Vacuum coating device

Patent metadata

Field	Value
Publication number	US-12157940-B2
Application number	US-202017762302-A
Country	US
Kind code	B2
Filing date	Sep 25, 2020
Priority date	Sep 29, 2019
Publication date	Dec 3, 2024
Grant date	Dec 3, 2024

Abstract

Provided is a vacuum coating device, comprising a crucible ( 13 ), an induction heater ( 15 ) arranged on the outer side of the crucible ( 13 ); a flow distribution box connected to the top of the crucible ( 13 ) through a steam pipeline ( 16 ); a pressure regulating valve ( 18 ) and a diverter valve ( 19 ) sequentially arranged in a direction in which the steam pipeline ( 16 ) is in communication with the flow distribution box; a horizontal pressure stabilizing plate ( 20 ) arranged in the flow distribution box, a plurality of sub-nozzles ( 21 ) connected to the top of the flow distribution box; wherein a plurality of air flow distribution chambers are arranged in the diverter valve ( 19 ); a ratio of a total area of the air flow distribution chambers (S distribution ) to an area of the steam pipeline ( 16 ) in the radial direction (S pipeline ) is greater than or equal to 0.1, i.e.: S diversion /S pipeline ≥0.1. According to the device, a uniform spray flow can be formed, a uniform coating ( 23 ) is formed on the surface of a steel plate ( 100 ) when high temperature steam is in contact with a low temperature steel plate, the spray flow formed by the sub-nozzles ( 21 ) arranged at the rear portion continuously covers the deposited metal layer that has been formed, so as to achieve efficient coating of strip steel under vacuum conditions.

First claim

The invention claimed is:

1. A vacuum coating device comprising:
a crucible;
an induction heater arranged on the outer side of the crucible;
a flow distribution box connected to the top of the crucible through a steam pipeline;
a pressure regulating valve and a diverter valve sequentially arranged in a direction in which the steam pipeline is in communication with the flow distribution box;
a horizontal pressure stabilizing plate arranged in the flow distribution box;
a plurality of sub-nozzles connected to the top of the flow distribution box;
wherein a plurality of air flow distribution chambers are arranged in the diverter valve;
a ratio of a total cross-sectional area of the air flow distribution chambers in the radial direction (S distribution ) to the cross-sectional area of the steam pipeline in the radial direction (S pipeline ) is greater than or equal to 0.1, that is:
S distribution /S pipeline ≥0.1.

2. The vacuum coating device as claimed in claim 1 , wherein the sub-nozzles are disposed in parallel at equal intervals, wherein the sub-nozzles are provided with sub-nozzle outlets; and wherein a distance between the sub-nozzle outlets and a movement speed of a steel plate satisfy the following relationship:
when the movement speed of the steel plate is 30-60 m/min, a centerline distance of the sub-nozzle outlets is 50-100 mm;
when the movement speed of the steel plate is 61-100 m/min, a centerline distance of the sub-nozzle outlets is 100-150 mm;
when the movement speed of the steel plate is 101-150 m/min, a centerline distance of the sub-nozzle outlets is 150-200 mm; and
when the movement speed of the steel plate is 151-200 m/min, a centerline distance of the sub-nozzle outlets is 200-300 mm.

3. The vacuum coating device as claimed in claim 1 , wherein the sub-nozzle outlets are set to be of a slit outlet or a porous outlet, and wherein a ratio of a sum of areas of the sub-nozzle outlets (S outlet ) to an area of a joint between the steam pipeline and the top of the crucible (S inlet ) is 0.05-5.

4. The vacuum coating device as claimed in claim 3 , wherein the slit outlet sub-nozzle outlets are set to be linear or curved.

5. The vacuum coating device as claimed in claim 3 , wherein the porous outlet sub-nozzle outlets are set to be rectangular, circular or trapezoid.

6. The vacuum coating device as claimed in claim 3 , wherein the sub-nozzles are made from graphite, ceramic, or a metal material.

7. The vacuum coating device as claimed in claim 1 , wherein the pressure stabilizing plate is of a porous structure, and wherein holes are rectangular, circular, triangular, trapezoid, or slit-shaped.

8. The vacuum coating device as claimed in claim 1 , wherein a ratio of a total area of the holes in the pressure stabilizing plate (S total hole area ) to the area of the joint between the steam pipeline and the top of the crucible (S inlet ) is greater than or equal to 0.1 and less than or equal to 10, that is:
10≥ S total hole area /S inlet ≥0.1.

9. The vacuum coating device as claimed in claim 8 , wherein the holes in the pressure stabilizing plate are linear, curved, or of a multilayer structure in terms of direction.

Assignees

• Baoshan Iron & Steel

Inventors

• Ren Sanbing
• Fan Junfei
• Li Shanqing
• Xiong Fei
• Wang Yiru

Classifications

• C23C14/243

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title

• C23C14/16

  on metallic substrates or on substrates of boron or silicon · CPC title

• C23C14/562 Primary

  for coating elongated substrates · CPC title

• C23C14/26 Primary

  by resistance or inductive heating of the source · CPC title

• C23C14/543

  using measurement on the vapor source · CPC title