Digital controller for a mems gyroscope
US-2017328712-A1 · Nov 16, 2017 · US
US12163787B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12163787-B2 |
| Application number | US-202218067044-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 16, 2022 |
| Priority date | Oct 16, 2018 |
| Publication date | Dec 10, 2024 |
| Grant date | Dec 10, 2024 |
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A tuning fork sensor system places a controlled bias on the proof-mass drive-axis electrodes to cancel the quadrature charge. Also, its charge amplifiers employ a field-effect transistor biased slightly into the triode region so that it behaves as a very large value resistor. In addition, it uses a phase-locked loop having a special loop filter in order to optimize performance by rejecting off-frequency drive feedthrough to the motor pick-off while resulting in very low phase wander for the demodulation references.
Opening claim text (preview).
What is claimed is: 1. A tuning-fork sensor, comprising: proof-masses; comb drives for driving the proof masses; a motor drive system for driving the comb drives with a drive signal having a drive axis resonance frequency; a motor bias system for providing a bias voltage on the comb drives for quadrature nulling; wherein a signal containing Coriolis information is digitally filtered to produce the quadrature nulling, wherein a first half-resonance frequency square wave has a fixed amplitude, and a second half-resonance frequency square wave has an amplitude that is automatically adjusted to adjust an amplitude of the drive signal, and wherein the drive signal is a sum of the first and second half-resonance frequency square waves. 2. The sensor as claimed in claim 1 , wherein the motor bias system comprises a digital demodulator for demodulating the digitally-filtered signal containing Coriolis information. 3. The sensor as claimed in claim 2 , wherein the demodulated signal containing Coriolis information is filtered by a comb filter. 4. The sensor as claimed in claim 1 , wherein a bandwidth of a quadrature nulling loop is equal to or greater than a bandwidth of an inertial rate measurement. 5. The sensor as claimed in claim 1 , wherein an off-frequency drive method provides the drive signal. 6. The sensor as claimed in claim 1 , further comprising an off-frequency drive that produces a drive force at a drive-axis resonance frequency, while electrical feedthrough artifacts are at a frequency different from the drive-axis resonance frequency. 7. The sensor as claimed in claim 1 , wherein the motor drive system includes a phase locked loop that rejects off-frequency artifacts in a motor pick-off signal. 8. The sensor as claimed in claim 7 , wherein the phase locked loop has low loop gain at a frequency equal to a frequency of the off-frequency drive artifacts. 9. The sensor as claimed in claim 7 , wherein a loop filter of the phase locked loop has a START and a RUN mode. 10. A method of operation of a tuning-fork sensor, comprising: driving proof-masses; detecting Coriolis information from the proof-masses; providing, from a motor bias system, a motor bias voltage on comb drives of the proof-masses for quadrature nulling; and digitally filtering a signal containing Coriolis information to generate the motor bias voltage; wherein the proof-masses are driven with a drive signal having a drive-axis resonance frequency, and wherein a first half-resonance frequency square wave has a fixed amplitude, and a second half-resonance frequency square wave has an amplitude that is automatically adjusted to adjust an amplitude of the drive signal, and wherein the drive signal is a sum of the first and second half-resonance frequency square waves. 11. The method as claimed in claim 10 , wherein a bandwidth of a quadrature nulling loop of the motor bias system is equal to or greater than a bandwidth of an inertial rate measurement. 12. The method as claimed in claim 10 , further comprising demodulating the digitally filtered signal containing Coriolis information. 13. A tuning-fork sensor, comprising: a first proof-mass and a second proof-mass; a first sense plate disposed under the first proof-mass; a second sense plate disposed under the second proof-mass; a third sense plate disposed over the first proof-mass; a fourth sense plate disposed over the second proof-mass; comb drives for oscillating the first and second proof masses along a drive axis; a motor drive system for driving the comb drives and operating at a drive-axis resonance frequency; and a motor bias system for providing a bias voltage on the comb drives for quadrature nulling; wherein the first and fourth sense plates are biased with a DC bias having a first polarity, wherein the second and third sense plates are biased with the DC bias in an opposite polarity; and wherein a signal containing Coriolis information is digitally filtered to produce the quadrature nulling; wherein the proof-masses are driven with a drive signal having a drive-axis resonance frequency, wherein a first half-resonance frequency square wave has a fixed amplitude, and a second half-resonance frequency square wave has an amplitude that is automatically adjusted to adjust an amplitude of a drive signal, and wherein the drive signal is a sum of the first and second half-resonance frequency square waves. 14. A tuning-fork sensor, comprising: proof-masses; comb drives for driving the proof masses; and a motor drive system for driving the comb drivers with a drive signal having a drive-axis resonance frequency; wherein a first half-resonance frequency square wave has a fixed amplitude, and a second half-resonance frequency square wave has an amplitude that is automatically adjusted to adjust an amplitude of the drive signal, and wherein the drive signal is a sum of the first and second half-resonance frequency square waves.
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the devices having two sensing masses in anti-phase motion · CPC title
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