Ultraviolet and ozone clean system

Patent metadata

Field	Value
Publication number	US-12159782-B2
Application number	US-202318370481-A
Country	US
Kind code	B2
Filing date	Sep 20, 2023
Priority date	Aug 9, 2021
Publication date	Dec 3, 2024
Grant date	Dec 3, 2024

Abstract

A cleaning apparatus for cleaning a substrate includes a lamp for emitting ultraviolet radiation in an irradiation region; a housing that houses the lamp; a water deflector spaced below the housing, the water deflector having a water inlet for receiving a supply of ozonated water and a water outlet for discharging ozonated water irradiated by the lamp into a substrate processing region beneath the water deflector, and defining a water flow path between the water inlet and the water outlet, the water flow path extending in the irradiation region; an upper reflector extending along and above the lamp; and a lower reflector extending along and below the water deflector, wherein the upper reflector and the lower reflector at least partially define the irradiation region and reflect ultraviolet radiation toward the water flow path, and wherein the lower reflector shields the substrate from ultraviolet radiation emitted by the lamp.

First claim

The invention claimed is:

1. A cleaning apparatus for cleaning a substrate, comprising:
a lamp configured to emit ultraviolet radiation in an irradiation region;
a water deflector spaced below the lamp, the water deflector having a water inlet for receiving a supply of ozonated water and a water outlet for discharging ozonated water irradiated by the lamp into a substrate processing region beneath the water deflector, and defining a water flow path between the water inlet and the water outlet, the water flow path extending in the irradiation region, wherein the water outlet is offset from the irradiation region; and
a substrate support for supporting the substrate below the water outlet in the substrate processing region.

2. The cleaning apparatus of claim 1 , further comprising an upper reflector extending along and above the lamp, wherein the upper reflector is configured to at least partially define the irradiation region and to reflect ultraviolet radiation emitted by the lamp toward the water flow path.

3. The cleaning apparatus of claim 2 , wherein the upper reflector has a length that is equal or greater than a length of the lamp.

4. The cleaning apparatus of claim 1 , further comprising a lower reflector extending along and below the water deflector, wherein the lower reflector is configured to at least partially define the irradiation region and to reflect ultraviolet radiation emitted by the lamp toward the water flow path, and wherein the lower reflector is configured to shield the substrate from ultraviolet radiation emitted by the lamp.

5. The cleaning apparatus of claim 4 , wherein the lower reflector has a length that is equal or greater than a length of the lamp.

6. The cleaning apparatus of claim 4 , further comprising a substrate support for supporting the substrate below the water outlet in the substrate processing region, wherein the lower reflector is disposed between the water outlet and the substrate support.

7. The cleaning apparatus of claim 1 , wherein the lamp operates between 80 to 90 watts.

8. The cleaning apparatus of claim 1 , wherein the substrate support is configured to rotate the substrate.

9. The cleaning apparatus of claim 1 , further comprising a housing that houses the lamp, the housing defining a cooling chamber surrounding the lamp, wherein the housing has an inlet and an outlet in fluid communication with the cooling chamber, the cooling chamber configured to route a cooling fluid between the inlet of the housing and the outlet of the housing and over the lamp.

10. The cleaning apparatus of claim 9 , wherein the cooling fluid comprises cool dry air.

11. The cleaning apparatus of claim 9 , wherein the housing includes an upper cover and a lower cover sealed to the upper cover, wherein the inlet of the housing and the outlet of the housing are formed in the upper cover.

12. The cleaning apparatus of claim 11 , wherein the upper cover is formed from PTFE and the lower cover is formed from quartz.

13. The cleaning apparatus of claim 9 , wherein a horizontal spacing between the water outlet and the housing is 0.5 inch to 4 inches.

14. The cleaning apparatus of claim 13 , wherein the horizontal spacing is between 1 inch and 2 inches.

15. The cleaning apparatus of claim 1 , wherein the water outlet is configured to translate horizontally relative to the substrate processing region.

16. A method for cleaning a substrate, comprising:
emitting ultraviolet radiation from a lamp in an irradiation region;
receiving, at an inlet of a water deflector spaced below the lamp, a supply of ozonated water; and
discharging, at an outlet of the water deflector, ultraviolet-irradiated ozonated water irradiated by the lamp into a substrate processing region beneath the water deflector, the water deflector defining a water flow path between the inlet and the outlet, the water flow path extending in the irradiation region, wherein the outlet is offset from the irradiation region.

17. The method of claim 16 , further comprising horizontally translating the outlet with respect to the substrate processing region while discharging the ultraviolet-irradiated ozonated water.

18. The method of claim 16 , further comprising discharging the ultraviolet-irradiated ozonated water onto a substrate in the substrate processing region.

19. The method of claim 18 , further comprising rotating the substrate while discharging the ultraviolet-irradiated ozonated water onto the substrate.

20. The method of claim 18 , further comprising shielding the substrate from ultraviolet radiation while discharging the ultraviolet-irradiated ozonated water onto the substrate.

Assignees

• Applied Materials Inc

Inventors

• Wu Banqiu
• Makhamreh Khalid
• Ogawa Hiroki
• Dagan Eliyahu Shlomo

Classifications

• H10P70/15 Primary

  by wet cleaning only (H10P70/52 takes precedence) · CPC title

• H10P72/0454

  surrounding a central transfer chamber · CPC title

• H10P72/0406 Primary

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title

• B08B7/0057

  by ultraviolet radiation · CPC title

• B08B3/10 Primary

  with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration · CPC title