Chemically sensitive sensor comprising micro-barrier and method of fabrication thereof

Patent metadata

Field	Value
Publication number	US-12196699-B2
Application number	US-201917289422-A
Country	US
Kind code	B2
Filing date	Oct 30, 2019
Priority date	Nov 1, 2018
Publication date	Jan 14, 2025
Grant date	Jan 14, 2025

Abstract

The present invention relates to a chemically sensitive sensor for detecting volatile organic compounds, the sensor comprising a substrate, an electrode array, a micro-barrier, and a sensing layer comprising a multiplicity of core-shell particles in close-packed orientation, the particles comprising a metal nanoparticle (MNP) core and an organic ligand shell, wherein the MNP core has a mean particle size below about 15 nm. The invention further provides a method for fabrication of the chemically sensitive sensor.

First claim

The invention claimed is:

1. A chemically sensitive sensor for detecting volatile organic compounds (VOCs), the sensor comprising:
a substantially planar substrate having a top surface and a bottom surface, the substrate made of an electrically insulating material;
an electrode array being disposed on the top surface of said substrate;
a micro-barrier comprising an inner face and an outer face and being disposed on the top surface of the substrate and surrounding the electrode array; and
a sensing layer comprising a multiplicity of core-shell particles in close-packed orientation, wherein said core-shell particles are arranged in a film configuration and said sensing layer is essentially devoid of a polymer, the particles comprising a metal nanoparticle (MNP) core and an organic ligand shell, wherein the MNP core has a mean particle size below about 15 nm, the sensing layer is in electric contact with said electrode array, and the shape of said sensing layer is confined by the micro-barrier.

2. The chemically sensitive sensor according to claim 1 , wherein said micro-barrier is made of a hydrophobic material and wherein the sensing layer is hydrophobic.

3. The chemically sensitive sensor according to claim 1 , wherein the micro-barrier has a cross-sectional shape selected from the group consisting of circular, oval, square, rectangular, triangular, hexagonal, and polygon shape.

4. The chemically sensitive sensor according to claim 1 , wherein said micro-barrier has a height ranging from about 1 μm to about 20 um, a thickness ranging from about 10 μm to about 500 μm, and/or an inner perimeter ranging from about 0.2 mm to about 15 mm.

5. The chemically sensitive sensor according to claim 1 , wherein said micro-barrier has a circular cross-sectional shape with an inner diameter ranging from about 0.2 mm to about 5 mm.

6. The chemically sensitive sensor according to claim 1 , wherein the inner face of the micro-barrier is substantially smooth and substantially orthogonal to the top surface of the substrate.

7. The chemically sensitive sensor according to claim 1 , wherein said micro-barrier is made of an epoxy-based photoresist.

8. The chemically sensitive sensor according to claim 1 , wherein said MNP core has a mean particle size ranging from about 1.5 nm to about 5 nm.

9. The chemically sensitive sensor according to claim 1 , wherein the organic ligand shell has a thickness ranging from about 1.2 nm to about 7 nm.

10. The chemically sensitive sensor according to claim 1 , wherein the MNP core comprises a metal selected from the group consisting of Au, Pt, Ag, Ni, Co, Pd, Cu, Al, Zn, Fe, and combinations thereof or a metal alloy selected from the group consisting of Au/Pt, Au/Ag, Au/Cu, Au/Ag/Cu, Au/Pd, Au/Ag/Cu/Pd, Pt/Rh, Ni/Co, and Pt/Ni/Fe.

11. The chemically sensitive sensor according to claim 10 , wherein the MNP core comprises Au.

12. The chemically sensitive sensor according to claim 1 , wherein said organic ligand is selected from the group consisting of alkylthiols, arylthiols, alkylarylthiols, alkylthiolates, ω-functionalized alkanethiolates, arenethiolates, (γ-mercaptopropyl) tri-methyloxysilane, dialkyl disulfides, and combinations and derivatives thereof.

13. The chemically sensitive sensor according to claim 12 , wherein the ligand is selected from the group consisting of dodecanethiol, 2-ethylhexanethiol, decanethiol, hexanethiol, dibutyl disulfide, 4-tert methylbenzenethiol, 1-heptanethiol, butanethiol, benzylmercaptan, 3-ethoxytiophenol, tert-dodecanethiol, and combinations thereof.

14. The chemically sensitive sensor according to claim 1 , wherein the sensing layer has a substantially uniform thickness throughout its entire area.

15. The chemically sensitive sensor according to claim 1 , wherein the substrate is made of the electrically insulating material selected from the group consisting of silicon, silicon dioxide, quartz, glass, ceramic, plastic, Teflon, Kapton, and combinations thereof, and/or the electrodes are made of a material selected from the group consisting of Au, Pt, Ti, Cu, Ag, Pd, Ni, Al, and alloys and combinations thereof.

16. A method for fabricating a chemically sensitive sensor for detecting VOCs, the method comprising the steps of:
i) providing a substantially planar substrate having a top surface and a bottom surface, the substrate being made of an electrically insulating material;
ii) forming an electrode array on the top surface of the substrate;
iii) forming a micro-barrier on the top surface of the substrate, wherein the micro-barrier surrounds the electrode array; and
iv) forming a sensing layer comprising a multiplicity of core-shell particles in close-packed orientation by applying a dispersion comprising the core-shell particles and a solvent onto the top surface of the substrate and/or the electrode array within the micro-barrier, wherein said dispersion is applied in a volume which forms a drop, having essentially the same height as the height of the micro-barrier, the particles comprising a metal nanoparticle (MNP) core and an organic ligand shell, wherein the MNP core has a mean particle size below about 15 nm, the sensing layer is in electric contact with the electrode array, and the shape of the sensing layer is confined by said micro-barrier.

17. The method according to claim 16 , wherein the step of forming the micro barrier is performed by a photolithography process comprising applying a negative photoresist to the substrate and the electrode array, disposing a mask with a predefined pattern on the negative photoresist, exposing the negative photoresist to UV irradiation, and developing the remaining negative photoresist.

18. A method for fabricating a chemically sensitive sensor for detecting VOCs, the method comprising the steps of:
i) providing a substantially planar substrate having a top surface and a bottom surface, the substrate being made of an electrically insulating material;
ii) forming an electrode array on the top surface of the substrate;
iii) forming a micro-barrier on the top surface of the substrate, wherein the micro-barrier surrounds the electrode array; and
iv) forming a sensing layer comprising a multiplicity of core-shell particles in close-packed orientation by applying a hydrophobic dispersion comprising the core-shell particles and a solvent onto the top surface of the substrate and/or the electrode array within the micro-barrier, wherein said dispersion is applied in a volume which forms a drop, having essentially same height as the height of the micro-barrier, the particles comprising a metal nanoparticle (MNP) core and an organic ligand shell, wherein the MNP core has a mean particle size below about 15 nm, the sensing layer is in electric contact with the electrode array, and the shape of the sensing layer is confined by said micro-barrier.

19. The method according to claim 18 , wherein the dispersion is applied by a process selected from inkjet-printing and drop-casting.

Assignees

• Technion Res & Dev Foundation

Inventors

• Haick Hossam
• Milyutin Yana
• Shani Gidi
• Abud Hawa Manal

Classifications

• G03F7/32

  Liquid compositions therefor, e.g. developers · CPC title

• G03F7/2004

  characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light · CPC title

• G03F7/0382

  the macromolecular compound being present in a chemically amplified negative photoresist composition · CPC title

• G01N33/0047

  Organic compounds · CPC title

• C01P2004/64

  Nanometer sized, i.e. from 1-100 nanometer · CPC title