Flow rate ratio control device, control program for a flow rate ratio control device and control method for a flow rate ratio control device

Patent metadata

Field	Value
Publication number	US-12153455-B2
Application number	US-202117451981-A
Country	US
Kind code	B2
Filing date	Oct 22, 2021
Priority date	Oct 23, 2020
Publication date	Nov 26, 2024
Grant date	Nov 26, 2024

Abstract

A flow rate ratio control device smoothly switches branches without generating abrupt changes in the flow rates of a fluid flowing therethrough. The device includes at least two branches from a main flow path, first and second fluid control valves each including a position sensor for a valve body, a storage unit that stores reference positions of the valve bodies in order to divide the fluid flowing into the branches at predetermined ratios, and a control unit that controls the ratios of the branches by performing position control to place the valve body of the first valve in the reference position, and by performing flow rate control to set the flow rate of the second valve to a target flow rate. When the valve body of the second valve reaches the reference position, the control unit switches the position control and flow rate control between the valves.

First claim

What is claimed is:

1. A flow rate ratio control device, comprising:
at least a first and a second branch flow path that branch off from a main flow path;
a first fluid control valve that is provided on the first branch flow path and includes a position sensor that detects a position of a valve body;
a second fluid control valve that is provided on the second branch flow path and includes a position sensor that detects a position of a valve body;
a memory that stores reference positions of the valve bodies in order to divide the flow rate of the fluid flowing through the main flow path between the first branch flow path and the second branch flow path at predetermined flow rate ratios in each of the fluid control valves; and
a flow rate ratio controller that controls flow rate ratios of at least the first and second branch flow paths by performing control of the first fluid control valve and control of the second fluid control valve, wherein
a flow rate sensor is provided in each of the first branch flow path and the second branch flow path;
the flow rate ratio controller is configured to switch between position control and flow rate control of each of the fluid control valves such that prior to the switch, the flow rate ratio controller simultaneously performs position control of the first fluid control valve such that the valve body thereof is placed in the reference position, and flow rate control of the second fluid control valve such that the flow rate thereof arrives at a target flow rate,
the switch occurs when the position of the valve body of the second fluid control valve whose flow rate is to be controlled reaches the reference position, and
after the switch, the flow rate ratio controller simultaneously performs position control of the second fluid control valve such that the valve body thereof is placed in the reference position, and flow rate control of the first fluid control valve such that the flow rate thereof reaches a target flow rate.

2. The flow rate ratio control device according to claim 1 , wherein, when the flow rate ratio controller gradually displaces the valve body of the second control valve whose flow rate is being controlled in order to change this valve body from a fully closed position to the reference position, and the position of the valve body arrives at this reference position, the position control and the flow rate control of each of the fluid control valves are switched, and position control is performed on the second fluid control valve such that the valve body thereof is placed in the reference position, and flow rate control is performed on the first fluid control valve such that the flow rate therein is gradually reduced to zero.

3. The flow rate ratio control device according to claim 1 , wherein the predetermined flow rate ratios are obtained by dividing the flow rate of the fluid flowing through the main flow path equally between the first branch flow path and the second branch flow path, and
the reference position is a position that has been set as a fully open position of the fluid control valve.

4. A non-transitory computer-readable storage medium storing a control program for a flow rate ratio control device that is provided in a flow rate ratio control device that includes at least a first and a second branch flow path that branch off from a main flow path, a first fluid control valve that is provided on the first branch flow path and includes a position sensor that detects a position of a valve body, a second fluid control valve that is provided on the second branch flow path and includes a position sensor that detects a position of a valve body, and a flow rate sensor provided in each of the first branch flow path and the second branch flow path, the control program being executable by a computer to:
store reference positions of the valve bodies in a memory in order to divide the flow rate of the fluid flowing through the main flow path between the first branch flow path and the second branch flow path at predetermined flow rate ratios in each of the fluid control valves; and
perform functions of a flow rate ratio controller that controls flow rate ratios of at least the first and second branch flow paths by performing control of the first fluid control valve and control of the second fluid control valve, wherein
the flow rate ratio controller is configured to switch between position control and flow rate control of each of the fluid control valves such that prior to the switch, the flow rate ratio controller simultaneously performs position control of the first fluid control valve such that the valve body thereof is placed in the reference position, and flow rate control of the second fluid control valve such that the flow rate thereof is set to a target flow rate,
the switch occurs when the valve body of the second fluid control valve whose flow rate is being controlled reaches the reference position, and
after the switch, the flow rate ratio controller simultaneously performs position control of the second fluid control valve such that the position of the valve body thereof is placed in the reference position, and flow rate control of the first fluid control valve such that the flow rate thereof is set to a target flow rate.

5. A control method for a flow rate ratio control device that is provided in a flow rate ratio control device that includes at least a first and a second branch flow path that branch off from a main flow path, a first fluid control valve that is provided on the first branch flow path and includes a position sensor that detects a position of a valve body, a second fluid control valve that is provided on the second branch flow path and includes a position sensor that detects a position of a valve body, and a flow rate sensor provided in each of the first branch flow path and the second branch flow path,
and that comprises:
a storage step in which reference positions of the valve bodies are stored in order to divide the flow rate of the fluid flowing through the main flow path between the first branch flow path and the second branch flow path at predetermined flow rate ratios in each of the fluid control valves; and
a flow rate ratio control step in which flow rate ratios of at least the first and second branch flow paths are controlled as a result of performing control of the first fluid control valve and control of the second fluid control valve, wherein

in the flow rate ratio control step, each of the fluid control valves are switched between position control and flow rate control such that prior to the switch, position control is performed on the first fluid control valve such that the valve body thereof is placed in the reference position, and simultaneously, flow rate control is performed on the second fluid control valve such that the flow rate thereof is set to a target flow rate,
the switch occurs when the valve body of the second fluid control valve whose flow rate is being controlled reaches the reference position, and
after the switch, position control is thereafter-simultaneously performed on the second fluid control valve such that the position of the valve body thereof is placed in the reference position, while flow rate control is performed on the first fluid control valve such that the flow rate thereof is set to a target flow rate.

Assignees

• Horiba Stec Co Ltd

Inventors

• Gundlach Maximilian
• Owens Ryan
• Hoke Thomas

Classifications

• G05D11/132

  by controlling the flow of the individual components (G05D11/133 takes precedence) · CPC title

• G01F15/005 Primary

  Valves (valves in general F16K) · CPC title

• G05D11/131

  by measuring the values related to the quantity of the individual components (G05D11/139 takes precedence) · CPC title

• G05D7/0664 Primary

  the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow (G05D7/0652 takes precedence; ratio control G05D11/13) · CPC title

• G05D7/0635 Primary

  by action on throttling means (G05D7/0688, G05D7/0694 take precedence) · CPC title