Optical spectrum sensor wafer or robot for chamber condition monitoring

Patent metadata

Field	Value
Publication number	US-12176188-B2
Application number	US-202217715866-A
Country	US
Kind code	B2
Filing date	Apr 7, 2022
Priority date	Apr 7, 2022
Publication date	Dec 24, 2024
Grant date	Dec 24, 2024

Abstract

Embodiments disclosed herein include a diagnostic substrate. In an embodiment, the diagnostic substrate comprises a substrate, a circuit board on the substrate, and a spectrometer coupled to the circuit board. In an embodiment, the diagnostic substrate further comprises a processor on the circuit board and communicatively coupled to the spectrometer.

First claim

What is claimed is:

1. A diagnostic substrate, comprising:
a substrate;
a circuit board on the substrate;
a plurality of spectrometers coupled to the circuit board; and
a processor on the circuit board and communicatively coupled to the plurality of spectrometers, wherein the processor is encircled by the plurality of spectrometers.

2. The diagnostic substrate of claim 1 , wherein each one of the plurality of spectrometers is oriented to face up, down, or sideways away from the substrate.

3. The diagnostic substrate of claim 1 , wherein the substrate has a form factor of a semiconductor wafer, wherein a diameter of the substrate is 200 mm or 300 mm, and wherein a thickness of the substrate is 1 mm.

4. The diagnostic substrate of claim 1 , further comprising:
a light source.

5. The diagnostic substrate of claim 4 , wherein the light source is configured to emit light, and wherein the emitted light is reflected back to one of the plurality of spectrometers.

6. The diagnostic substrate of claim 4 , further comprising:
a plurality of light sources, wherein each of the plurality of light sources are configured to be optically coupled to the one of the plurality of spectrometers, and wherein the plurality of light sources are configured to reflect light off of different areas of a chamber interior.

7. The diagnostic substrate of claim 4 , further comprising a plurality of light sources, wherein the plurality of spectrometers are coupled in a daisy-chain configuration, a mesh configuration, or a star configuration.

8. The diagnostic substrate of claim 4 , wherein the light source is coupled to an optical waveguide, and wherein the optical waveguide is configured to feed emitted light to more than one spectrometer on the substrate.

9. The diagnostic substrate of claim 1 , wherein the plurality of spectrometers is on the circuit board.

10. The diagnostic substrate of claim 9 , wherein each of the plurality of spectrometers has a dedicated light source, or wherein the plurality of spectrometers share a common light source.

11. The diagnostic substrate of claim 1 , wherein the spectrometer is a diffraction and/or a grating spectrometer, a photonic crystal and/or a filter spectrometer, a spectral imager spectrometer, or an interferometer based spectrometer.

Assignees

• Applied Materials Inc

Inventors

• Lin Chuang-Chia
• Qiao Wenwei

Classifications

• B08B2209/08

  Details of machines or methods for cleaning containers, e.g. tanks · CPC title

• G01J2003/102

  Plural sources · CPC title

• G01N2021/945

  Liquid or solid deposits of macroscopic size on surfaces, e.g. drops, films, or clustered contaminants · CPC title

• B25J11/0085

  Cleaning · CPC title

• B08B9/46

  Inspecting cleaned containers for cleanliness · CPC title