Conveying device for conveying at least one wafer
US-11430683-B2 · Aug 30, 2022 · US
US12160141B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12160141-B2 |
| Application number | US-202217903429-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 6, 2022 |
| Priority date | Mar 19, 2020 |
| Publication date | Dec 3, 2024 |
| Grant date | Dec 3, 2024 |
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A method for controlling a planar drive system includes determining values of magnetic stator fields for different energizing currents and spatial regions in a two-dimensional array of magnetic field sensors, generating at least one magnetic stator field by applying energizing currents to stator conductors to electrically control a rotor, determining measured values of a total magnetic field via the magnetic field sensors for a plurality of the spatial regions to determine a position of the rotor, compensating contributions of the magnetic stator fields to the measured values of the total magnetic field determined by the magnetic field sensors, generating measured values of the magnetic field determined by the respective magnetic field sensors for the respective space regions, and determining a position of the rotor based on the generated measured values of the magnetic fields. The planar drive system includes at least a controller, a stator module, and a rotor.
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The invention claimed is: 1. A method for controlling a planar drive system, wherein the planar drive system comprises at least a controller, a stator module and a rotor, wherein the stator module comprises a plurality of electrically energizable stator conductors for generating magnetic stator fields for electrically controlling the rotor, wherein the rotor comprises a magnet arrangement for generating a magnetic rotor field, wherein a magnetic coupling between the rotor and the stator module is achievable via the magnetic stator field and the magnetic rotor field, wherein the stator module comprises a sensor module having a plurality of magnetic field sensors for determining a position of the rotor, wherein the magnetic field sensors are arranged in a two-dimensional array at the stator module, and wherein each magnetic field sensor is configured to determine, for a spatial region in the two-dimensional array, the magnetic rotor field; the method comprising: determining a plurality of values of magnetic stator fields for a plurality of different energizing currents and for a plurality of spatial regions in the two-dimensional array of magnetic field sensors in a first magnetic stator field determining step, wherein the first magnetic stator field determining step comprises: determining model descriptions of dependencies between energizing currents and magnetic stator fields of the stator conductors in a model determining step; generating at least one magnetic stator field by applying corresponding energizing currents to corresponding stator conductors to electrically control the rotor in a magnetic stator field generating step; determining a plurality of measured values of a total magnetic field by a plurality of magnetic field sensors for a plurality of spatial regions of the sensor module to determine a position of the rotor in a total magnetic field determining step, wherein the total magnetic field comprises a superposition of the plurality of magnetic stator fields and the magnetic rotor field; compensating contributions of the magnetic stator fields to the measured values of the total magnetic field determined by the magnetic field sensors and generating measured values of the magnetic rotor field determined by the respective magnetic field sensors for the respective spatial region in a compensating step, wherein compensating the contributions comprises subtracting the values of the magnetic stator fields determined for the energizing currents from the measured values of the total magnetic field determined by the magnetic field sensors, wherein the compensating step further comprises: compensating the contributions of the magnetic stator fields to the measured values of the total magnetic field determined by the magnetic field sensors for arbitrary energizing currents based on the determined model descriptions of the dependencies between the energizing currents and the magnetic stator fields of the stator conductors; wherein compensating the contributions in the compensating step is carried out by a correspondingly trained neural network, and wherein the correspondingly trained neural network is configured to compensate for each magnetic field sensor the contributions of the magnetic stator fields to the measured values of the total magnetic field determined by the respective magnetic field sensor and to determine measured values of the magnetic rotor field; and determining a position of the rotor based on the generated measured values of the magnetic rotor field in a position determining step. 2. The method according to claim 1 , wherein determining the values of the magnetic stator fields in the first magnetic stator field determining step is performed by a plurality of measurements of a plurality of magnetic field sensors of the sensor module. 3. The method according to claim 1 , wherein: in the total magnetic field determining step at least one measured value of the total magnetic field is determined for each magnetic field sensor; wherein in the compensating step contributions of the magnetic stator fields to the measured values of the total magnetic field are compensated for each magnetic field sensor, and wherein for each magnetic field sensor at least one measured value of the magnetic rotor field is generated for the spatial region of the respective magnetic field sensor. 4. The method according to claim 1 , wherein: in the model determining step, for each stator conductor an individual model description of the dependence between the energizing currents applied to the respective stator conductor and the magnetic stator fields generated by the respective stator conductor is determined, and wherein, in the compensating step, the contributions of the magnetic stator fields to the measured values of the total magnetic field determined by the respective magnetic field sensor are compensated for each magnetic field sensor on the basis of the models created, and measured values of the magnetic rotor field are determined. 5. The method according to claim 1 , wherein: the model description of the dependence between the energizing currents applied to the respective stator conductor and the magnetic stator fields generated by the respective stator conductor in the model determining step comprises a correspondingly trained neural network, and wherein the correspondingly trained neural network is set up to determine values of the corresponding magnetic stator field for any stator conductor and any energizing currents for any spatial regions of any magnetic field sensors. 6. The method according to claim 1 , further comprising calibrating the stator conductors in a calibrating step. 7. The method according to claim 6 , wherein the calibrating step comprises: determining a plurality of target magnetic stator fields for a plurality of target energizing currents for a plurality of stator conductors in a target magnetic stator field determining step, wherein a target magnetic stator field of a stator conductor corresponds to a magnetic field of an ideal reference conductor having the same parameters as the respective stator conductor for a respective target energizing current; generating, on the basis of the reference energizing currents, real magnetic stator fields of the stator conductors in a generating step, wherein a real magnetic stator field of a stator conductor is a magnetic field generated by the respective stator conductor for the respective reference energizing current; determining values of the real magnetic stator fields for the desired energizing currents of the plurality of stator conductors in a second magnetic stator field determining step; defining allocations between the target exciter currents and the corresponding real magnetic stator fields for a plurality of stator conductors in an allocating step; and determining, based on the allocations, real energizing currents for the plurality of stator conductors in an energizing current determining step, wherein a real energizing current of a stator conductor corresponds to a target energizing current for which the respective stator conductor generates a corresponding real magnetic stator field. 8. The method according to claim 7 , wherein determining the values of the real magnetic stator fields in the second magnetic stator field determining step is carried out by a plurality of measurements of a plurality of magnetic field sensors of the sensor module. 9. The method according to claim 1 , further comprising calibrating the magnetic field sensors in a sensor calibrating step. 10. The method of claim 9 , wherein the sensor calibrating step comprises: generating a first reference magnetic field in a first reference magnetic fi
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