Magnetic field detection device

Patent metadata

Field	Value
Publication number	US-12204004-B2
Application number	US-202318240671-A
Country	US
Kind code	B2
Filing date	Aug 31, 2023
Priority date	Mar 27, 2017
Publication date	Jan 21, 2025
Grant date	Jan 21, 2025

Abstract

A magnetic field detection device includes a base, a first yoke, and a magneto-resistive effect element. The first yoke is provided on the base, and includes first and second principal surfaces each extending along a first plane, and a first end surface coupling the first and second principal surfaces. The magneto-resistive effect element is provided on the base, and includes a magnetization free layer disposed at a position overlapped with the first yoke in a first direction along the first plane. The first end surface includes an inverted tapered surface inclined relative to the first plane and extending closer to a center point of the magnetization free layer as being away from the base in a second direction orthogonal to the first plane. A distance from the center point to a first edge is shorter than a distance from the center point to a second edge.

First claim

What is claimed is:

1. A magnetic field detection device comprising:
a base;
a first yoke provided on the base, the first yoke including a first principal surface that extends along a first plane, a second principal surface that extends parallel with the first plane, and a first end surface that couples the first principal surface and the second principal surface;
a magneto-resistive effect element provided on the base, and including a magnetization free layer that is disposed at a position overlapped with the first yoke in a first direction along the first plane, the magneto-resistive effect element having a magnetization sensing direction along the first direction;
a second yoke disposed at a position that is positioned on a side opposite to the first yoke in the first direction as viewed from the magneto-resistive effect element, and that is overlapped with the magnetization free layer in the first direction, the second yoke including a third principal surface that extends along the first plane, a fourth principal surface that extends parallel with the first plane, and a second end surface that couples the third principal surface and the fourth principal surface; and
a third yoke disposed at a position other than a position overlapped with a center point of the magnetization free layer in a second direction orthogonal to the first plane,
the first end surface including a first inverted tapered surface, the first inverted tapered surface extending closer to the center point of the magnetization free layer as being away from the base in the second direction, and being inclined relative to the first plane.

2. The magnetic field detection device according to claim 1 , wherein the third yoke is disposed at the position overlapped with the first yoke in the second direction.

3. The magnetic field detection device according to claim 2 , wherein the magneto-resistive effect element and the third yoke are spaced apart from each other in the first direction.

4. A magnetic field detection device comprising:
a base;
a first magnetic body provided on the base, the first magnetic body including a first principal surface that extends along a first plane, a second principal surface that extends parallel with the first plane, and a first end surface that couples the first principal surface and the second principal surface;
a magneto-resistive effect element provided on the base, and including a magnetization free layer that is disposed at a position overlapped with the first magnetic body in a first direction along the first plane, the magneto-resistive effect element having a magnetization sensing direction along the first direction;
a second magnetic body disposed at a position that is positioned on a side opposite to the first magnetic body in the first direction as viewed from the magneto-resistive effect element, and that is overlapped with the magnetization free layer in the first direction, the second magnetic body including a third principal surface that extends along the first plane, a fourth principal surface that extends parallel with the first plane, and a second end surface that couples the third principal surface and the fourth principal surface, and
a third magnetic body disposed at a position other than a position overlapped with a center point of the magnetization free layer in a second direction orthogonal to the first plane,
the first end surface including a first inverted tapered surface, the first inverted tapered surface extending closer to the center point of the magnetization free layer as being away from the base in the second direction, and being inclined relative to the first plane, and
the second end surface including a second inverted tapered surface, the second inverted tapered surface extending closer to the center point of the magnetization free layer as being away from the base in the second direction, and being inclined relative to the first plane.

5. The magnetic field detection device according to claim 4 , wherein the third magnetic body is disposed at the position overlapped with the first magnetic body in the second direction.

6. The magnetic field detection device according to claim 5 , wherein the magneto-resistive effect element and the third magnetic body are spaced apart from each other in the first direction.

7. A magnetic field detection device comprising:
a base;
a first yoke provided on the base, the first yoke including a first principal surface that extends along a first plane, a second principal surface that extends parallel with the first plane, and a first end surface that couples the first principal surface and the second principal surface;
a magneto-resistive effect element provided on the base, and including a magnetization free layer that is disposed at a position overlapped with the first yoke in a first direction along the first plane, the magneto-resistive effect element having a magnetization sensing direction along the first direction;
a second yoke disposed at a position that is positioned on a side opposite to the first yoke in the first direction as viewed from the magneto-resistive effect element, and that is overlapped with the magnetization free layer in the first direction, the second yoke including a third principal surface that extends along the first plane, a fourth principal surface that extends parallel with the first plane, and a second end surface that couples the third principal surface and the fourth principal surface, and
a third yoke disposed at a position other than a position overlapped with a center point of the magnetization free layer in a second direction orthogonal to the first plane,
the first end surface including a first inverted tapered surface, the first inverted tapered surface extending closer to the center point of the magnetization free layer as being away from the base in the second direction, and being inclined relative to the first plane, and
the first end surface including a first closest portion, the first closest portion being located closest to the magnetization free layer in the first direction, the first closest portion being overlapped with the magnetization free layer in the first direction, the first closest portion being separated from the magnetization free layer and facing the magnetization free layer in the first direction.

8. The magnetic field detection device according to claim 7 , wherein the third yoke is disposed at the position overlapped with the first yoke in the second direction.

9. The magnetic field detection device according to claim 8 , wherein the magneto-resistive effect element and the third yoke are spaced apart from each other in the first direction.

10. A magnetic field detection device comprising:
a base;
a first yoke provided on the base, the first yoke including a first principal surface that extends along a first plane, a second principal surface that extends parallel with the first plane, and a first end surface that couples the first principal surface and the second principal surface;
a magneto-resistive effect element provided on the base, and including a magnetization free layer that is disposed at a position overlapped with the first yoke in a first direction along the first plane, the magneto-resistive effect element having a magnetization sensing direction along the first direction;
a second yoke disposed at a position that is positioned on a side opposite to the first yoke in the first direction as viewed from the magneto-resistive effect element, and that is overlapped with the magnetization free layer in the first direction, the second yoke including a third principal surface that extends along the first plane, a fourth principal surface that extends parallel with the first

Assignees

• Tdk Corp

Inventors

• Tanaka Yoshiaki
• Hiraki Tetsuya
• Watanabe Kazuya
• Watanabe Suguru

Classifications

• G01R33/098

  comprising tunnel junctions, e.g. tunnel magnetoresistance sensors · CPC title

• G01R33/093 Primary

  using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00) · CPC title

• G01R33/091 Primary

  Constructional adaptation of the sensor to specific applications · CPC title