Method of separating plurality of LED structures from wafer

Patent metadata

Field	Value
Publication number	US-12155004-B2
Application number	US-202117563393-A
Country	US
Kind code	B2
Filing date	Dec 28, 2021
Priority date	Dec 31, 2020
Publication date	Nov 26, 2024
Grant date	Nov 26, 2024

Abstract

The present disclosure relates to a method of separating a plurality of light-emitting diode (LED) structures from a wafer. According to the method, the LED structures each having a desired size, thickness, and shape can be separated from the wafer, using a commercialized wafer, without damage to the LED structures even without considering the presence or absence of a sacrificial layer and specifically pre-designing a thickness of semiconductor layers in the wafer from the time of wafer manufacturing.

First claim

What is claimed is:

1. A method of separating a plurality of light-emitting diode (LED) structures from an LED wafer on which the plurality of LED structures are formed, wherein the plurality of LED structures include a second portion of a doped n-type III-nitride semiconductor layer and the second portion is formed on and connected to a first portion of the doped n-type III-nitride semiconductor layer, the method comprising:
operation (1) of forming a protective film so as to surround an exposed surface of each of the plurality of LED structures but expose an upper surface of the first portion between adjacent LED structures to the outside;
operation (2) of immersing the LED wafer in an electrolyte, electrically connecting one terminal of a power supply to the LED wafer and the other terminal of the power supply to an electrode immersed in the electrolyte, and applying power to form a plurality of pores in the first portion; and
operation (3) of applying ultrasonic waves to the LED wafer to separate the plurality of LED structures from the first portion in which the plurality of pores are formed.

2. The method of claim 1 , wherein each of the plurality of LED structures further includes a photoactive layer and a p-type III-nitride semiconductor layer stacked on the second portion of the doped n-type III-nitride semiconductor layer.

3. The method of claim 1 , wherein the LED wafer on which the plurality of LED structures are formed is formed by operations including:
operation (a) of preparing the LED wafer in which layers including the doped n-type III-nitride semiconductor layer, a photoactive layer, and a p-type III-nitride semiconductor layer are stacked on a substrate; and
operation (b) of forming the plurality of LED structures by patterning an upper portion of the LED wafer such that a planar surface perpendicular to a direction, in which the layers in the individual LED structure are stacked, has a desired shape and size, and vertically etching the doped n-type III-nitride semiconductor layer to at least a partial thickness.

4. The method of claim 1 , wherein the protective film has a function of preventing damage to the LED structure due to the performing of operation (2).

5. The method of claim 1 , wherein
the protective film formed in operation (1) is a temporary protective film for preventing damage to the LED structure due to the performing of operation (2), and
the method further comprises forming a surface protective film that surrounds side surfaces of the LED structure after removing the temporary protective film between operation (2) and operation (3).

6. The method of claim 1 , wherein an area of a bottom surface of the LED structure, which is connected to the first portion, is 25 μm2 or less.

7. The method of claim 1 , wherein a thickness of the protective film is in a range of 5 nm to 100 nm.

8. The method of claim 1 , wherein the protective film includes one or more selected from the group consisting of silicon nitride (Si3N4), silicon dioxide (SiO2), aluminum oxide (Al2O3), hafnium oxide (HfO2), zirconium oxide (ZrO2), yttrium oxide (Y2O3), lanthanum oxide (La2O3), scandium oxide (Sc2O3), titanium dioxide (TiO2), aluminum nitride (AlN), and gallium nitride (GaN).

9. The method of claim 1 , wherein operation (2) is performed by applying a voltage of 3 V or more for 1 minute to 24 hours.

10. The method of claim 1 , wherein the electrolyte includes one or more oxyacids selected from the group consisting of oxalic acid, phosphoric acid, sulfurous acid, sulfuric acid, carbonic acid, acetic acid, chlorous acid, chloric acid, bromic acid, nitrous acid, and nitric acid.

11. The method of claim 1 , wherein in operation (2), an average diameter of the plurality of pores is 100 nm or less.

12. The method of claim 1 , wherein in operation (3), the plurality of LED structures are separated from the LED wafer by immersing the LED wafer in a bubble-forming solution, and then applying ultrasonic waves to the bubble-forming solution to generate bubbles and collapse the pores through energy generated when the generated bubbles burst in the pores.

13. The method of claim 12 , wherein a frequency of the ultrasonic wave applied to the bubble-forming solution is in a range of 10 kHz to 2 MHz to grow and collapse the bubbles so as to become local hot spots that generate a high pressure and temperature when the bubbles are collapsed.

14. The method of claim 1 , wherein operation (1) includes:
forming the protective film on the LED wafer so that the protective film is formed to surround side surfaces of each of the plurality of LED structures; and
removing the protective film formed on the upper surface of the first portion between the adjacent LED structures so that the upper surface of the first portion between the adjacent LED structures is exposed.

15. The method of claim 1 , further comprising:
between operation (2) and operation (3),
removing the protective film formed on an upper portion of each of the LED structures; and
forming a first electrode on the upper portion of the LED structure.

Assignees

• Univ Kookmin Ind Acad Coop Found

Inventors

• Do Young Rag

Classifications

• H10H20/84

  Coatings, e.g. passivation layers or antireflective coatings · CPC title

• H10H20/83

  Electrodes · CPC title

• H10H20/0137 Primary

  the light-emitting regions comprising nitride materials · CPC title

• H10H20/81

  Bodies · CPC title

• H10H20/01 Primary

  Manufacture or treatment · CPC title