Thermal imprinting of nanostructure materials

Patent metadata

Field	Value
Publication number	US-12174533-B2
Application number	US-202017597746-A
Country	US
Kind code	B2
Filing date	Jul 22, 2020
Priority date	Jul 23, 2019
Publication date	Dec 24, 2024
Grant date	Dec 24, 2024

Abstract

Various examples disclosed relate to a method of manufacturing a mechanically stabilized material that includes a nanostructure. The method includes providing a curable material disposed on a substrate. The curable material includes inorganic nanoparticles. The method further includes exposing the curable material and the substrate to pulsed electromagnetic radiation to form the mechanically stabilized material.

First claim

What is claimed is:

1. A method of manufacturing a mechanically stabilized material comprising a nanostructure, the method comprising:
stamping a curable material comprising inorganic nanoparticles disposed on a first side of a substrate with a mold comprising a patterned nanostructure to transfer an imprint of the patterned nanostructure to the curable material disposed on the first side of the substrate;
curing the curable material disposed on the first side of the substrate to cure the curable material disposed on the first side of the substrate;
aligning the mold facing a second side of the substrate opposite the first side, the second side of the substrate comprising the curable material disposed thereon, with the imprint of the patterned nanostructure transferred to the curable material disposed on the first side of the substrate; and
performing the stamping and curing on the curable material disposed on the second side of the substrate to transfer an imprint of the patterned nanostructure to the curable material disposed on the second side of the substrate and to cure the curable material disposed on the second side of the substrate, to form the mechanically stabilized material;
wherein the imprint of the patterned nanostructure on the curable material disposed on the first side of the substrate is aligned to the imprint of the patterned nanostructure on the curable material disposed on the second side of the substrate within less than 1 micron, and wherein one or both of the curing the curable material disposed on the first side of the substrate and the curing the curable material disposed on the second side of the substrate comprises exposing the substrate and the curable material to pulsed electromagnetic radiation having a wavelength of about 250 nm to about 400 nm to increase a temperature of the exposed curable material by >0° C. and <5° C. to cure the curable material.

2. The method of claim 1 , wherein the curable material comprises an ink, a resin mixture, or a combination thereof.

3. The method of claim 1 , wherein the curable material further comprises at least one additive chosen from a polymer, a resin mixture, a binder, and a sol-gel precursor.

4. The method of claim 1 , wherein the patterned nanostructure is chosen from serpentine lines, parallel zig-zag lines, parallel lines, grid structures, concentric circles, regular polygons, cylinders, posts, lenses, flat lenses, metasurfaces, and combinations thereof.

5. The method of claim 1 , wherein the mold is substantially transparent to electromagnetic radiation and the patterned nanostructure comprises serpentine lines, parallel zig-zag lines, parallel lines, grid structures, concentric circles, regular polygons, cylinders, posts, lenses, flat lenses, metasurfaces, or combinations thereof.

6. The method of claim 1 , wherein the exposing comprises delivering electromagnetic radiation over a preselected surface area of the curable material.

7. The method of claim 1 , wherein the pulsed electromagnetic radiation is from a light emitting diode.

8. The method of claim 1 , wherein the exposing comprises a pulse sequence comprising pulsing the electromagnetic radiation for about 5 ms to about 60 ms and turning off the pulsed electromagnetic radiation for about 70 ms to about 150 ms.

9. The method of claim 1 , wherein the curable material and mechanically stabilized material experience substantially no thermal drift during or after the exposing.

10. The method of claim 1 , wherein the nanostructure comprises one or more printed posts independently having aspect ratios (length to width) greater than about 8.

11. The method of claim 1 , further comprising performing at least one cycle of atomic layer deposition to backfill the mechanically stabilized material.

12. The method of claim 1 , wherein providing the curable material disposed on the substrate comprises providing an inorganic nanoparticle ink on the substrate and stamping the inorganic nanoparticle ink on the substrate with the mold to form a curable material on the substrate, wherein the curable material comprises a shape on the substrate chosen from serpentine lines, parallel zig-zag lines, parallel lines, grid structures, concentric circles, regular polygons, cylinders, posts, lenses, flat lenses, metasurfaces, and combinations thereof, wherein exposing the curable material and the substrate to the pulsed electromagnetic radiation comprises exposing the mold, the curable material, and the substrate to the pulsed electromagnetic radiation, wherein the mold and the substrate are not substantially heated by the pulsed electromagnetic radiation, wherein the method further comprises:
removing the mold without substantially damaging the mechanically stabilized material.

13. The method of claim 1 , wherein the imprint of the patterned structure on the first side and the second side of the substrate are aligned to within less than 100 nm.

14. The method of claim 1 , wherein the imprint of the patterned structure on the first side and the second side of the substrate are aligned prior to or simultaneously with exposing the curable material and the substrate to the pulsed electromagnetic radiation.

15. The method of claim 1 , wherein the mechanically stabilized material formed by the method comprises at least one of an optical device, diffractive optical element, single-sided optical blaze grating, double-sided optical blaze grating, flat lens, or meta lens.

16. The method of claim 1 , wherein the pulsed electromagnetic radiation has an energy of an energy in a range of 20 W/cm 2 to 500 W/cm 2 .

17. The method of claim 1 , wherein the exposing the curable material and the substrate to the pulsed electromagnetic radiation increases the temperature of the curable material by >0° C. and <1° C.

18. The method of claim 1 , wherein the aligning of the mold facing the second side of the substrate opposite the first side with the imprint of the patterned nanostructure transferred to the curable material disposed on the first side of the substrate is performed using Moiré alignment.

19. A method of manufacturing a mechanically stabilized material comprising a nanostructure, the method comprising:
aligning a patterned nanostructure of a mold facing a first side of a substrate, the first side of the substrate comprising a curable material comprising inorganic nanoparticles disposed thereon, with an imprint of the patterned nanostructure on a second side of the substrate;
stamping the curable material disposed on the first side of the substrate with the mold to transfer an imprint of the patterned nanostructure to the curable material disposed on the first side of the substrate; and
exposing the curable material disposed on the first side of the substrate to pulsed electromagnetic radiation having a wavelength of about 250 nm to about 400 nm to increase a temperature of the exposed curable material by >0° C. and <5° C. to cure the curable material and to form the mechanically stabilized material;
wherein the imprint of the patterned nanostructure on the curable material disposed on the first side of the substrate is aligned to the imprint of the patterned nanostructure on the second side of the substrate within less than 1 micron.

20. The method of claim 19 , wherein the aligning of the patterned nanostructure of the mold facing the first side of the substrate with the imprint of the patterned nanostructure on the second side of the substrate is performed using Moiré alignment, and wherein the imprint of the patterned nano

Assignees

• Univ Massachusetts

Inventors

• Watkins James J
• Dundar Arisoy Feyza
• Howell Irene R
• Einck Vincent

Classifications

• H01M6/40

  Printed batteries {, e.g. thin film batteries} · CPC title

• H01M4/0402

  Methods of deposition of the material · CPC title

• Y02E60/10

  Energy storage using batteries · CPC title

• H01M10/0436

  Small-sized flat cells or batteries for portable equipment · CPC title

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title