Cleaning tools and methods for cleaning the pull cable of an ingot puller apparatus

Patent metadata

Field	Value
Publication number	US-12202017-B2
Application number	US-202318300850-A
Country	US
Kind code	B2
Filing date	Apr 14, 2023
Priority date	Apr 27, 2022
Publication date	Jan 21, 2025
Grant date	Jan 21, 2025

Abstract

Cleaning tools for cleaning the pull cable of an ingot puller apparatus and methods for cleaning the pull cable are disclosed. The cleaning tool includes a chamber for receiving the pull cable. Pressurized fluid is discharged through one or more nozzles to detach debris from the pull cable. The fluid and debris are collected in an exhaust plenum of the cleaning tool and are expelled through an exhaust tube. The cleaning tool includes one or more guides that guide the cleaning tool in an upper segment of the ingot puller apparatus.

First claim

What is claimed is:

1. A cleaning tool for cleaning a pull cable of an ingot puller apparatus, the cleaning tool comprising:
a frame comprising a main body;
a chamber that extends through the main body for receiving the pull cable;
one or more nozzles for directing a pressurized fluid at the pull cable;
an exhaust flue for carrying away fluid discharged from the one or more nozzles; and
one or more outer guides that guide the cleaning tool within an upper chamber of the ingot puller apparatus during cleaning of the pull cable, the one or more outer guides being disposed radially outward from the main body, each of the one or more outer guides comprising a roller for contacting an inner surface of an upper chamber of the ingot puller apparatus.

2. The cleaning tool as set forth in claim 1 wherein the main body comprises a floor and a top, the chamber extending through the floor and the top.

3. The cleaning tool as set forth in claim 2 wherein the exhaust flue comprises:
an exhaust plenum within the main body; and
an exhaust tube that extends from the main body, the exhaust tube being in fluid communication with the exhaust plenum.

4. The cleaning tool as set forth in claim 1 wherein the cleaning tool has an extendable handle for raising and lowering the one or more nozzles into an upper chamber of the ingot puller apparatus.

5. The cleaning tool as set forth in claim 4 wherein the extendable handle comprises an exhaust tube that carries away fluid discharged from the one or more nozzles.

6. The cleaning tool as set forth in claim 1 wherein the one or more nozzles comprises a first nozzle and a second nozzle.

7. An ingot puller system for manufacturing a single crystal silicon ingot and for cleaning the system after use, the ingot puller system comprising:
an ingot puller apparatus comprising:
a crucible assembly for holding a silicon melt;
a crystal puller housing that defines a growth chamber for pulling a silicon ingot from the silicon melt, the crucible assembly being disposed within the growth chamber, the crystal puller housing comprising:
a lower dome-shaped segment; and
an upper cylindrical-shaped segment that is removably connected to the lower dome-shaped segment; and

a pulling mechanism comprising a pull cable; and

the cleaning tool as set forth claim 1 .

8. A cleaning tool for cleaning a pull cable of an ingot puller apparatus, the cleaning tool comprising:
a frame;
a chamber that extends through the frame for receiving the pull cable;
one or more nozzles for directing a pressurized fluid toward the pull cable; and
an extendable handle for raising and lowering the one or more nozzles into an upper chamber of the ingot puller apparatus, the extendable handle comprising a telescoping portion that enables the extendable handle to be extended and retracted.

9. The cleaning tool as set forth in claim 8 wherein the extendable handle comprises an exhaust tube, the exhaust tube having a fluid passageway through which fluid discharged from the one or more nozzles passes.

10. The cleaning tool as set forth in claim 8 comprising one or more outer guides that guide the cleaning tool within an upper chamber of the ingot puller apparatus during cleaning of the pull cable.

11. A cleaning tool for cleaning a pull cable of an ingot puller apparatus, the cleaning tool comprising:
a frame comprising a main body;
a chamber that extends through the main body for receiving the pull cable;
one or more nozzles for directing a pressurized fluid toward the pull cable;
an extendable handle for raising and lowering the one or more nozzles into an upper chamber of the ingot puller apparatus; and
one or more outer guides that guide the cleaning tool within an upper chamber of the ingot puller apparatus during cleaning of the pull cable, the one or more outer guides being disposed radially outward from the main body, each of the one or more outer guides comprising a roller for contacting an inner surface of an upper chamber of the ingot puller apparatus.

12. An ingot puller system for manufacturing a single crystal silicon ingot and for cleaning the system after use, the ingot puller system comprising:
an ingot puller apparatus comprising:
a crucible assembly for holding a silicon melt;
a crystal puller housing that defines a growth chamber for pulling a silicon ingot from the silicon melt, the crucible assembly being disposed within the growth chamber, the crystal puller housing comprising:
a lower dome-shaped segment; and
an upper cylindrical-shaped segment that is removably connected to the lower dome-shaped segment; and

a pulling mechanism comprising a pull cable; and

the cleaning tool as set forth claim 8 .

13. The cleaning tool as set forth in claim 11 the main body comprises a floor and a top, the chamber extending through the floor and the top.

14. The cleaning tool as set forth in claim 13 comprising:
an exhaust flue for carrying away fluid discharged from the one or more nozzles, the exhaust flue comprising:
an exhaust plenum within the main body; and
an exhaust tube that extends from the main body, the exhaust tube being in fluid communication with the exhaust plenum.

15. The cleaning tool as set forth in claim 11 wherein the extendable handle comprises an exhaust tube that carries away fluid discharged from the one or more nozzles.

16. The cleaning tool as set forth in claim 11 wherein the one or more nozzles comprises a first nozzle and a second nozzle.

17. An ingot puller system for manufacturing a single crystal silicon ingot and for cleaning the system after use, the ingot puller system comprising:
an ingot puller apparatus comprising:
a crucible assembly for holding a silicon melt;
a crystal puller housing that defines a growth chamber for pulling a silicon ingot from the silicon melt, the crucible assembly being disposed within the growth chamber, the crystal puller housing comprising:
a lower dome-shaped segment; and
an upper cylindrical-shaped segment that is removably connected to the lower dome-shaped segment; and

a pulling mechanism comprising a pull cable; and

the cleaning tool as set forth claim 11 .

Assignees

• Globalwafers Co Ltd

Inventors

• Ho Chin-Hung
• Cheng Chih-Kai
• Lin Chen-Yi
• Tsai Feng-Chien
• Li Tung-Hsiao
• Jeong Younggil
• Uhm Jin Yong

Classifications

• B08B9/34

  Arrangements of conduits or nozzles · CPC title

• B08B9/28

  the apparatus cleaning by splash, spray, or jet application, with or without soaking · CPC title

• C30B29/06

  Silicon · CPC title

• C30B15/00 Primary

  Single-crystal growth by pulling from a melt, e.g. Czochralski method (under a protective fluid C30B27/00) · CPC title

• C30B35/00 Primary

  Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure · CPC title