Miniature gas detection system

Patent metadata

Field	Value
Publication number	US-12174165-B2
Application number	US-202217939004-A
Country	US
Kind code	B2
Filing date	Sep 7, 2022
Priority date	Sep 10, 2021
Publication date	Dec 24, 2024
Grant date	Dec 24, 2024

Abstract

A miniature gas detection system includes a separation flow channel fabricated by semiconductor processes and a filling material disposed in the main flow channel of the separation flow channel to perform adsorption and separation on compositions of compounds contained in the gas introduced into the main flow channel. Each detection flow channel is formed with a monitoring chamber, and a micro-electromechanical systems pump is formed on the bottom portion of the monitoring chamber. In each monitoring chamber, a light emitted from the light emitting element is reflected by the two mirrors and received by the light detection element. Therefore, the light detection elements obtain and output spectra of the compositions of compounds contained in the gas according to the differences in optical adsorptions of the compositions of compounds for lights with different wavelengths, so as to analyze and determine the type of the gas contained in the compositions of compounds.

First claim

What is claimed is:

1. A miniature gas detection system comprising:
a separation flow channel fabricated by semiconductor processes, wherein the separation flow channel comprises a main flow channel and a plurality of detection flow channels; the main flow channel guides a gas for detection, and the detection flow channels are connected to the main flow channel; each of the detection flow channels is formed with a monitoring chamber, a light emitting element is on one side of the monitoring chamber, and a light detection element is stacked and positioned on the light emitting element; two mirrors are formed on two sides of the monitoring chamber and corresponding to each other; a micro-electromechanical systems (MEMS) pump is formed on a bottom portion of the monitoring chamber;
a filling material disposed in the main flow channel of the separation flow channel to perform adsorption and separation on compositions of compounds contained in the gas introduced into the main flow channel;
wherein the compositions of compounds contained in the gas introduced into the main flow channel are adsorbed or separated by the filling material and presented at different regions of the main flow channel with different flow rates; when the MEMS pump of each of the detection flow channels is actuated, the compositions of compounds at different regions of the main flow channel are introduced into the monitoring chambers of the respective detection flow channels with a fixed amount, and in the monitoring chamber of each of the detection flow channels, a light emitted from the light emitting element is illuminated on the two mirrors, reflected by the two mirrors, and received by the light detection element, so that the light detection elements in the respective monitoring chambers obtain and output spectra of the compositions of compounds contained in the gas according to the differences in optical adsorptions of the compositions of compounds for lights with different wavelengths, so as to analyze and determine the type of the gas contained in the compositions of compounds.

2. The miniature gas detection system according to claim 1 , further comprises a gas actuator, wherein the gas actuator is a small piezoelectric pump connected to the main flow channel, the gas actuator is actuated to guide the gas into the main flow channel with a stable flow rate, so that the filling material performs adsorption and separation on the compositions of compounds contained in the gas.

3. The miniature gas detection system according to claim 2 , wherein the piezoelectric pump comprises:
an inlet plate having at least one inlet hole, at least one convergence channel, and a convergence chamber, wherein the at least one inlet hole is used to introduce the gas into the piezoelectric pump, the at least one inlet hole correspondingly penetrates into the at least one convergence channel, and the at least one convergence channel is converged into the convergence chamber, so that the gas introduced from the at least one inlet hole is converged into the convergence chamber;
a resonance sheet attached to the inlet plate, wherein the resonance sheet has a perforation, a movable portion, and a fixed portion; the perforation is located at a central portion of the resonance sheet and corresponding to the convergence chamber of the inlet plate, the movable portion is disposed at a periphery of the perforation and is disposed at a portion corresponding to the convergence chamber, and the fixed portion is disposed at an outer periphery of the resonance sheet and attached to the inlet plate; and
a piezoelectric actuator attached to the resonance sheet and disposed correspondingly to the resonance sheet, wherein the piezoelectric actuator comprises a suspension plate, an outer frame, at least one supporting element, and a piezoelectric element; the suspension plate is of a square shape and capable of bending and vibrating; the outer frame is disposed around a periphery of the suspension plate; the at least one supporting element is formed between the suspension plate and the outer frame to provide a flexible support for the suspension plate; the piezoelectric element has a side length, the side length of the piezoelectric element is smaller than or equal to a side length of the suspension plate, and the piezoelectric element is attached to a surface of the suspension plate so as to drive the suspension plate to bend and vibrate when the piezoelectric element is applied with a voltage;
wherein a chamber space is between the resonance sheet and the piezoelectric actuator, so that when the piezoelectric actuator is driven, the gas outside the piezoelectric pump is introduced into the piezoelectric pump through the at least one inlet hole of the inlet plate, converged into the convergence chamber via the at least one convergence channel, flowed through the perforation of the resonance sheet, and transmitted outwardly by a resonance effect resulting between the piezoelectric actuator and the movable portion of the resonance sheet.

