Stocker system for wafer cassette

Patent metadata

Field	Value
Publication number	US-12176232-B2
Application number	US-202318341496-A
Country	US
Kind code	B2
Filing date	Jun 26, 2023
Priority date	Sep 27, 2019
Publication date	Dec 24, 2024
Grant date	Dec 24, 2024

Abstract

A support member system is described for association with an overhead transport system. The support member system provides a safety feature to the overhead transport system by which the overhead transport system is able to avoid damage to wafers that are contained within a wafer cassette that is unintentionally released by the overhead transport system. The support member system is able to prevent such released cassettes from impacting the ground or tools located under the overhead transport system. The support member system targets wafer cassettes that have dimensions which are different than the dimensions of wafer cassettes for which the overhead transport system was originally designed to transport. Stocker systems for receiving, storing and delivering different types of wafer cassettes are also described.

First claim

The invention claimed is:

1. A stocker system, comprising:
a multi-cassette rack configured to, in operation, store at least two different types of wafer cassettes;
one or more multi-cassette ports within the multi-cassette rack,
each respective multi-cassette port including:
a first end and a second end opposite to the first end;
a first side and a second side opposite to the first side,
the first side and the second side extend from the first end to the second end;

a first guide arm attached to the multi-cassette rack, the first guide arm being positioned at the first side; and
a second guide arm attached to the rack, the second guide arm parallel to the first guide arm and the second guide arm being positioned at the second side,
wherein the first guide arm and the second guide arm are spaced apart from each other to accommodate at least two different types of wafer cassettes,
the two different types of wafer cassettes having a different size and shape relative to each other.

2. The stocker system according to claim 1 , wherein the first guide arm includes:
a first front guide block; and
a first rear guide block, the first front guide block disposed at a front end of the first guide arm and the first rear guide block disposed at a rear end of the first guide arm;
wherein the second guide arm includes:
a second front guide block; and
a second rear guide block, the second front guide block disposed at a front end of the second guide arm and the second rear guide block disposed at a rear end of the second guide arm.

3. The stocker system according to claim 2 , wherein the first guide arm includes:
a first front upper guide body disposed on the first front guide block; and
a first rear upper guide body disposed on the first rear guide block,
wherein the second guide arm includes:
a second front upper guide body disposed on the second front guide block; and
a second rear upper guide body disposed on the second rear guide block.

4. The stocker system according to claim 3 , wherein at least one of the upper guide bodies includes an inclined surface.

5. The stocker system according to claim 4 , wherein the inclined surface of the first front upper guide body is facing the inclined surface of the second front upper guide body, and wherein the inclined surface of the first rear upper guide body is facing the inclined surface of the second rear upper guide body.

6. The stocker system according to claim 1 , further comprising at least one Overhead Hoist Transport (OHT) port.

7. The stocker system according to claim 2 , wherein top surfaces of the first front guide block, the first rear guide block, the second front guide block, and the second rear guide block are arranged to support an A type wafer cassette.

8. The stocker system according to claim 7 , wherein the first front guide block and the first rear guide block are arranged to have a first space for a first bottom center part of a B type wafer cassette between the first front guide block and the first rear guide block, and
wherein the second front guide block and the second rear guide block are arranged to have a second space for a second bottom center part of the B type wafer cassette between the second front guide block and the second rear guide block.

9. The stocker system according to claim 1 , further comprising a wafer cassette sorter having at least one wafer cassette detection sensor, wherein the wafer cassette detection sensor is used to determine whether a wafer cassette is an A type wafer cassette or a B type wafer cassette.

10. A system, comprising:
a multi-cassette rack configured to, in operation, store at least two different types of wafer cassettes having a different size and shape relative to each other;
one or more multi-wafer cassette ports within the multi-cassette rack, each multi-wafer cassette port is configured to, in operation, receive the at least two different types of wafer cassettes; and
a multi-cassette sorter configured to, in operation, sort the at least two different types of wafer cassettes, the multi-cassette sorter including:
a wafer cassette support end configured to, in operation, pick up the at least two different types of wafer cassettes; and
one or more wafer cassette detection sensors configured to, in operation, determine a type of the at least two different types of wafer cassettes.

11. The system of claim 10 , wherein respective types of the at least two different types of wafer cassettes includes a wafer tray and a wafer magazine.

12. The system of claim 10 , wherein the wafer cassette support end of the multi-cassette sorter is a fork including at least two arms.

13. The system of claim 10 , wherein the one or more wafer cassette detection sensors includes:
a first detection sensor on the wafer cassette support end; and
a second detection sensor on the wafer cassette support end and spaced apart from the first detection sensor, and
wherein the first and second detection sensors are configured to, in operation, determine a dimension of a respective wafer cassette on the wafer cassette support end to determine the type of the at least two different types of wafer cassettes.

14. The system of claim 10 , further comprising:
a multi-cassette rack including:
a first guide arm includes a plurality of first guide blocks and a plurality of first guide bodies, each respective first guide body of the plurality of first guide bodies overlaps a corresponding first guide block of the plurality of first guide blocks; and
a second guide arm opposite to the first guide arm and spaced apart from the first guide arm, the second guide arm includes a plurality of second guide blocks and a plurality of second guide bodies, each respective second guide body of the plurality of second guide bodies overlaps a corresponding second guide block of the plurality of second guide blocks;

wherein the first guide arm and the second guide arm are configured to, in operation, receive different types of wafer cassettes, and the types of the different types of wafer cassettes including at least two different types of wafer cassettes.

15. The system of claim 10 , wherein the at least two different types of wafer cassettes includes a wafer tray and a wafer magazine.

16. A system comprising: a multi-cassette sorter configured to, in operation, sort at least two different types of wafer cassettes with a different size and shape relative to each other,
the multi-cassette sorter including:
a wafer cassette support end configured to, in operation, pick up the at least two different types of wafer cassettes; and
one or more wafer cassette detection sensors configured to, in operation, determine a type of the at least two different types of wafer cassettes;
a multi-cassette rack configured to, in operation, store the at least two different types of wafer cassettes;
one or more multi-cassette ports within the multi-cassette rack, each respective multi-cassette port including:
a first end and a second end opposite to the first end;
a first side and a second side opposite to the first side, the first side and the second side extend from the first end to the second end;
a first guide arm attached to the multi-cassette rack, the first guide arm being positioned at the first side; and
a second guide arm attached to the multi-cassette rack and at the second side, the second guide arm parallel to the first guide arm,
wherein the first guide arm and the second guide arm are spaced apart from each other to accommodate the at least two different types of wafer cassettes.

17.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Li Guancyun
• Chang Ching-Jung
• Tung Chi-Feng
• Shen Hsiang Yin

Classifications

• H10P72/3218

  Conveying cassettes, containers or carriers · CPC title

• H10P72/3214

  by means of a cart or a vehicle · CPC title

• H10P72/3202 Primary

  Mechanical details, e.g. rollers or belts · CPC title

• H10P72/0611

  Sorting devices · CPC title

• H10P72/3221 Primary

  Overhead conveying · CPC title