MEMS speaker

Patent metadata

Field	Value
Publication number	US-12192702-B2
Application number	US-202217969668-A
Country	US
Kind code	B2
Filing date	Oct 19, 2022
Priority date	Jun 20, 2022
Publication date	Jan 7, 2025
Grant date	Jan 7, 2025

Abstract

The invention provides a MEMS speaker including a substrate enclosing a cavity, a cantilever beam at least partially suspended above the cavity, a piezoelectric actuator away from the cavity, a polymer layer away from the cavity and attached to the cantilever beam and the piezoelectric actuator for completely covering the cantilever beam, the piezoelectric actuator and the cavity, and a piezoelectric composite vibration structure formed by the polymer layer. The cantilever beam includes a first section fixed to the substrate, a second section extending from the first section to the cavity and suspended above the cavity, and a third section extending from the second section away from the first section, an end of the third section away from the second section being suspended; and the piezoelectric actuator is only fixed with the third section.

First claim

What is claimed is:

1. A micro-electromechanical system (MEMS) MEMS speaker including:
a substrate enclosing a cavity and being provided with openings at both ends;
a cantilever beam extending from one end of the substrate to the cavity and at least partially suspended above the cavity;
a piezoelectric actuator fixed on a side of the cantilever beam away from the cavity;
a polymer layer disposed on a side of the piezoelectric actuator away from the cavity and attached to the cantilever beam and the piezoelectric actuator for completely covering the cantilever beam, the piezoelectric actuator and the cavity;
a piezoelectric composite vibration structure formed by the polymer layer, the cantilever beam and the piezoelectric actuator for generating vibration and sound;
wherein
the cantilever beam includes a first section fixed to the substrate, a second section extending from the first section to the cavity and suspended above the cavity, and a third section extending from the second section away from the first section, an end of the third section away from the second section being suspended; and
the piezoelectric actuator is only fixed with the third section;
the MEMS speaker further includes a weight connected to the polymer layer or the cantilever beam; the weight is adjustable in height and extends at least partially into the cavity.

2. The MEMS speakers as described in claim 1 , further including a dielectric layer sandwiched between the first section and the substrate; wherein a material of the dielectric layer is different from that of the substrate.

3. The MEMS speakers as described in claim 2 , wherein the piezoelectric actuator includes a first electrode, a piezoelectric layer and a second electrode stacked in a sequence on the third section along a thickness direction of the MEMS speakers; a projection of the piezoelectric actuator along the thickness direction of the MEMS speakers covers only the third section.

4. The MEMS speakers as described in claim 3 , wherein, a sectional area of the second section connected to the connection position of the third section is smaller than a sectional area of the third section at a connection position; in the extension direction of the cantilever beam, the sectional areas at different positions of the second section are equal, and the sectional areas of the third section gradually decrease.

5. The MEMS speakers as described in claim 3 including multiple spaced cantilever beams and multiple piezoelectric actuators; wherein a first structural gap is formed between two adjacent cantilever beams; each of the piezoelectric actuators is fixed on one of the cantilever beams; ends of the third sections of each of the plurality of cantilever beams that are close to each other are spaced apart from each other and together form a second structural gap communicated with the first structural gap and forms a structural gap together; the second structural gap is located in a central region of the cavity; and the structural gap is communicated with the cavity.

6. The MEMS speakers as described in claim 5 , wherein, the first structural gap is formed between the third sections of two adjacent cantilever beams.

7. The MEMS speaker as described in claim 5 , wherein the weight accommodated in the second structural gap; the weight, the polymer layer, the cantilever beam and the piezoelectric actuator together form the piezoelectric composite vibration structure.

8. The MEMS speaker as described in claim 7 , further including an elastic connection element accommodated in the second structural gap; wherein one end of the third section of each cantilever beam away from the first section is connected to the weight through the elastic connection element.

9. The MEMS speakers as described in claim 7 , wherein a side of the weight away from the cavity is fixed to the polymer layer; and the weight is spaced from the third section.

Assignees

• Aac Kaitai Tech Wuhan Co Ltd
• Aac Acoustic Tech Shenzhen Co Ltd

Inventors

• Dan qiang
• Shen Yu
• Zhou Yiwei
• Li Yang

Classifications

• H04R2201/003

  Mems transducers or their use · CPC title

• H04R7/10

  comprising superposed layers in contact · CPC title

• H04R17/00 Primary

  Piezoelectric transducers; Electrostrictive transducers (piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners {H10N30/00}) · CPC title