Ultrasonic transducer

Patent metadata

Field	Value
Publication number	US-12138658-B2
Application number	US-202217894217-A
Country	US
Kind code	B2
Filing date	Aug 24, 2022
Priority date	Mar 26, 2020
Publication date	Nov 12, 2024
Grant date	Nov 12, 2024

Abstract

An ultrasonic transducer includes first and second acoustic transducers and a housing with a bottomed tubular shape. The second acoustic transducer includes an annular section supporting a second membrane section and contacting an entire periphery of the second membrane section, and an acoustic matching plate facing the second membrane section and spaced apart from the second membrane section. The acoustic matching plate is connected to a surrounding wall portion defining a sealed space with the housing. An ultrasonic transmission path sandwiched between the first membrane section and the second membrane section is provided in the sealed space. A maximum inner width of the ultrasonic transmission path is smaller than a maximum inner width of the surrounding wall portion.

First claim

What is claimed is:

1. An ultrasonic transducer comprising:
a first acoustic transducer including a first membrane section to perform flexural vibration;
a second acoustic transducer including a second membrane section facing the first membrane section and being spaced apart from the first membrane section, the second acoustic transducer being structured to vibrate in a thickness direction; and
a housing with a bottomed tubular shape, the housing including a bottom portion facing the first membrane section and being spaced apart from the first membrane section in the thickness direction, and a surrounding wall portion surrounding the first membrane section and the second membrane section and being spaced apart from each of the first membrane section and the second membrane section; wherein
the second acoustic transducer further includes an annular section supporting the second membrane section and being in contact with an entire or substantially an entire periphery of the second membrane section, and an acoustic matching plate facing the second membrane section and being spaced apart from the second membrane section, the acoustic matching plate being connected to the surrounding wall portion to define a sealed space with the housing;
an ultrasonic transmission path sandwiched between the first membrane section and the second membrane section is provided in the sealed space; and
a maximum inner width of the ultrasonic transmission path is smaller than a maximum inner width of the surrounding wall portion.

2. The ultrasonic transducer according to claim 1 , wherein the acoustic matching plate includes a recessed portion at a position facing the second membrane section.

3. The ultrasonic transducer according to claim 1 , wherein the second membrane section and the annular section are defined by a common structure.

4. The ultrasonic transducer according to claim 1 , wherein an area of an outer shape of the second membrane section is larger than an area of an outer shape of the first membrane section when viewed from the thickness direction.

5. The ultrasonic transducer according to claim 1 , wherein a dimension of a length of the ultrasonic transmission path is the same or substantially the same as a dimension of a thickness of a base section including an annular shape and supporting the first membrane section while being in contact with an entire or substantially an entire periphery of the first membrane section.

6. The ultrasonic transducer according to claim 1 , wherein the first acoustic transducer includes an oscillator made of a ceramic or an oscillator defined by a micro-electro-mechanical system.

7. The ultrasonic transducer according to claim 5 , wherein the base section is made of Si or silicon on insulator.

8. The ultrasonic transducer according to claim 1 , wherein the first membrane section is defined by a portion of a multilayer thin film.

9. The ultrasonic transducer according to claim 8 , wherein the multilayer thin film includes PZT, AlN, lithium niobate, or lithium tantalate.

10. The ultrasonic transducer according to claim 1 , wherein an inner diameter of the first membrane section is about 0.7 mm to about 1.0 mm.

11. The ultrasonic transducer according to claim 1 , wherein an outer shape of the first membrane section is circular or substantially circular or rectangular or substantially rectangular.

12. The ultrasonic transducer according to claim 1 , wherein the first membrane section includes a slit provided therein.

13. The ultrasonic transducer according to claim 12 , wherein a width of the slit is about 10 μm or less.

14. The ultrasonic transducer according to claim 1 , wherein the flexural vibration is performed in a frequency range of about 20 kHz to about 60 kHz.

15. The ultrasonic transducer according to claim 1 , wherein the annular section of the second acoustic transducer includes a metal, a semiconductor, or a resin.

16. The ultrasonic transducer according to claim 1 , wherein the annular section of the second acoustic transducer includes Si or Al.

17. The ultrasonic transducer according to claim 1 , wherein the acoustic matching plate of the second acoustic transducer include Al or polypropylene.

18. The ultrasonic transducer according to claim 1 , wherein the second acoustic transducer includes a micro-electro-mechanical system element including a mechanical oscillator.

19. The ultrasonic transducer according to claim 1 , wherein the housing includes Al or polypropylene.

Assignees

• Murata Manufacturing Co

Inventors

• Kurokawa Fumiya
• Aida Yasuhiro
• Ikeuchi Shinsuke
• Umezawa Seiji
• Suzuki Masayuki

Classifications

• G10K11/02

  Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators · CPC title

• B06B1/067

  which is used as, or combined with, an impedance matching layer · CPC title

• B06B1/0666

  used as a diaphragm · CPC title

• B06B1/0651

  of circular shape · CPC title

• B06B1/0607

  using multiple elements (B06B1/064 and B06B1/0688 take precedence) · CPC title