Flat panel detector, driving method, driving device and flat panel detection device

Patent metadata

Field	Value
Publication number	US-12170305-B2
Application number	US-202117477325-A
Country	US
Kind code	B2
Filing date	Sep 16, 2021
Priority date	Jan 8, 2021
Publication date	Dec 17, 2024
Grant date	Dec 17, 2024

Abstract

The present disclosure discloses a flat panel detector, a driving method, a driving device and a flat panel detection device. The flat panel detector includes: a base substrate, and a plurality of detection units located on the base substrate; each of the detection units includes a photodiode and a detection transistor; the flat panel detector further includes: a compensation semiconductor material layer including a plurality of compensation structures mutually spaced; each detection transistor is correspondingly provided with a compensation structure, and the compensation structure is located between a gate and a gate insulating layer of the corresponding detection transistor.

First claim

What is claimed is:

1. A flat panel detector, comprising: a base substrate, and a plurality of detection units located on the base substrate, wherein each of the detection units comprises a photodiode and a detection transistor; and
the flat panel detector further comprises: a compensation semiconductor material layer, wherein the compensation semiconductor material layer comprises a plurality of compensation structures mutually spaced, each detection transistor is correspondingly provided with a compensation structure, and the compensation structure is located between a gate and a gate insulating layer of the corresponding detection transistor; wherein the compensation structure surrounds the gate;
wherein a material of the gate comprises metal; and a material of the compensation semiconductor material layer comprises: a doped P-type semiconductor material;
wherein the gate is in direct contact with the compensation semiconductor material layer; a work function of the compensation semiconductor material layer is larger than a work function of the gate.

2. The flat panel detector according to claim 1 , wherein the gate comprises a plurality of gate film layers; and
the work function of the compensation semiconductor material layer is larger than a work function of a gate film layer of the gate closest to the compensation semiconductor material layer.

3. The flat panel detector according to claim 1 , further comprising: a contact semiconductor material layer, wherein the contact semiconductor material layer is located between an active layer and a source-drain layer.

4. The flat panel detector according to claim 3 , wherein the contact semiconductor material layer comprises a plurality of first contact structures and a plurality of second contact structures arranged in a spaced mode, a first electrode of the detection transistor is correspondingly provided with one of the first contact structures, and a second electrode of the detection transistor is correspondingly provided with one of the second contact structures.

5. The flat panel detector according to claim 4 , wherein an orthographic projection of the first electrode of the detection transistor on the base substrate covers an orthographic projection of the corresponding first contact structure on the base substrate, and the first electrode of the detection transistor is in contact with the active layer through the corresponding first contact structure.

6. The flat panel detector according to claim 4 , wherein an orthographic projection of the second electrode of the detection transistor on the base substrate covers an orthographic projection of the corresponding second contact structure on the base substrate, and the second electrode of the detection transistor is in contact with the active layer through the corresponding second contact structure.

7. The flat panel detector according to claim 3 , wherein a material of the contact semiconductor material layer comprises an N-type semiconductor material layer.

8. A driving method of the flat panel detector according to claim 1 , comprising: an imaging detection stage, wherein the imaging detection stage comprises: N continuous row collection stages, and N is a total number of rows of detection units in the flat panel detector;
in an n th row collection stage, controlling a detection transistor in each of the detection units to be cut off, and obtaining an imaging noise voltage corresponding to a photodiode in each of the detection units in an n th row, wherein 1≤n≤N and n is an integer;
controlling the detection transistor in each of the detection units in the n th row to be turned on, and obtaining an imaging detection voltage corresponding to the photodiode in each of the detection units in the n th row; and
determining an imaging effective voltage corresponding to each photodiode in the n th row according to the imaging noise voltage and the imaging detection voltage corresponding to each photodiode in the n th row.

9. The driving method of the flat panel detector according to claim 8 , before the imaging detection stage, further comprising:
in a current reset stage, controlling the detection transistor in each of the detection units to be turned on at the same time so as to reset the photodiode in each of the detection units.

10. The driving method of the flat panel detector according to claim 9 , wherein after controlling the detection transistor in each of the detection units to be turned on at the same time so as to reset the photodiode in each of the detection units, the current reset stage further comprises:
controlling detection transistors in at least one row of detection units to be turned on, and obtaining detection control voltages corresponding to photodiodes electrically connected with the turned on detection transistors;
determining whether at least one of the obtained detection control voltages meets a voltage threshold or not;
entering into the imaging detection stage when at least one of the obtained detection control voltages meets the voltage threshold; and
entering into the next reset stage when at least one of the obtained detection control voltages does not meet the voltage threshold.

11. The driving method of the flat panel detector according to claim 9 , wherein duration of controlling one detection transistor to be turned on in the reset stage is identical to duration of controlling one detection transistor to be turned on in the imaging detection stage.

12. A driving device of a flat panel detector, comprising: a driving circuit, wherein the driving circuit is configured to execute the driving method according to claim 8 .

13. A flat panel detection device, comprising the driving device of the flat panel detector according to claim 12 .

14. A flat panel detection device, comprising a flat panel detector, the flat panel detector comprising: a base substrate, and a plurality of detection units located on the base substrate, wherein each of the detection units comprises a photodiode and a detection transistor; and
the flat panel detector further comprises: a compensation semiconductor material layer, wherein the compensation semiconductor material layer comprises a plurality of compensation structures mutually spaced, each detection transistor is correspondingly provided with a compensation structure, and the compensation structure is located between a gate and a gate insulating layer of the corresponding detection transistor; wherein the compensation structure surrounds the gate;
wherein a material of the gate comprises metal; and a material of the compensation semiconductor material layer comprises: a doped P-type semiconductor material;
wherein the gate is in direct contact with the compensation semiconductor material layer; a work function of the compensation semiconductor material layer is larger than a work function of the gate.

Assignees

• Beijing Boe Sensor Technology Co Ltd
• Boe Technology Group Co Ltd

Inventors

• Xu Shuai
• Zhang Ye
• Xu Binbin
• Zhao Bin

Classifications

• H04N25/60

  Noise processing, e.g. detecting, correcting, reducing or removing noise · CPC title

• H04N5/32

  Transforming X-rays (cameras or camera modules for generating image signals from X-rays H04N23/30; circuitry of SSIS for transforming X-rays into image signals H04N25/30) · CPC title

• H10F39/80373 Primary

  characterised by the gate of the transistor · CPC title

• H10F39/1892 Primary

  Direct radiation image sensors · CPC title

• H10F39/1898

  Indirect radiation image sensors, e.g. using luminescent members · CPC title