Vacuum pump system and method for operating a vacuum pump system

Patent metadata

Field	Value
Publication number	US-12140146-B2
Application number	US-202217672536-A
Country	US
Kind code	B2
Filing date	Feb 15, 2022
Priority date	Dec 15, 2016
Publication date	Nov 12, 2024
Grant date	Nov 12, 2024

Abstract

A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

First claim

What is claimed is:

1. A vacuum pump system, comprising:
a main vacuum pump adapted to be connected to a chamber to be evacuated;
an auxiliary pump connected to an outlet of the main vacuum pump;
a sealing gas supply device; and
a control device connected to the sealing gas supply device and to the auxiliary pump, the control device being configured to switch the sealing gas supply device and/or the auxiliary vacuum pump off and on as a function of at least two predetermined control variables,
wherein the at least two predetermined control variables comprise a pressure falling below a value of 1 mbar at an inlet of the main vacuum pump and a second pressure falling below a value of 1020 mbar at the outlet of the main vacuum pump.

2. The vacuum pump system of claim 1 , wherein the at least two predetermined control variables comprise a first variable configured to control the sealing gas supply device and a second variable configured to control the auxiliary vacuum pump.

3. The vacuum pump system of claim 2 , wherein the first variable and the second variable are a common variable.

4. The vacuum pump system of claim 2 , wherein the first variable and the second variable are different variables.

5. The vacuum pump system of claim 1 , wherein the at least two predetermined control variables further comprise an entering or a termination of a standby mode.

6. The vacuum pump system of claim 1 , wherein the at least two predetermined control variables further comprise a characteristic value of an electric motor driving the main vacuum pump.

7. The vacuum pump system of claim 1 , wherein the at least two predetermined control variables further comprise a power consumption of an electric motor driving the main vacuum pump.

Assignees

• Leybold Gmbh

Inventors

• Pelikan Max
• Ghislotti Raffaello
• Schiller Dirk
• Reinhard Daniel

Classifications

• F04B41/06

  Combinations of two or more pumps · CPC title

• F04B37/14

  to obtain high vacuum · CPC title

• F04C27/02

  Liquid sealing for high-vacuum pumps {or for compressors} · CPC title

• F04C23/006

  having complementary function · CPC title

• F04C28/08

  characterised by varying the rotational speed · CPC title