Silicon-containing oxide-coated aluminum nitride particle and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-12139618-B2
Application number	US-202217855481-A
Country	US
Kind code	B2
Filing date	Jun 30, 2022
Priority date	Aug 24, 2018
Publication date	Nov 12, 2024
Grant date	Nov 12, 2024

Abstract

A silicon-containing oxide-coated aluminum nitride particle including an aluminum nitride particle and a silicon-containing oxide coating covering the surface of the aluminum nitride particle. The content of carbon atoms is less than 1000 ppm by mass, and an Si/Al atom ratio of the surface as measured by AES analysis is 0.29 or more and 5.0 or less. In another aspect, the coverage of the silicon-containing oxide coating covering the surface of the aluminum nitride particle as measured by LEIS analysis is 15% or more and 100% or less.

First claim

The invention claimed is:

1. A silicon-containing oxide-coated aluminum nitride particle including an aluminum nitride particle and a silicon-containing oxide coating covering the surface of the aluminum nitride particle, wherein
the content of carbon atoms is less than 1000 ppm by mass,
the coverage of the silicon-containing oxide coating covering the surface of the aluminum nitride particle as measured by LEIS analysis is 15% or more and 100% or less, and
the silicon-containing oxide-coated aluminum nitride particle satisfies the following formula (4) wherein x represents the specific surface area (m 2 /g) of a silicon-containing oxide-coated aluminum nitride particle as determined by a BET method, and y represents the content of silicon atoms (ppm by mass) in a silicon-containing oxide-coated aluminum nitride particle,
y≤ 1000 x+ 500  (4).

2. The silicon-containing oxide-coated aluminum nitride particle according to claim 1 , wherein the coverage of the silicon-containing oxide coating covering the surface of the aluminum nitride particle as determined by LEIS analysis is 15% or more and 40% or less.

3. The silicon-containing oxide-coated aluminum nitride particle according to claim 1 , wherein the content of carbon atoms is 50 ppm by mass or more.

4. The silicon-containing oxide-coated aluminum nitride particle according to claim 1 ,
wherein the concentration of ammonia eluted into aqueous hydrochloric acid is 10 mg/L or less when 3 g of the silicon-containing oxide-coated aluminum nitride particle is immersed in 17 g of aqueous hydrochloric acid adjusted to pH 4 at 85° C. for 2 hours.

Assignees

• Showa Denko Kk
• Resonac Corp

Inventors

• Otsuka Yuki
• Okamoto Hidetoshi
• Minorikawa Naoki

Classifications

• C09C1/40

  Compounds of aluminium {(C09C1/0009, C09C1/0015, C09C1/0078, C09C1/32 take precedence)} · CPC title

• C04B2235/5409

  expressed by specific surface values · CPC title

• C04B2235/483

  Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes · CPC title

• C04B2235/3865

  Aluminium nitrides · CPC title

• C04B35/62889

  with a discontinuous coating layer · CPC title