4. The miniature gas detection system according to claim 3 , wherein the piezoelectric pump further comprises a first insulation sheet, a conductive sheet, and a second insulation sheet; the inlet plate, the resonance sheet, the piezoelectric actuator, the first insulation sheet, the conductive sheet, and the second insulation sheet are sequentially stacked and assembled.

5. The miniature gas detection system according to claim 2 , wherein the gas actuator is a piezoelectric blower pump, and the piezoelectric blower pump comprises:
a nozzle plate comprising a suspension sheet and a hollow hole, wherein the suspension sheet is capable of bending and vibrating, and the hollow hole is formed at a central portion of the suspension sheet;
a chamber frame stacked on the suspension sheet;
an actuation body stacked on the chamber frame, wherein the actuation body comprises a piezoelectric carrying plate, an adjusting resonance plate, and a piezoelectric plate; the piezoelectric carrying plate is stacked on the chamber frame, the adjusting resonance plate is stacked on the piezoelectric carrying plate, and the piezoelectric plate is stacked on the adjusting resonance plate so as to drive the piezoelectric carrying plate and the adjusting resonance plate to bend and vibrate reciprocatingly when the piezoelectric plate is applied with a voltage;
an insulation frame stacked on the actuation body; and
a conductive frame stacked on the insulation frame;
wherein the nozzle plate is fixed, so that a clearance is defined outside the nozzle plate for the gas to flow therethrough; a gas flow chamber is formed at a bottom portion of the nozzle plate, and a resonance chamber is formed among the actuation body, the chamber frame, and the suspension sheet; the nozzle plate is capable of being driven to move correspondingly by driving the actuation body, so that the suspension sheet of the nozzle plate vibrates reciprocatingly, and thus the gas enters the gas flow chamber through the gap and then is discharged out of the gas flow chamber, thereby achieving a gas transmission.

6. The miniature gas detection system according to claim 1 , wherein the filling material is a porous polymer that is adsorptive, a molecular sieve material that is adsorptive, or a combination thereof, and the filling material is filled in the main flow channel.

7. The miniature gas detection system according to claim 1 , wherein the filling material is a filling substrate uniformly covered by a fixed liquid film which is adsorptive, and the filling material is filled in the main flow channel.

8. The miniature gas detection system according to claim 1 , wherein the filling material is an oxide of silicon, and a surface of the filling material has h

Assignees

• Microjet Technology Co Ltd

Inventors

• Mou Hao-Jan
• Wu Chin-Chuan
• Hsueh Chieh-Yun
• Han Yung-Lung
• Huang Chi-Feng
• Lin Tsung-I

Classifications

• G01N1/2273

  Atmospheric sampling · CPC title

• B81B3/0021

  Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00) · CPC title

• B81B2201/036

  Micropumps · CPC title

• B01J20/3291

  Characterised by the shape of the carrier, the coating or the obtained coated product · CPC title

• B01J20/18

  Synthetic zeolitic molecular sieves · CPC title