Method of forming silicon film on substrate having fine pattern
US-2022005690-A1 · Jan 6, 2022 · US
Powder and solid composition
US12187902B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12187902-B2 |
| Application number | US-202017624957-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 22, 2020 |
| Priority date | Jul 12, 2019 |
| Publication date | Jan 7, 2025 |
| Grant date | Jan 7, 2025 |
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Abstract
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This powder satisfies requirements 1 and 2. Requirement 1: |dA(T)/dT| satisfies 10 ppm/° C. or more at at least one temperature T1 in a range of −200° C. to 1200° C. A is (a-axis (shorter axis) lattice constant) of a crystal in the powder)/(c-axis (longer axis) lattice constant of the crystal in the powder), and each of the lattice constants is obtained by X-ray diffractometry of the powder. Requirement 2: a particle diameter D50 at a cumulative frequency of 50%, a particle diameter D10 at a cumulative frequency of 10%, and a particle diameter D90 at a cumulative frequency of 90% in a volume-based cumulative particle diameter distribution curve obtained by a laser diffraction scattering method satisfy conditions (I) and (II): (I) D10/D50 is 0.05 or more and 0.45 or less; and (II) D90 is 0.5 μm or more and 70 μm or less.
First claim
Opening claim text (preview).
The invention claimed is: 1. A titanium-containing metal oxide powder that satisfies the following requirements 1 and 2: requirement 1: |dA (T)/dT| satisfies 10 ppm/° C. or more at at least one temperature T1 in a range of −200° C. to 1200° C. where A is (a-axis (shorter axis) lattice constant of a crystal in the powder)/(c-axis (longer axis) lattice constant of the crystal in the powder), and each of the lattice constants is obtained by X-ray diffractometry of the powder; dA(T)/dT represents differentiation of A(T) by T (temperature), |dA(T)/dT| represents an absolute value of dA(T)/dT, and |dA(T)/dT|=|A(T+50)−A(T)|/50; requirement 2: a particle diameter D50 at a cumulative frequency of 50%, a particle diameter D10 at a cumulative frequency of 10%, and a particle diameter D90 at a cumulative frequency of 90% in a volume-based cumulative particle diameter distribution curve obtained by a laser diffraction scattering method satisfy the following conditions (I) and (II): (I) a ratio of D10 to D50 (D10/D50) is 0.05 or more and 0.45 or less, and (II) D90 is 0.5 μm or more and 70 μm or less. 2. The titanium-containing metal oxide powder according to claim 1 , wherein the titanium-containing metal oxide powder is TiO x (x=1.30 to 1.66) powder. 3. The titanium-containing metal oxide powder according to claim 1 , wherein the D50 is 0.5 μm or more and 60 μm or less. 4. A solid composition comprising the titanium-containing metal oxide powder according to claim 1 and a first material. 5. The solid composition according to claim 4 , wherein the first material is at least one compound selected from the group consisting of resins, alkali metal silicates, ceramics, and metals.
Assignees
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Classifications
Grinding · CPC title
Silicates of the alkali metals · CPC title
Titanium oxide, e.g. titanates · CPC title
Thermal properties · CPC title
Submicrometer sized, i.e. from 0.1-1 micrometer · CPC title
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- What does patent US12187902B2 cover?
- This powder satisfies requirements 1 and 2. Requirement 1: |dA(T)/dT| satisfies 10 ppm/° C. or more at at least one temperature T1 in a range of −200° C. to 1200° C. A is (a-axis (shorter axis) lattice constant) of a crystal in the powder)/(c-axis (longer axis) lattice constant of the crystal in the powder), and each of the lattice constants is obtained by X-ray diffractometry of the powder. Re…
- Who is the assignee on this patent?
- Sumitomo Chemical Co
- What technology area does this patent fall under?
- Primary CPC classification C09C1/3623. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Jan 07 2025 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 4 related publications on this page (citations in our corpus or others sharing the same primary CPC).