Resonator and resonance device for vibrating in a contour vibration mode

Patent metadata

Field	Value
Publication number	US-12155369-B2
Application number	US-202117478437-A
Country	US
Kind code	B2
Filing date	Sep 17, 2021
Priority date	Apr 19, 2019
Publication date	Nov 26, 2024
Grant date	Nov 26, 2024

Abstract

A resonator is provided that includes a vibration member that includes a substrate, a metal layer formed along one of main surfaces of the substrate, and a piezoelectric thin film disposed between the substrate and the metal layer. The vibration member vibrates such that a main vibration is a contour vibration. Moreover, a frame surrounds at least a portion of the vibration member, and a support unit connects the vibration member to the frame. The vibration member includes depressed portions on or above the one of main surfaces where the piezoelectric thin film is removed.

First claim

The invention claimed is:

1. A resonator comprising:
a vibration member that includes a substrate, a first electrode disposed on a first main surface of the substrate, and a piezoelectric layer disposed between the substrate and the first electrode, with the vibration member configured to vibrate with a main vibration being a contour vibration;
a frame that surrounds at least a portion of the vibration member; and
a support member that connects the vibration member to the frame,
wherein the vibration member includes a depressed portion on or above the first main surface of the substrate where the piezoelectric layer is removed.

2. The resonator according to claim 1 , wherein the depressed portion exposes the first main surface of the substrate.

3. The resonator according to claim 1 , wherein the vibration member further includes a second electrode disposed between the substrate and the piezoelectric layer.

4. The resonator according to claim 3 , wherein the depressed portion exposes the second electrode.

5. The resonator according to claim 1 ,
wherein the vibration member vibrates with the main vibration being an expansion-contraction vibration in a first direction, and
wherein the depressed portion is disposed at a position that is offset from a center line in a second direction perpendicular to the first direction on the substrate in a plan view of the first main surface.

6. The resonator according to claim 5 ,
wherein the vibration member includes a plurality of the depressed portions, and
wherein a first depressed portion and a second depressed portion of the plurality of the depressed portions are disposed at positions symmetrical with respect to at least one of a center line in the first direction and the center line in the second direction on the substrate.

7. The resonator according to claim 5 , wherein the support member is connected to an end of the vibration member in the first direction.

8. The resonator according to claim 1 , wherein the substrate comprises silicon.

9. The resonator according to claim 8 , wherein the substrate comprises a degenerate silicon.

10. The resonator according to claim 1 , wherein the vibration member further includes a protection layer that covers the first electrode.

11. The resonator according to claim 1 , wherein the vibration member further includes a compensation layer disposed on a second main surface of the substrate.

12. The resonator according to claim 1 , wherein the depressed portion comprises four depressed portions that each have a square shape and that are symmetrically disposed with respect to each other on or above the first main surface of the substrate.

13. The resonator according to claim 7 , wherein the support member comprises a node generator.

14. The resonator according to claim 13 , wherein the node generator has a width that decreases as the node generator extends towards the frame, with the width being a maximum width closer to the vibration member than the frame.

15. The resonator according to claim 13 , wherein the node generator comprises a semicircular shape with a center of a circle that defines an arc of the semicircular shape being located at a center of the end of the vibration member.

16. The resonator according to claim 1 , further comprising:
an additional support member that connects the vibration member to the frame opposite the support member,
wherein the depressed portion comprises two depressed portions that each have a semi-circular shape that face the support member and the additional support member, respectively.

17. The resonator according to claim 1 , wherein the depressed portion comprises two depressed portions that each have a belt shape extending in a lengthwise direction of the vibration member, with the two depressed portions being located at positions symmetrical with respect to a center line in the lengthwise direction of the vibration member.

18. A resonance device comprising:
the resonator according to claim 1 ; and
a lid.

19. A resonator comprising:
a vibration member that includes a substrate, a first electrode disposed above the substrate, and a piezoelectric layer disposed between the substrate and the first electrode, with the vibration member having a main vibration mode being a contour vibration;
a frame that surrounds at least a portion of the vibration member; and
a support member that connects the vibration member to the frame,
wherein the vibration member includes at least one depression extending through the piezoelectric layer.

20. The resonator according to claim 19 , wherein the at least one depression exposes a main surface of the substrate.

Assignees

• Murata Manufacturing Co

Inventors

• Nishimura Toshio
• Kaajakari Ville

Classifications

• H03H9/171

  implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type · CPC title

• H03H3/013

  for obtaining desired frequency or temperature coefficient ({H03H3/0076} H03H3/04, H03H3/10 take precedence) · CPC title

• H03H9/02157

  Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness · CPC title

• H03H9/1057

  for microelectro-mechanical devices · CPC title

• H03H2009/0244

  Anchor loss · CPC title