Apparatus and method for processing substrate using plasma

Patent metadata

Field	Value
Publication number	US-12176185-B2
Application number	US-202217712055-A
Country	US
Kind code	B2
Filing date	Apr 1, 2022
Priority date	Apr 1, 2022
Publication date	Dec 24, 2024
Grant date	Dec 24, 2024

Abstract

Provided are a substrate processing apparatus and method for increasing the uniformity of substrate processing. The substrate processing apparatus comprises a first space disposed between an electrode and an ion blocker, a second space disposed between the ion blocker and a shower head, and a processing space for processing a substrate under the shower head, wherein the ion blocker includes a first region and a second region that are separated from each other, and includes a plurality of first supply ports for supplying a first reaction gas to the second space, wherein the plurality of first supply ports are formed in the first region and not formed in the second region, wherein the shower head includes a third region corresponding to the first region, a fourth region corresponding to the second region, and a plurality of second supply ports for supplying a second reaction gas to the second space, wherein the plurality of second supply ports are not formed in the third region, and are formed in the fourth region.

First claim

What is claimed is:

1. An apparatus for processing a substrate comprising:
a first space disposed between an electrode and an ion blocker;
a second space disposed between the ion blocker and a shower head; and
a processing space for processing a substrate under the shower head,
wherein the ion blocker includes a center region located at a center of the ion blocker and a periphery region surrounding the center region, the center region and the periphery region are separated from each other, and the ion blocker includes a plurality of first supply ports for supplying a first reaction gas to the second space,
wherein the plurality of first supply ports are formed in the first center region of the ion blocker and not formed in the periphery region of the ion blocker,
wherein the shower head includes a center region located at a center of the shower head and corresponding to the center region of the ion blocker, a periphery region surrounding the center region of the shower head and corresponding to the periphery region of the ion blocker, and a plurality of second supply ports for supplying a second reaction gas to the second space,
wherein the plurality of second supply ports are not formed in the center region of the shower head, and are formed in the periphery region of the shower head.

2. The apparatus of claim 1 , wherein radicals in plasma generated in the first space pass through the ion blocker and are provided to the second space, and the radicals, the first reaction gas and the second reaction gas downflow from the second space to the processing space through a pumping operation in the processing space.

3. The apparatus of claim 1 , wherein a first reaction gas supply chamber connected to the plurality of first supply ports is installed in the center region of the ion blocker, and the first reaction gas supply chamber is connected to a plurality of first supply paths for receiving the first reaction gas.

4. The apparatus of claim 3 , wherein the plurality of first supply paths are symmetrical with respect to an x-axis in virtual x-y coordinates having a center of the first reaction gas supply chamber as an origin.

5. The apparatus of claim 3 , wherein the ion blocker further comprises a first inlet for receiving the first reaction gas from an outside, and at least one first intermediate pass for connecting the first inlet and the plurality of first supply paths.

6. The apparatus of claim 5 , wherein lengths of the plurality of first supply paths are the same as each other, and a first path length from the first inlet to any one of the plurality of first supply paths is the same as a second path length from the first inlet to another one of the plurality of first supply paths.

7. The apparatus of claim 3 , wherein a second reaction gas supply chamber connected to the plurality of second supply ports is installed in the periphery region of the shower head, and the second reaction gas supply chamber is connected to a plurality of second supply paths for receiving a second reaction gas,
wherein the number of the first supply paths and the number of the second supply paths are the same as each other.

8. The apparatus of claim 1 , wherein a second reaction gas supply chamber connected to the plurality of second supply ports is installed in the periphery region of the shower head, and the second reaction gas supply chamber is connected to a plurality of second supply paths for receiving a second reaction gas.

9. The apparatus of claim 8 , wherein the plurality of second supply paths are symmetrical with respect to an x-axis in virtual x-y coordinates having a center of the second reaction gas supply chamber as an origin.

10. The apparatus of claim 8 , wherein the shower head further comprises a second inlet for receiving a second reaction gas from an outside, and at least one second intermediate pass for connecting the second inlet and a plurality of second supply paths.

11. The apparatus of claim 10 , wherein lengths of the plurality of second supply paths are the same as each other,
wherein a third path length from the second inlet to any one of the plurality of second supply paths is the same as a fourth pass length from the second inlet to another one of the plurality of second supply paths.

12. The apparatus of claim 1 further comprises,
a heater ring disposed between the ion blocker and the shower head and surrounding the second space.

13. The apparatus of claim 1 , wherein a first reaction gas supply chamber connected to the plurality of first supply ports is installed in the center region of the ion blocker,
wherein a second reaction gas supply chamber connected to the plurality of second supply ports is installed in the periphery region of the shower head,
wherein, when cross-sections of the ion blocker and the shower head are viewed, the first reaction gas supply chamber and the second reaction gas supply chamber partially overlap in a vertical direction.

14. The apparatus of claim 1 , wherein a coating layer for protecting the shower head is formed on a lower surface of the shower head.

15. An apparatus for processing a substrate comprising:
a first space disposed between an electrode and an ion blocker;
a second space disposed between the ion blocker and a shower head; and
a processing space for processing a substrate under the shower head,
wherein a first reaction gas supply chamber connected to a plurality of first supply ports for supplying a first reaction gas to the second space is installed in a center region of the ion blocker,
wherein a second reaction gas supply chamber connected to a plurality of second supply ports for supplying a second reaction gas to the second space is installed in an edge region of the shower head,
wherein a heater ring disposed between the ion blocker and the shower head, and surrounding the second space is installed,
wherein the first reaction gas supply chamber is connected to a plurality of first supply paths for receiving the first reaction gas,
wherein the second reaction gas supply chamber is connected to a plurality of second supply paths for receiving the second reaction gas.

16. The apparatus of claim 15 , wherein the ion blocker further comprises a first inlet for receiving a first reaction gas from an outside, and at least one first intermediate pass for connecting the first inlet and a plurality of first supply paths,
wherein lengths of the plurality of first supply paths are the same as each other,
wherein a first path length from the first inlet to any one of the plurality of first supply paths is the same as a second path length from the first inlet to another one of the plurality of first supply paths.

17. The apparatus of claim 15 , wherein the number of the plurality of first supply paths and the number of the plurality of second supply paths are the same as each other.

18. An apparatus for processing a substrate comprising:
a first space disposed between an electrode and an ion blocker;
a second space disposed between the ion blocker and a shower head;
a processing space for processing a substrate under the shower head;
a first gas supply module for providing a process gas for generating plasma to the first space through the electrode;
supply ports installed at the ion blocker and configured to provide a first reaction gas to the second space; and
other supply ports installed at the shower head and configured to provide a second reaction gas to the second space,
wherein none of the supply ports installed at the ion blocker is aligned with any one of the other

Assignees

• Semes Co Ltd

Inventors

• Han Min Sung
• Lee Jae Hoo
• Ju yoon jong
• Park Wan Jae

Classifications

• H10P50/283

  by chemical means · CPC title

• H01J37/32522

  Temperature · CPC title

• H01J2237/334

  Etching · CPC title

• H01J37/32422

  Arrangement for selecting ions or species in the plasma · CPC title

• H01J37/32477

  characterised by the means for protecting vessels or internal parts, e.g. coatings · CPC title