherical bearing is set at an outer end of the upper spherical bearing, and
the upper restoring torque takes negative numbers in a polar coordinate system, when the polishing head attempts to tilt towar

Assignees

• Ebara Corp

Inventors

• Shinozaki Hiroyuki

Classifications

• B24B37/30

  for single side lapping of plane surfaces · CPC title

• B24B41/047

  Grinding heads for working on plane surfaces · CPC title

• B24B53/02

  of plane surfaces on abrasive tools (B24B53/017 takes precedence) · CPC title

• B24D7/16

  Bushings; Mountings · CPC title

• B24B53/12 Primary

  Dressing tools; Holders therefor · CPC title