System, method, and device for monitoring closed state of cover of exposure machine, medium, and equipment

Patent metadata

Field	Value
Publication number	US-12203312-B2
Application number	US-202217580754-A
Country	US
Kind code	B2
Filing date	Jan 21, 2022
Priority date	Sep 11, 2020
Publication date	Jan 21, 2025
Grant date	Jan 21, 2025

Abstract

A system for monitoring a closed state of a cover of an exposure machine includes a servo motor, a photoelectric encoder, and a controller. A shaft of the servo motor is coaxially fixedly connected to a shaft of the cover. The photoelectric encoder is provided on the servo motor, and is configured to detect an angle of rotation of the shaft of the servo motor. The controller is connected to the servo motor and the photoelectric encoder, and is configured to control rotation of the shaft of the servo motor and determine whether the cover is in the closed state according to the angle.

First claim

The invention claimed is:

1. A system, comprising:
a servo motor, wherein a shaft of the servo motor is coaxially fixedly connected to a shaft of a cover of an exposure machine;
a photoelectric encoder, wherein the photoelectric encoder is provided on the servo motor, and is configured to detect an angle of rotation of the shaft of the servo motor;
a controller, wherein the controller is connected to the servo motor and the photoelectric encoder, and is configured to control rotation of the shaft of the servo motor and determine whether the cover is in a closed state according to the angle;
a sensing plate of a proximity switch, wherein the sensing plate of the proximity switch is provided atop a side of the cover away from the shaft of the cover; and
a sensor of the proximity switch, wherein the sensor of the proximity switch is in signal connection with the controller, is provided atop a side of a cover frame of the exposure machine away from the shaft of the cover corresponding to the sensing plate of the proximity switch, and is configured to, in response to the cover being closed and the sensing plate of the proximity switch approaching the sensor of the proximity switch, generate a proximity signal and send the proximity signal to the controller.

2. The system of claim 1 , wherein the proximity switch is an inductive proximity switch, and the sensor of the proximity switch is a sensor of the inductive proximity switch.

3. The system of claim 1 , further comprising a metal suction plate and an electromagnet,
wherein the metal suction plate is provided below a side of the cover away from the shaft of the cover,
wherein the electromagnet is in signal connection with the controller, is provided below a side of a cover frame of the exposure machine away from the shaft of the cover corresponding to the metal suction plate, and is configured to engage the metal suction plate according to an electromagnet control signal sent by the controller.

4. The system of claim 3 , wherein the metal suction plate and the electromagnet are provided in pairs below the side of the cover away from the shaft of the cover and the side of the cover frame of the exposure machine away from the shaft of the cover.

5. The system of claim 3 , wherein the cover is 700 mm in width, an arm of force of the electromagnet is 700 mm, and an arm of force of the servo motor is 5 mm.

6. The system of claim 1 , further comprising a human-machine interaction device,
wherein the human-machine interaction device is in signal connection with the controller, and is configured to display an open state of the cover or a closed state of the cover according to a state signal sent by the controller, and to make, through a manual operation, the controller generate a servo motor control signal to control opening or closing of the cover.

7. The system of claim 3 , further comprising an electromagnetic relay,
wherein the electromagnetic relay is connected between the controller and the electromagnet, and is configured to control, according to the electromagnet control signal sent by the controller, connection or disconnection of a path where the electromagnetic relay is located.

8. The system of claim 7 , wherein the electromagnetic relay has a low-voltage control circuit and a high-voltage working circuit, wherein the low-voltage control circuit is connected to the controller, wherein the high-voltage working circuit is connected to the electromagnet.

9. The system of claim 1 , further comprising a sound-light alarm circuit,
wherein the sound-light alarm circuit is connected to the controller, and is configured to, in response to the cover staying in a not-completely-closed state for a preset first period of time, give a sound-light alarm according to an alarm signal generated by the controller, wherein in the not-completely-closed state, a distance between the cover and the cover frame is greater than a first distance preset.

10. A method for monitoring a closed state of a cover of an exposure machine, a shaft of the cover of the exposure machine being coaxially fixedly connected to a shaft of a servo motor, the servo motor being provided with a photoelectric encoder configured to detect an angle of rotation of the shaft of the servo motor, the method comprising:
generating a servo motor control signal to control the servo motor to rotate;
acquiring the angle of rotation of the shaft of the servo motor detected by the photoelectric encoder; and
determining whether the cover is in the closed state according to the angle; and,
wherein a sensor of a proximity switch is provided on a cover frame of the exposure machine, a sensing plate of the proximity switch is provided on the cover corresponding to the sensor of the proximity switch, and the method further comprises:
generating a first control signal to control deceleration of the servo motor in response to a proximity switch signal generated by the sensor of the proximity switch when sensing proximity to the sensing plate of the proximity switch indicating a distance between the cover and the cover frame less than a second distance preset; and
generating a second control signal to control the servo motor to stop working in response to the proximity switch signal generated by the sensor of the proximity switch when sensing proximity to the sensing plate of the proximity switch indicating a distance between the cover and the cover frame equal to 0.

11. The method of claim 10 , wherein an electromagnet is provided on the cover frame of the exposure machine, a metal suction plate is provided on the cover corresponding to the electromagnet, and the method further comprises:
generating an electromagnet control signal to control the electromagnet to engage the metal suction plate in response to the proximity switch signal generated by the sensor of the proximity switch when sensing proximity to the sensing plate of the proximity switch indicating a distance between the cover and the cover frame less than a first distance.

12. The method of claim 11 , wherein both the first distance and the second distance are 50 mm.

13. The method of claim 10 , further comprising:
sending a state signal to a human-machine interaction device to display an open state of the cover or a closed state of the cover; and
collecting a human-machine interaction signal collected by the human-machine interaction device, and generating, according to the human-machine interaction signal, a servo motor control signal to control opening or closing of the cover.

14. The method of claim 10 , further comprising:
in response to the cover staying in a not-completely-closed state for a preset first period of time, generating an alarm signal, and sending the alarm signal to a sound-light alarm circuit to give a sound-light alarm, wherein in the not-completely-closed state, a distance between the cover and the cover frame is greater than a first distance preset.

15. The method of claim 14 , wherein the first period of time is 2 h, and the first distance is 50 mm or 25 mm.

16. A system, comprising:
a servo motor, wherein a shaft of the servo motor is coaxially fixedly connected to a shaft of a cover of an exposure machine;
a photoelectric encoder, wherein the photoelectric encoder is provided on the servo motor, and is configured to detect an angle of rotation of the shaft of the servo motor;
a controller, wherein the controller is connected to the servo motor and the photoelectric encoder, and is configured to control rotation of the shaft of the servo motor and determine whether the cover is in a closed state according

Assignees

• Changxin Memory Tech Inc

Inventors

• Liang Xueyu

Classifications

• E05Y2999/00

  Subject-matter not otherwise provided for in this subclass · CPC title

• G08B21/182

  Level alarms, e.g. alarms responsive to variables exceeding a threshold · CPC title

• G01D5/3473

  Circular or rotary encoders · CPC title

• G01D5/20

  by varying inductance, e.g. by a movable armature · CPC title

• E05Y2400/822

  Light emitters, e.g. light emitting diodes [LED] · CPC title