Monitoring device, optical filter system, monitoring method, and current generation device

Patent metadata

Field	Value
Publication number	US-12189113-B2
Application number	US-201917414462-A
Country	US
Kind code	B2
Filing date	Sep 9, 2019
Priority date	Dec 18, 2018
Publication date	Jan 7, 2025
Grant date	Jan 7, 2025

Abstract

Provided is a monitor device used with a Fabry-Perot interference filter having a pair of mirror parts and a pair of driving electrodes, and having a distance between the mirror parts changed in accordance with charges stored between the driving electrodes. The monitor device includes: a current application unit that applies an AC current having a frequency higher than a resonant frequency of the mirror parts across the driving electrodes; a voltage detection unit that detects a temporal development of a voltage generated between the driving electrodes during application of the AC current; a control unit that controls the AC current across the driving electrodes, based on an evaluation of a DC component of the voltage detected by the voltage detection unit; and a monitor unit that monitors the distance between the mirror parts based on an AC component of the voltage detected by the voltage detection unit.

First claim

The invention claimed is:

1. A monitor device used with a Fabry-Perot interference filter having a pair of mirror parts facing each other with an air gap therebetween and a pair of driving electrodes facing each other with the air gap therebetween, and having a distance between the pair of mirror parts changed in accordance with charges stored between the pair of driving electrodes, the monitor device comprising:
a current application unit that applies an AC current having a frequency higher than a resonant frequency of the pair of mirror parts across the pair of driving electrodes;
a voltage detection unit that detects a temporal development of a voltage generated between the pair of driving electrodes during application of the AC current;
a control unit that controls the AC current applied by the current application unit across the pair of driving electrodes, based on an evaluation of a DC component of the voltage detected by the voltage detection unit; and
a monitor unit that monitors the distance between the pair of mirror parts based on an AC component of the voltage detected by the voltage detection unit.

2. The monitor device according to claim 1 , wherein
the control unit controls the AC current applied by the current application unit across the pair of driving electrodes, based on a temporal change of the DC component of the voltage detected by the voltage detection unit.

3. The monitor device according to claim 1 , wherein
the control unit controls the AC current applied by the current application unit across the pair of driving electrodes so that a level of the DC component of the voltage detected by the voltage detection unit is kept constant.

4. The monitor device according to claim 1 , wherein
the current application unit has a pair of current sources that apply currents with directions different from each other across the pair of driving electrodes, and generates the AC current by alternately driving the pair of current sources.

5. The monitor device according to claim 4 , wherein
the control unit changes a duty ratio of a pulse-shaped current generated by at least either one of the pair of current sources, based on the evaluation of the DC component of the voltage detected by the voltage detection unit.

6. The monitor device according to claim 4 , wherein
the control unit changes a level of the current generated by at least either one of the pair of current sources, based on the evaluation of the DC component of the voltage detected by the voltage detection unit.

7. The monitor device according to claim 4 , wherein
the current application unit further has a current source for adjustment that applies the current in the same direction as one of the pair of current sources across the pair of driving electrodes; and
the control unit controls the current generated by the current source for adjustment, based on the evaluation of the DC component of the voltage detected by the voltage detection unit.

8. The monitor device according to claim 4 , wherein
each of the pair of current sources includes a photodiode and a light source that outputs light incident to the photodiode.

9. The monitor device according to claim 4 , wherein
the current application unit further has an operational amplifier having an inverting input terminal connected to an output terminal; and
the pair of current sources are connected to a non-inverting input terminal and the output terminal of the operational amplifier in parallel.

10. The monitor device according to claim 1 , wherein
the control unit controls the AC current applied by the current application unit across the pair of driving electrodes, based on the DC component and the AC component of the voltage detected by the voltage detection unit.

11. An optical filter system, comprising:
the monitor device according to claim 1 ; and
the Fabry-Perot interference filter having a distance between the pair of mirror parts monitored by the monitor device.

12. A monitoring method for monitoring a distance between a pair of mirror parts in a Fabry-Perot interference filter having the pair of mirror parts facing each other with an air gap therebetween and a pair of driving electrodes facing each other with the air gap therebetween, and having the distance between the pair of mirror parts changed in accordance with charges stored between the pair of driving electrodes, the monitoring method comprising:
a voltage detection step of detecting a temporal development of a voltage generated between the pair of driving electrodes when an AC current having a frequency higher than a resonant frequency of the pair of mirror parts is applied across the pair of driving electrodes;
a control step of controlling the AC current applied across the pair of driving electrodes at the voltage detection step, based on an evaluation of a DC component of the voltage detected at the voltage detection step; and
a monitor step of monitoring a distance between the pair of mirror parts based on an AC component of the voltage detected at the voltage detection step.

13. A current generating device comprising:
an operational amplifier having an inverting input terminal connected to an output terminal;
a pair of photodiodes connected to a non-inverting input terminal and the output terminal of the operational amplifier in parallel in direction opposite to each other;
a pair of light sources each of which outputs light incident to the pair of photodiodes; and
a control unit configured to control the pair of light sources so that an AC current is generated by alternately driving the pair of light sources and by alternately driving the pair of photodiodes and a DC current is generated by driving either one of the pair of light sources and by driving either one of the pair of photodiodes.

Assignees

• Hamamatsu Photonics Kk

Inventors

• DURANDI Andreas
• Teichmann Helmut

Classifications

• G02B26/001 Primary

  based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26) · CPC title

• G02B5/284 Primary

  of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates (etalons for fibre optic multiplexing G02B6/29358; etalons for spectral measurement G01J3/26) · CPC title

• G01J3/26 Primary

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title