Ceramic substrate and electrostatic chuck

Patent metadata

Field	Value
Publication number	US-12157702-B2
Application number	US-202117167375-A
Country	US
Kind code	B2
Filing date	Feb 4, 2021
Priority date	Feb 7, 2020
Publication date	Dec 3, 2024
Grant date	Dec 3, 2024

Abstract

A ceramic substrate includes a substrate main body, and a conductor layer provided inside of the substrate main body. The substrate main body includes an insulator layer that is ceramics composed of aluminum oxide, and a composite oxide layer of aluminum and silicon, the composite oxide layer being formed between the insulator layer and the conductor layer.

First claim

What is claimed is:

1. A ceramic substrate comprising:
a substrate main body; and
a conductor layer provided inside of the substrate main body,
wherein the substrate main body comprises:
an insulator layer that is ceramics composed of aluminum oxide, the conductor layer being provided inside of the insulator layer, and
a composite oxide layer of aluminum and silicon, the composite oxide layer covering the conductor layer so as to be formed between the insulator layer and the conductor layer.

2. The ceramic substrate according to claim 1 , wherein the composite oxide layer is a layer composed of mullite, a layer composed of sillimanite or a layer in which mullite and sillimanite are mixed.

3. The ceramic substrate according to claim 1 wherein silicon exists locally in the composite oxide layer.

4. The ceramic substrate according to claim 1 , wherein the ceramic substrate has a cavity for mounting a semiconductor device.

5. The ceramic substrate according to claim 1 , wherein the composite oxide layer covers an entirety of the conductor layer.

6. An electrostatic chuck comprising:
a substrate main body; and
an electrostatic electrode provided inside of the substrate main body,
wherein the substrate main body comprises:
an insulator layer that is ceramics composed of aluminum oxide, the electrostatic electrode being provided inside of the insulator layer, and
a composite oxide layer of aluminum and silicon, the composite oxide layer covering the electrostatic electrode so as to be formed between the insulator layer and the electrostatic electrode.

7. The electrostatic chuck according to claim 6 , wherein the composite oxide layer is a layer composed of mullite, a layer composed of sillimanite or a layer in which mullite and sillimanite are mixed.

8. The electrostatic chuck according to claim 6 , wherein silicon exists locally in the composite oxide layer.

9. The electrostatic chuck according to claim 6 , wherein the insulator layer has a purity of aluminum oxide of 99.5% or higher.

10. The electrostatic chuck according to claim 6 , wherein the insulator layer has a relative density of 98% or higher.

11. The electrostatic chuck according to claim 6 wherein the insulator layer has an average particle diameter of aluminum oxide of 1.0 μm or larger and 3.0 μm or smaller.

12. The electrostatic chuck according to claim 6 , wherein the insulator layer and the electrostatic electrode are a fired body formed by co-firing.

13. The electrostatic chuck according to claim 6 , wherein the electrostatic electrode is a fired body having tungsten as a main component and containing nickel oxide, aluminum oxide and silicon dioxide.

14. The electrostatic chuck according to claim 6 , wherein the electrostatic electrode is a fired body obtained by firing a conductive paste in which an average particle diameter of tungsten is 0.5 μm or larger and 3.0 μm or smaller, and a tungsten component exists locally in the electrostatic electrode.

15. The electrostatic chuck according to claim 6 , wherein the electrostatic electrode is a fired body obtained by firing a conductive paste in which an average particle diameter of nickel oxide is 5.0 μm or larger and 15.0 μm or smaller, and nickel exists locally in the electrostatic electrode.

16. The electrostatic chuck according to claim 6 , wherein the electrostatic electrode is a fired body obtained by firing a conductive paste in which an average particle diameter of aluminum oxide is 0.1 μm or larger and 4.0 μm or smaller, and aluminum exists in the insulator layer, the electrostatic electrode and the composite oxide layer.

17. The electrostatic chuck according to claim 6 , wherein the electrostatic electrode is a fired body obtained by firing a conductive paste in which an average particle diameter of silicon dioxide is 0.1 μm or larger and 12.0 μm or smaller, and silicon exists locally in the electrostatic electrode and the composite oxide layer.

18. The electrostatic chuck according to claim 6 , wherein the composite oxide layer has a thickness corresponding to additive amounts of aluminum oxide and silicon dioxide added to a conductive paste for forming the electrostatic electrode.

19. The electrostatic chuck according to claim 6 , wherein the composite oxide layer covers an entirety of the electrostatic electrode.

Assignees

• Shinko Electric Ind Co

Inventors

• Minemura Tomotake

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10W99/00

  Subject matter not provided for in other groups of this subclass · CPC title

• H10W70/685

  comprising multiple insulating layers · CPC title

• H10W40/10

  Arrangements for heating · CPC title

• H10W70/692

  Ceramics or glasses · CPC title